A test socket is provided and includes a base with a first surface, a second surface opposing the first surface and through holes, a conductive elastic sheet located on the first surface, and a plurality of elastic metal members with first contact ends facing toward the conductive elastic sheet. The first contact ends include bumps suitable for inserting into the conductive elastic sheet, and each elastic metal member may be prevented from being contaminated by covering the base with the conductive elastic sheet. When the elastic metal members are pressured to insert the bumps into the conductive elastic sheet, a low resistance better than the resistance of the elastic metal members without squeezing can be obtained. When the bumps are inserted into the conductive elastic sheet, the surface of the bumps can be cleaned and the elastic metal members are stably in contact with the conductive elastic sheet.
Legal claims defining the scope of protection, as filed with the USPTO.
. A test socket, comprising:
. The test socket of, wherein the bump of the elastic metal member is suitable for stabbing into a surface of the conductive elastic sheet so as to be inserted into an interior of the conductive elastic sheet.
. The test socket of, wherein the bump of the elastic metal member is in plural and pointed.
. The test socket of, wherein the bump of the elastic metal member is pressed against the conductive elastic sheet and inserted into the conductive elastic sheet, such that the conductive elastic sheet covers the bump.
. The test socket of, wherein the elastic metal member is a spring probe, a vertical probe, or a micro-electromechanical probe.
. The test socket of, wherein the conductive elastic sheet is disposed on a frame base of the base and spaced an interval distance apart from the bump of the elastic metal member.
. The test socket of, wherein a length of the bump is greater than or equal to 0.01 millimeters (mm) and less than a thickness of the conductive elastic sheet.
. The test socket of, wherein the elastic metal member further comprises an elastomer disposed in each of the through holes, a metal block rotatably disposed on the elastomer and for connecting to the first contact end, and a second contact end connected to the metal block and extending towards the second surface.
. The test socket of, wherein the base is a metal base body, and the conductive elastic sheet comprises a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein a width of the conductive elastic region is larger than a diameter of the through hole, such that the conductive elastic region is in contact with the base.
. The test socket of, wherein a thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 2 mm.
. The test socket of, wherein a thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.
. The test socket of, wherein the conductive elastic sheet comprises a substrate and a plurality of conductive particles distributed in the substrate.
. The test socket of, wherein a particle diameter of the conductive particles is greater than or equal to 0.005 mm and less than or equal to 0.1 mm.
. The test socket of, wherein a proportion of the plurality of conductive particles to the conductive elastic sheet is greater than or equal to 30% and less than or equal to 90%.
. The test socket of, further comprising another conductive elastic sheet located below the second surface of the base.
. The test socket of, wherein the conductive elastic sheet has a first contact surface and a second contact surface opposing the first contact surface, wherein the conductive elastic sheet is disposed on the base with the first contact surface facing the first surface, and the second contact surface corresponding to each of the elastic metal members has a plurality of convex pads protruding from the second contact surface.
. The test socket of, wherein the conductive elastic sheet covers the first surface of the base and seals the through hole.
. The test socket of, wherein the conductive elastic sheet comprises a substrate with a plurality of conductive elastic regions and a plurality of conductive particles distributed in the conductive elastic regions, and at least one of the conductive elastic regions corresponds to at least two of the elastic metal members.
. The test socket of, further comprising a conductive member, wherein the conductive elastic sheet comprises a substrate with a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in the conductive elastic regions, wherein at least two of the conductive elastic regions are electrically connected by the conductive member.
. The test socket of, wherein the elastic metal member is a ground probe or a power probe.
. The test socket of, wherein the conductive elastic sheet is disposed with a support body on a peripheral side thereof, and the conductive elastic sheet is disposed on the base by the support body, so that there is a gap between the conductive elastic sheet and the first surface or the second surface, such that both ends of each of the elastic metal members are respectively protruded from the first surface and the second surface of the base and in contact with the conductive elastic sheet.
. The test socket of, wherein when the bump of the elastic metal member stabs into a lower surface of the conductive elastic sheet and is inserted in the conductive elastic sheet, a distance between a top end of the bump and an upper surface of the conductive elastic sheet is less than 0.35 mm, or a proportion of the distance between the top end of the bump and the upper surface of the conductive elastic sheet to a thickness of the conductive elastic sheet is less than 85%.
. A test socket, comprising:
. The test socket of, wherein the thickness of the conductive elastic sheet is less than or equal to 0.4 mm.
. The test socket of, wherein the elastic metal member has a first contact end facing the conductive elastic sheet, wherein the first contact end comprises a bump suitable for stabbing into a surface of the conductive elastic sheet, and the bump is able to insert into an interior of the conductive elastic sheet.
