Fast Uniformity Drift Correction

28 2 This application is a divisional application of U.S. Patent Application No. 18/262,467, filed July 21, 2023, which is a national stage of International Application No. PCT/EP2022/050819, filed January 16, 2022, which claims priority of U.S. Application No. 63/142,581, filed onJanuary 2021, and U.S. Application No. 63/144,798, filed onFebruary 2021, and which are all incorporated herein by reference in their entireties.

The present disclosure relates to systems and methods for correcting illumination non-uniformities in lithographic apparatuses and systems.

A lithographic apparatus is a machine that applies a desired pattern onto a substrate, usually onto a target portion of the substrate. A lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). In that instance, a patterning device, which is interchangeably referred to as a mask or a reticle, can be used to generate a circuit pattern to be formed on an individual layer of the IC being formed. This pattern can be transferred onto a target portion (e.g., including part of, one, or several dies) on a substrate (e.g., a silicon wafer). Transfer of the pattern is typically via imaging onto a layer of radiation-sensitive material (e.g., resist) provided on the substrate. In general, a single substrate will contain a network of adjacent target portions that are successively patterned. Traditional lithographic apparatuses include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion at one time, and so-called scanners, in which each target portion is irradiated by scanning the pattern through a radiation beam in a given direction (the “scanning”-direction) while synchronously scanning the target portions parallel or anti-parallel (e.g., opposite) to this scanning direction. It is also possible to transfer the pattern from the patterning device to the substrate by imprinting the pattern onto the substrate.

As semiconductor manufacturing processes continue to advance, the dimensions of circuit elements have continually been reduced while the amount of functional elements, such as transistors, per device has been steadily increasing over decades, following a trend commonly referred to as Moore's law. To keep up with Moore's law the semiconductor industry is chasing technologies that enable to create increasingly smaller features. To project a pattern on a substrate a lithographic apparatus may use electromagnetic radiation. The wavelength of this radiation determines the minimum size of features which are patterned on the substrate. Typical wavelengths currently in use are 365 nm (i-line), 248 nm, 193 nm and 13.5 nm.

Extreme ultraviolet (EUV) radiation, for example, electromagnetic radiation having wavelengths of around 50 nanometers (nm) or less (also sometimes referred to as soft x-rays), and including light at a wavelength of about 13.5 nm, can be used in or with a lithographic apparatus to produce extremely small features in or on substrates, for example, silicon wafers. A lithographic apparatus which uses EUV radiation having a wavelength within a range of 4 nm to 20 nm, for example 6.7 nm or 13.5 nm, can be used to form smaller features on a substrate than a lithographic apparatus which uses, for example, radiation with a wavelength of 193 nm.

Methods to produce EUV light include, but are not necessarily limited to, converting a material that has an element, for example, xenon (Xe), lithium (Li), or tin (Sn), with an emission line in the EUV range to a plasma state. For example, in one such method called laser produced plasma (LPP), the plasma can be produced by irradiating a target material, which is interchangeably referred to as fuel in the context of LPP sources, for example, in the form of a droplet, plate, tape, stream, or cluster of material, with an amplified light beam that can be referred to as a drive laser. For this process, the plasma is typically produced in a sealed vessel, for example, a vacuum chamber, and monitored using various types of metrology equipment.

A lithographic apparatus typically includes an illumination system that conditions radiation generated by a radiation source before the radiation is incident upon a patterning device. The illumination system may, for example, modify one or more properties of the radiation, such as polarization and/or illumination mode. The illumination system may include a uniformity correction system that corrects or reduces non-uniformities (e.g., intensity non-uniformities) present in the radiation. Uniformity correction devices may employ actuated finger assemblies that are inserted into an edge of a radiation beam to correct intensity variations. A spatial breadth of illumination that can be adjusted by a uniformity correction system is dependent on, inter alia, sizes of the finger assemblies and of the actuating devices used to move finger assemblies in the uniformity correction system. Modifying finger parameters from a known working design is not trivial as such modifications can lead to undesirable alterations of one or more properties of a radiation beam.

In order to achieve tolerances of image quality on a patterning device and substrate, an illumination beam having a controlled uniformity is desirable. It is common for an illumination beam to have a non-uniform intensity profile before reflecting off of or transmitting through a patterning device. It is desirable at various stages in a lithographic process that the illumination beam be controlled to achieve improved uniformity. Uniformity can refer to a constant intensity across a pertinent cross section of the illumination beam, but can also refer to the ability to control the illumination to achieve selected uniformity parameters. A patterning device imparts a pattern onto a beam of radiation that is then projected onto a substrate. Image quality of this projected beam is affected by the uniformity of the beam.

