An apparatus wherein, in plane view, a first semiconductor region of a first conductivity type overlaps at least a portion of a third semiconductor region, a second semiconductor region overlaps at least a portion of a fourth semiconductor region of a second conductivity type, a height of a potential of the third semiconductor region with respect to an electric charge of the first conductivity type is lower than that of the fourth semiconductor region, and a difference between a height of a potential of the first semiconductor region and that of the third semiconductor region is larger than a difference between a height of a potential of the second semiconductor region and that of the fourth semiconductor region.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A photodetection apparatus comprising: a semiconductor substrate having a first surface and a second surface opposite to the first surface; and a pixel unit having a plurality of pixels each including an avalanche diode, the plurality of pixels being arranged on the semiconductor substrate, wherein the avalanche diode includes:, a first semiconductor region of a first conductivity type arranged in a first depth with respect to the first surface; a second semiconductor region of a second conductivity type arranged in a second depth greater than the first depth with respect to the first surface; a third semiconductor region arranged in a third depth greater than the second depth with respect to the first surface and configured to generate electric charge; a fourth semiconductor region of the second conductivity type arranged between the third semiconductor regions of the respective avalanche diodes; and a fifth semiconductor region of the second conductivity type arranged in a fourth depth greater than the third depth with respect to the first surface, wherein the first semiconductor region and the second semiconductor region are configured so as to form a region where avalanche amplification occurs, wherein an area of a region where the first semiconductor region and the second semiconductor region overlap is smaller than an area of the third semiconductor region in a plane view, and wherein the fourth semiconductor region is electrically connected to the second semiconductor region and the fifth semiconductor region.
2. The photodetection apparatus according to claim 1, wherein the electric charge generated in the third semiconductor region is collected into the region where the avalanche amplification occurs.
3. The photodetection apparatus according to claim 1, wherein the first semiconductor region is entirely overlapped with the second semiconductor region in the plane view.
4. The photodetection apparatus according to claim 1, wherein an impurity concentration of the first semiconductor region is 6.0×1018 [atms/cm3] or more, and an impurity concentration of the second semiconductor region is 1.0×1017 [atms/cm3] or less.
5. The photodetection apparatus according to claim 1, wherein the third semiconductor region is a semiconductor region of the first conductivity type and an impurity concentration is lower than the impurity concentration of the first semiconductor region.
6. The photodetection apparatus according to claim 5, wherein, in the third semiconductor region, a height of a potential of a region farther from the fourth semiconductor region is lower than a height of a potential of a region close to the fourth semiconductor region, in a direction parallel to the first surface.
7. The photodetection apparatus according to claim 1, wherein, with respect to electric charge of the first conductivity type, a height of a potential of the third semiconductor region is lower at a shallow position with respect to the first surface than at a deep position with respect to the first surface.
8. The photodetection apparatus according to claim 1, wherein the area of the region where the first semiconductor region and the second semiconductor region overlap is smaller than an area of the second semiconductor region in the plane view.
9. The photodetection apparatus according to claim 1, wherein the first conductivity type is an N type and the second conductivity type is a P type.
10. The photodetection apparatus according to claim 1, further comprising a different semiconductor substrate different from the semiconductor substrate, wherein a control unit configured to control a potential supplied to the first semiconductor region is arranged on the different semiconductor substrate, wherein the semiconductor substrate and the different semiconductor substrate are stacked, and wherein the first semiconductor region and the control unit are electrically connected via a conductive line.
11. The photodetection apparatus according to claim 1, further comprising a microlens, wherein the microlens is arranged such that an optical axis of the microlens overlaps the second semiconductor region.
12. A photo-detection system including the photodetection apparatus according to claim 1 comprising: a wavelength conversion unit configured to convert light of a first wavelength range into light of a second wavelength range different from the first wavelength range, the light of the second wavelength range being emitted from the wavelength conversion unit and entering the photodetection apparatus; and a signal processing unit configured to perform a combination process of a plurality of images obtained from a plurality of digital signals, the plurality of digital signals being corresponding to the second wavelength range and held in the photodetection apparatus.
13. The photo-detection system including the photodetection apparatus according to claim 1 comprising: a light emission unit configured to emit light to be detected by the photodetection apparatus; and a distance calculation unit configured to calculate a distance using a digital signal corresponding to the light detected by the photodetection apparatus and held in the photodetection apparatus.
14. A moving body comprising: the photodetection apparatus according to claim 1; a distance calculation unit configured to obtain distance information indicating a distance to a target object based on a signal from the photodetection apparatus, and a control unit configured to control the moving body based on the distance information.
15. A photo-detection system comprising: the photodetection apparatus according to claim 1; and a signal processing unit configured to process a signal from the photodetection apparatus.
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November 6, 2023
February 18, 2025
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