. The test socket of, wherein the bump is in plural and pointed.
. The test socket of, wherein a length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.
. The test socket of, wherein the base is a metal base body, and the conductive elastic sheet comprises a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in the conductive elastic regions, wherein a width of the conductive elastic region is larger than a diameter of the through hole, such that the conductive elastic region is in contact with the base.
. The test socket of, wherein the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.
. The test socket of, wherein the conductive elastic sheet comprises a substrate and a plurality of conductive particles distributed in the substrate.
. The test socket of, further comprising a conductive member, wherein the conductive elastic sheet comprises a substrate with a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in the conductive elastic region, wherein at least two of the conductive elastic regions are electrically connected by the conductive member.
. A test socket, comprising:
. The test socket of, wherein the elastic metal member has a first contact end facing the conductive elastic sheet, and the first contact end comprises a bump suitable for inserting in the conductive elastic sheet.
. The test socket of, wherein the bump of the elastic metal members is suitable for stabbing into a surface of the conductive elastic sheet so as to be inserted into an interior of the conductive elastic sheet.
. The test socket of, wherein the bump of the elastic metal member is in plural and pointed.
. The test socket of, wherein a length of the bump is greater than or equal to 0.01 mm and less than a thickness of the conductive elastic sheet.
. The test socket of, wherein the conductive elastic sheet comprises a substrate and a plurality of conductive particles distributed in the substrate.
. The test socket of, wherein a thickness of the conductive elastic sheet is less than or equal to 0.4 mm.
. A test socket, comprising:
. The test socket of, wherein the elastic metal member has a bump suitable for stabbing into a surface of the conductive elastic sheet so as to be inserted into an interior of the conductive elastic sheet.
. The test socket of, wherein the conductive elastic sheet is disposed on a frame base of the metal base and spaced an interval distance apart from the bumps of the elastic metal members.
. The test socket of, wherein the elastic metal member is a ground probe and is connected to the metal base.
. The test socket of, further comprising a conductive member, wherein the conductive elastic sheet comprises a substrate with a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in the conductive elastic region, wherein at least two of the conductive elastic regions are electrically connected by the conductive member.
. The test socket of, wherein a width of the conductive elastic region is larger than a diameter of the through hole, such that the conductive elastic region is in contact with the metal base.
. The test socket of, further comprising another conductive elastic sheet located below the second surface of the metal base.
. The test socket of, wherein sidewall of the through hole is a continuous surface, and the continuous surface substantively has a constant distance from side surface of the elastic metal member disposed in the through hole.
Complete technical specification and implementation details from the patent document.
The present disclosure relates to the semiconductor testing technology, and more particularly, to a test socket.
In semiconductor packaging testing, a test socket with a plurality of probes is usually used for placing a device under test such as a semiconductor package or chip, and then each probe is electrically connected to the semiconductor package or chip, so that the test signal is transmitted to the semiconductor package or chip through each probe to achieve the purpose of testing.
As the test conditions become increasingly stringent, the requirements for signal quality during the test process are getting higher and higher. Therefore, the transmission path between the probe and the device under test plays a very important role in the test interface. As such, how to shorten the transmission path or improving the contact between contact interfaces has become one of the issues to be solved in the industry.
As shown in, a schematic diagram of a conventional test socket for testing a device under test. In, a test socketcomprises a basewith a plurality of conductive through holesand a probedisposed in each of the conductive through holes, wherein the test socketis disposed on a testing apparatusto receive test signals from the testing apparatus, wherein the testing apparatuscan be, for example, a printed circuit board (PCB). During the test, a device under test (DUT)with a plurality of conductive blocks(such as solder balls) is placed on the base, and force is applied downward to the DUT, so that the conductive blocksof the DUTare in direct electrical contact with probe tips of the probes, and the test signal can be transmitted to the DUTthrough each of the probesand each of the conductive blocks, so that the DUTcan be tested.