Accordingly, it is desirable to control illumination uniformity so that lithographic tools perform lithography processes as efficiently as possible for maximizing manufacturing capacity and yield rates, minimizing manufacturing defects, and reducing cost per device.

The present disclosure describes various aspects of systems, apparatuses, and methods for adjusting illumination slit uniformity in a lithographic apparatus.

In some aspects, the present disclosure describes a system. The system can include a radiation source configured to generate radiation and transmit the generated radiation towards a finger assembly. The system can further include a radiation detector configured to receive at least a portion of the transmitted radiation. The system can further include a processor configured to determine a change in a shape of the finger assembly based on the received radiation. The processor can be further configured to generate a control signal configured to modify a position of the finger assembly based on the determined change in the shape of the finger assembly. The processor can be further configured to transmit the control signal to a motion control system coupled to the finger assembly.

In some aspects, the determined change in the shape of the finger assembly can include a change in a position of an optical edge of a fingertip of the finger assembly based on a growth of the fingertip in response to an exposure of the fingertip to deep ultraviolet (DUV) radiation or extreme ultraviolet (EUV) radiation.

In some aspects, the radiation source can be configured to transmit the radiation during a wafer exchange operation of a lithographic apparatus. In other aspects, the radiation source can be configured to transmit the radiation during a wafer exposure operation of a lithographic apparatus.

In some aspects, the generated radiation can include a laser curtain and the radiation detector can be configured to receive at least the portion of the transmitted radiation in response to an irradiation of a portion of the finger assembly by the laser curtain. In some aspects, the portion of the finger assembly can include a mechanical edge of a fingertip of the finger assembly disposed separate from an optical edge of the fingertip of the finger assembly.

In some aspects, the received radiation can include radiation reflected from a surface of a fingertip of the finger assembly in response to an irradiation of the surface of the fingertip by the transmitted radiation.

In some aspects, the processor can be further configured to measure a change in a position of a reference mark disposed on the finger assembly based on the received radiation. In some aspects, the processor can be further configured to determine the change in the shape of the finger assembly based on the measured change in the position of the reference mark. In some aspects, the reference mark can be applied to a region of a multi-layer mirror material disposed on a fingertip of the finger assembly. For example, in such aspects, the radiation detector can be configured to sense a reflected portion of an actinic EUV light used during a wafer exposure operation of a lithographic apparatus.

In some aspects, the present disclosure describes an apparatus. The apparatus can include a finger assembly. The finger assembly can include a finger body, a fingertip, a multi-layer mirror material disposed on a surface of the fingertip, and a set of reference marks applied to a region of the multi-layer mirror material. In some aspects, the set of reference marks can include two or more reference marks. In some aspects, the multi-layer mirror material can be configured to reflect, during an exposure operation of a lithographic apparatus, DUV radiation or EUV radiation towards a radiation detector. In some aspects, the multi-layer mirror material can include molybdenum.

In some aspects, the present disclosure describes a method for adjusting illumination slit uniformity in a lithographic apparatus. The method can include irradiating, by a radiation source, a portion of a finger assembly with radiation. The method can further include receiving, by a radiation detector, at least a portion of the radiation in response to the irradiating of the portion of the finger assembly. The method can further include determining, by a processor, a change in a shape of the finger assembly based on the received radiation. The method can further include generating, by the processor, a control signal configured to modify a position of the finger assembly based on the determined change in the shape of the finger assembly. The method can further include transmitting, by the processor, the control signal to a motion control system coupled to the finger assembly.

In some aspects, the determining the change in the shape of the finger assembly can include determining, by the processor, a change in a position of an optical edge of a fingertip of the finger assembly based on a growth of the fingertip in response to an exposure of the fingertip to DUV radiation or EUV radiation.

In some aspects, the irradiating the portion of the finger assembly can include irradiating, by the radiation source, the portion of the finger assembly with the radiation during a wafer exchange operation of the lithographic apparatus. In other aspects, the irradiating the portion of the finger assembly can include irradiating, by the radiation source, the portion of the finger assembly with the radiation during a wafer exposure operation of the lithographic apparatus.

