Sealed fluid chamber with through semiconductor vias for biomolecular sensors

1. A device, comprising: a plurality of sensor chips, each sensor chip comprising a set of sensor elements at least partially disposed on a first side of a substrate, wherein each sensor element of the set of sensor elements: is configured to sense an analyte; and comprises an associated set of through silicon vias (TSVs), each TSV of the set of TSVs extending from an associated portion of the sensor element through the substrate to a second side of the substrate that is opposite the first side; a fluid chamber proximate to the first side of the substrate and comprising an inner portion in fluid communication with the set of sensor elements; a fluid channel in fluid communication with the fluid chamber, wherein the fluid channel is a tube having a diameter of at least 1 mm that fluidly connects a fluid reservoir to the fluid chamber; and a sealing member between the fluid chamber and the first side of the substrate.

2. The device of claim 1, wherein the set of sensor elements comprise a silicon sensor.

3. The device of claim 2, wherein the set of sensor elements comprise a plurality of silicon sensors.

4. The device of claim 3, wherein a sensor element of each set of sensor elements comprises a source, a drain, and at least one nanowire in electrical communication with the source and the drain.

5. The device of claim 4, wherein the set of TSVs comprises a first TSV in electrical communication with the source, and a second TSV in electrical communication with the drain.

6. The device of claim 1, wherein the set of sensor elements are functionalized to detect an analyte.

7. The device of claim 1, further comprising a second fluid channel in fluid communication with the fluid chamber.

8. The device of claim 7, wherein the fluid channel is an input fluid channel and the second fluid channel is an output fluid channel.

9. The device of claim 1, wherein the sealing member is an o-ring.

10. The device of claim 9, wherein the o-ring comprises a material selected from the group consisting of a permanent glue, a gel, a polymer, rubber and silicone.

11. The device of claim 9, wherein the o-ring comprises a first portion substantially in contact with the first side of the substrate.

12. The device of claim 11, wherein the o-ring comprises a second portion substantially in contact with an edge of the fluid chamber.

13. The device of claim 9, wherein the o-ring comprises a leak-resistant seal between the top surface of the substrate and the fluid chamber.

14. The device of claim 1, wherein a TSV from the set of TSVs comprises a top electrode disposed at least partially on the first side of the substrate, wherein the top electrode is in electrical communication with at least one sensor element of the set of sensor elements.

15. The device of claim 14, wherein the TSV further comprises a conductive pathway in electrical communication with the top electrode, wherein the conductive pathway extends through the substrate.

16. The device of claim 15, wherein the conductive pathway comprises a metal.

17. The device of claim 15, wherein the TSV further comprises a bonding pad proximate to the second side of the substrate.

18. The device of claim 17, wherein the TSV further comprises a dielectric spacer disposed between the conductive pathway and the substrate.

19. The device of claim 18, wherein the dielectric spacer is disposed between the top electrode and the substrate, between the bonding pad and the substrate, or both.