However, during the test process, each of the probe tips of the probesis often a spherical or needle-shaped structure, and the probesof the test socketand the conductive blocksof the DUTare both made with solid hard metal, so the probe tips and the conductive blocksare connected in a point contact manner. Therefore, there are problems of poor contact and poor stability between the probe tips and the conductive blocksthat will lead to a higher contact resistance at the interface (i.e., the places where the probe tips and the conductive blocksbeing contacted). As the contact resistance increases, a serious electro-thermal effect will occur when the current of the test signal passes through the contacts between the probe tips and the conductive blocks, and the high temperature generated by the electro-thermal effect will affect the elastic force of the probes, thereby decreasing the elastic force of the probes. After that, the contact between the probesand the DUTwill become worse due to being unstable, and eventually triggering a series of vicious cycles. In addition, since the probe tip of the conventional probeis driven by the elastic force of an internal spring to push against the conductive blockof the DUTwhen under testing, the probe tip is wearing and generates metal debris. The metal debris may cause the probe tip to become contaminated and the aforementioned contact resistance to increase, and may even cause a short circuit between the conductive blocksor the probe tips and damage the DUT. Therefore, special cleaning procedure must be executed frequently to clean the probe tips to avoid the various adverse reactions mentioned above. Also, when the probeis damaged due to the wear of the probe tip, the unusable probemust be replaced. However, there are many probesin the test socket, so it is quite difficult, time-consuming and very inconvenient to find the damaged one among many probes.
In view of the above problems, how to provide a test socket that can provide good contact stability between the probes and the device under test, and at the same time effectively reduce the contact resistance and avoid the subsequent electro-thermal effect, has become a current goal that people in this technical field are eager to pursue.
In view of the aforementioned shortcomings of the prior art, the present disclosure provides a test socket, which comprises: a base having a first surface, a second surface opposing the first surface, and a plurality of through holes connecting the first surface and the second surface; a conductive elastic sheet located above the first surface of the base; and a plurality of elastic metal members respectively disposed in the plurality of through holes, wherein each of the elastic metal members has a first contact end facing the conductive elastic sheet, and the first contact end comprises a bump suitable for inserting in the conductive elastic sheet.
In one embodiment, the bump of each of the elastic metal members is suitable for stabbing into a surface of the conductive elastic sheet so as to be inserted into an interior of the conductive elastic sheet.
In one embodiment, the bump of each of the elastic metal members is in plural and pointed.
In another embodiment, the bump of each of the elastic metal members is pressed against the conductive elastic sheet and inserted into the conductive elastic sheet, such that the conductive elastic sheet covers the bump.
In another embodiment, each of the elastic metal members is a spring probe, a verticalprobe, or a micro-electromechanical probe.
In another embodiment, the conductive elastic sheet is disposed on a frame base of the base and spaced an interval distance apart from the bump of each of the elastic metal members.
In another embodiment, a length of the bump is greater than or equal to 0.01 millimeters (mm) and less than a thickness of the conductive elastic sheet.
In another embodiment, each of the elastic metal members further comprises an elastomer disposed in each of the through holes, a metal block rotatably disposed on the elastomer and for connecting to the first contact end, and a second contact end connected to the metal block and extending towards the second surface.
In another embodiment, the base is a metal base body, and the conductive elastic sheet comprises a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein a width of each of the conductive elastic regions is larger than a diameter of each of the through holes, such that each of the conductive elastic regions is in contact with the base.
In another embodiment, a thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 2 mm.
In another embodiment, a thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.
In another embodiment, the conductive elastic sheet comprises a substrate and a plurality of conductive particles distributed in the substrate.
In another embodiment, a particle diameter of each of the conductive particles is greater than or equal to 0.005 mm and less than or equal to 0.1 mm.
In another embodiment, a proportion of the plurality of conductive particles to the conductive elastic sheet is greater than or equal to 30% and less than or equal to 90%.
In another embodiment, the present disclosure further comprises another conductive elastic sheet located below the second surface of the base.
In another embodiment, the conductive elastic sheet has a first contact surface and a second contact surface opposing the first contact surface, wherein the conductive elastic sheet is disposed on the base with the first contact surface facing the first surface, and the second contact surface corresponding to each of the elastic metal members has a plurality of convex pads protruding from the second contact surface.
In another embodiment, the conductive elastic sheet covers the first surface of the base and seals each of the through holes.
In another embodiment, the base further comprises a frame body disposed on a peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet, wherein the conductive elastic sheet is disposed on the first surface of the base, and the frame body and upper side surface of the conductive elastic sheet define a fluid space in communication with the fluid inlet and the fluid outlet.
In another embodiment, the conductive elastic sheet comprises a substrate with a plurality of conductive elastic regions and a plurality of conductive particles distributed in each of the conductive elastic regions, and at least one of the conductive elastic regions corresponds to at least two of the elastic metal members.
In another embodiment, the present disclosure further comprises a conductive member, wherein the conductive elastic sheet comprises a substrate with a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein at least two of the conductive elastic regions are electrically connected by the conductive member.
In another embodiment, the elastic metal member is a ground probe or a power probe.