In some aspects, the radiation can include a laser curtain, and the receiving at least the portion of the radiation can include receiving, by the radiation detector, at least the portion of the transmitted radiation in response to irradiating the portion of the finger assembly with the laser curtain. In some aspects, the portion of the finger assembly can include a mechanical edge of a fingertip of the finger assembly disposed separate from an optical edge of the fingertip of the finger assembly.

In some aspects, the receiving at least the portion of the radiation can include receiving, by the radiation detector, radiation reflected from a surface of a fingertip of the finger assembly in response to irradiating the surface of the fingertip with the radiation.

In some aspects, the determining the change in the shape of the finger assembly can include measuring, by the processor, a change in a position of a reference mark disposed on the finger assembly based on the received radiation. In some aspects, the determining the change in the shape of the finger assembly can further include determining, by the processor, the change in the shape of the finger

assembly based on the measured change in the position of the reference mark. In some aspects, the reference mark is applied to a region of a multi-layer mirror material disposed on a fingertip of the finger assembly. For example, in such aspects, the method can include sensing, by the radiation detector, a reflected portion of an actinic EUV light used during a wafer exposure operation of a lithographic apparatus.

Further features, as well as the structure and operation of various aspects, are described in detail below with reference to the accompanying drawings. It is noted that the disclosure is not limited to the specific aspects described herein. Such aspects are presented herein for illustrative purposes only. Additional aspects will be apparent to persons skilled in the relevant art(s) based on the teachings contained herein.

This specification discloses one or more embodiments that incorporate the features of the present disclosure. The disclosed embodiment(s) merely describe the present disclosure. The scope of the disclosure is not limited to the disclosed embodiment(s). The breadth and scope of the disclosure are defined by the claims appended hereto and their equivalents.

The embodiment(s) described, and references in the specification to “one embodiment,” “an embodiment,” “an example embodiment,” etc., indicate that the embodiment(s) described can include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is understood that it is within the knowledge of one skilled in the art to affect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “on,” “upper” and the like, may be used herein for ease of description to describe one element or feature’s relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.

The term “about” as used herein indicates the value of a given quantity that can vary based on a particular technology. Based on the particular technology, the term “about” can indicate a value of a given quantity that varies within, for example, 10–30% of the value (e.g., ±10%, ±20%, or ±30% of the value).

1 2 An example illumination uniformity correction system referred to as a “Unicom” can adjust slit uniformity in the cross-scan direction, attenuating illumination “hot spots” by introducing a set of finger assemblies or “fingers” into the illumination slit. The Unicom can be configured to operate in one of two “modes”: () a first mode that concerns uniformity correction per wafer to correct for illumination effects; and () a second mode in which slit uniformity is modified per die to correct for wafer and process effects and in which uniformity correction changes in parallel to stepping dies. As incoming light (e.g., EUV radiation) heats the Unicom finger tips, the unmeasured distance from the Unicom position measurement and the fingertip can change, causing a drift in the slit uniformity. For instance, as power increases in a lithographic apparatus, the expected critical dimension (CD) impact of uniformity drift can increase from about 0.06 nm (< 600 W source power) to greater than or equal to about 0.1 nm (≥ 600 W source power). CD impact can be equal to about 0.3 times the percentage of uniformity. CD uniformity (CDU) requirements can be between about 0.7 nm and about 1.2 nm. In some examples, slit uniformity drift may not be compensated.

In one example, slit uniformity drift can be measured and corrected every about 900 seconds or, in another example, once per wafer lot, introducing uncorrectable CD impact. In some aspects, CD impact can be reduced by performing more frequent measurements. However, each uniformity refresh (UR) measurement can take about 2 seconds and use sensors in the wafer stage. As a result, these measurements cannot be performed in parallel to wafer stage chuck exchanges. Further, to reduce the slit uniformity drift by half, at least two additional uniformity refresh measurements may be needed in the first lot, increasing the lot time for 25 wafers from about 900 seconds to about 904 seconds and thus reducing the overall machine throughput.

In contrast, some aspects of the present disclosure can provide for using a reference measurement close to the fingertip to correct for Unicom uncorrected thermal drift. By periodically measuring a single reference surface in the fingertip, the actual fingertip growth can be measured periodically without requiring a sensor in the wafer stage, thus introducing no throughput impact. To measure and estimate fingertip growth with respect to a position sensor, such as an encoder scale, some aspects of the present disclosure can provide for measuring the change in distance of one or more reference points in or associated with the Unicom fingertip versus an encoder index pulse. In some aspects, the original distance from the Unicom fingertip to the encoder reference mark can be calibrated periodically or measured once during the Unicom build.