In another embodiment, the conductive elastic sheet is disposed with a support body on a peripheral side thereof, and the conductive elastic sheet is disposed on the base by the support body, so that there is a gap between the conductive elastic sheet and the first surface or the second surface, such that both ends of each of the elastic metal members are respectively protruded from the first surface and the second surface of the base and in contact with the conductive elastic sheet.
In yet another embodiment, when the bump of each of the elastic metal members stabs into a lower surface of the conductive elastic sheet and is inserted in the conductive elastic sheet, a distance between a top end of the bump and an upper surface of the conductive elastic sheet is less than 0.35 mm, or a proportion of the distance between the top end of the bump and the upper surface of the conductive elastic sheet to a thickness of the conductive elastic sheet is less than 85%.
The present disclosure further discloses a test socket, which comprises: a base having a first surface, a second surface opposing the first surface, and a plurality of through holes connecting the first surface and the second surface; a plurality of elastic metal members respectively disposed in the plurality of through holes; and a conductive elastic sheet located above the base and the plurality of elastic metal members and having a thickness of less than or equal to 2 mm.
In one embodiment, the thickness of the conductive elastic sheet is less than or equal to 0.4 mm.
In another embodiment, each of the elastic metal members has a first contact end facing the conductive elastic sheet, wherein the first contact end comprises a bump suitable for stabbing into a surface of the conductive elastic sheet, and the bump is able to insert into an interior of the conductive elastic sheet.
In another embodiment, the bump is in plural and pointed.
In another embodiment, a length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.
In another embodiment, the base is a metal base body, and the conductive elastic sheet comprises a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein a width of each of the conductive elastic regions is larger than a diameter of each of the through holes, such that each of the conductive elastic regions is in contact with the base.
In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.
In another embodiment, the conductive elastic sheet comprises a substrate and a plurality of conductive particles distributed in the substrate.
In another embodiment, the base further comprises a frame body disposed on a peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet, wherein the conductive elastic sheet is disposed on the first surface of the base and seals each of the through holes, and the frame body and upper side surface of the conductive elastic sheet define a fluid space in communication with the fluid inlet and the fluid outlet.
In another embodiment, the present disclosure further comprises a conductive member, wherein the conductive elastic sheet comprises a substrate with a plurality of conductive elastic regions corresponding to the elastic metal members respectively and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein at least two of the conductive elastic regions are electrically connected by the conductive member.
The present disclosure further discloses a test socket, which comprises: a base; a conductive elastic sheet located on the base; and a plurality of elastic metal members disposed in the base, wherein a contact resistance between the elastic metal members and the conductive elastic sheet when the elastic metal members are inserted in the conductive elastic sheet is smaller than a contact resistance when the elastic metal members directly contact on conductive blocks of a device under test.
In another embodiment, the base comprises a first surface, a second surface opposing the first surface, and a plurality of through holes connecting the first surface and the second surface, wherein the first surface is used for disposing the conductive elastic sheet, and each of the through holes is used for disposing each of the elastic metal members.
In another embodiment, each of the elastic metal members has a first contact end facing the conductive elastic sheet, and the first contact end comprises a bump suitable for inserting in the conductive elastic sheet.
In another embodiment, the bump of each of the elastic metal members is suitable for stabbing into a surface of the conductive elastic sheet so as to be inserted into an interior of the conductive elastic sheet.
In another embodiment, the bump of each of the elastic metal members is in plural and pointed.
In another embodiment, a length of the bump is greater than or equal to 0.01 mm and less than a thickness of the conductive elastic sheet.
In another embodiment, the conductive elastic sheet comprises a substrate and a plurality of conductive particles distributed in the substrate.
In another embodiment, the base further comprises a frame body disposed on a peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet, wherein the conductive elastic sheet is disposed on the first surface of the base and seals each of the through holes, and the frame body and upper side surface of the conductive elastic sheet define a fluid space in communication with the fluid inlet and the fluid outlet.
In yet another embodiment, a thickness of the conductive elastic sheet is less than or equal to 0.4 mm.
The present disclosure further discloses a test socket, which comprising: a metal base having a first surface and a second surface opposing the first surface and a plurality of through holes communicating the first surface and the second surface; a plurality of elastic metal members disposed in the plurality of through holes respectively and forming a coaxial structure with the metal base; and a conductive elastic sheet located over the first surface of the metal base and suitable for contacting the elastic metal member.
In another embodiment, the elastic metal member has a bump suitable for stabbing into a surface of the conductive elastic sheet so as to be inserted into an interior of the conductive elastic sheet.
Unknown
May 12, 2026
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