28 In some aspects, the present disclosure can provide for a fingertip sensor that includes a single beam across all finger assemblies, which minimizes the number of sensors. In such aspects, each finger may have to move through its complete travel path until the position of the fingertip is measured. For example, each finger can move through its complete travel path in about 200 ms. As a result, measuring allfinger assemblies can take about 6 seconds and thus measurements can be performed in parallel to wafer exchanges.

In some aspects, an algorithm can be used to maximize the number of finger assemblies measured during the lot because wafer chuck exchange time is about 2.5 seconds with about 0.43 seconds of “shadow time” available for Unicom moves. For example, some aspects of the present disclosure can measure only the furthest inserted finger assemblies and the least inserted finger assemblies and interpolate the measurement results. Additionally or alternatively, some aspects of the present disclosure can include etching a mark on the fingertip (or creating a new surface in the fingertip to make this mark) and measuring the displacement of this mark as a function of finger thermal growth.

In some aspects, fingertip growth can be proportional to the change in distance of the chosen reference point in the fingertip assembly versus the encoder index. In some aspects, measurements and adjustments can occur every wafer or every die. In some aspects, “room temperature” or reference distance from the fingertip to the encoder can be calibrated periodically or only once during the build of the fingertip assembly. In some aspects, fingertip growth of less than or equal to about 8 μm can be detected.

In some aspects, the present disclosure provides for adjusting illumination slit uniformity in a lithographic apparatus by, for example: irradiating, by a radiation source, a portion of a finger assembly with radiation; receiving, by a radiation detector, at least a portion of the radiation in response to the irradiating of the portion of the finger assembly; determining, by a processor, a change in a shape of the finger assembly based on the received radiation; generating, by the processor, a control signal configured to modify a position of the finger assembly based on the determined change in the shape of the finger assembly; and transmitting, by the processor, the control signal to a motion control system coupled to the finger assembly.

There are many exemplary aspects to the systems, apparatuses, methods, and computer program products disclosed herein. For example, aspects of the present disclosure provide for decreasing the CD drift and CDU impact from the Unicom from greater than or equal to about 0.1 nm (e.g., for all tool generations with source power greater than about 350 W) to below about 0.06 nm. As CDU requirements can be less than or equal to about 0.6 nm, the 40 percent reduction of CDU impact from about 0.1 nm to about 0.06 nm can be substantial. In another example, aspects of the present disclosure do not require a sensor in the wafer stage and thus there is substantially no throughput impact to reduce CD drift. In yet another example, aspects of the present disclosure do not require sensors (e.g., accurate pressure sensor) outside the Unicom. In still another example, aspects of the present disclosure do not require prior knowledge of finger assembly insertion.

Before describing such aspects in more detail, however, it is instructive to present an example environment in which aspects of the present disclosure can be implemented.

1 1 FIGS.A andB 1 1 FIGS.A andB 100 100 100 100 are schematic illustrations of a lithographic apparatusand a lithographic apparatus’, respectively, in which aspects of the present disclosure can be implemented. As shown in, the lithographic apparatusesand’ are illustrated from a point of view (e.g., a side view) that is normal to the XZ plane (e.g., the X-axis points to the right, the Z-axis points upward, and the Y-axis points into the page away from the viewer), while the patterning device MA and the substrate W are presented from additional points of view (e.g., a top view) that are normal to the XY plane (e.g., the X-axis points to the right, the Y-axis points upward, and the Z-axis points out of the page toward the viewer).

100 100 100 100 100 100 In some aspects, the lithographic apparatusand/or the lithographic apparatus’ can include one or more of the following structures: an illumination system IL (e.g., an illuminator) configured to condition a radiation beam B (e.g., a deep ultra violet (DUV) radiation beam or an extreme ultra violet (EUV) radiation beam); a support structure MT (e.g., a mask table) configured to support a patterning device MA (e.g., a mask, a reticle, or a dynamic patterning device) and connected to a first positioner PM configured to accurately position the patterning device MA; and, a substrate holder such as a substrate table WT (e.g., a wafer table) configured to hold a substrate W (e.g., a resist-coated wafer) and connected to a second positioner PW configured to accurately position the substrate W. Lithographic apparatusesand’ also have a projection system PS (e.g., a refractive projection lens system) configured to project a pattern imparted to the radiation beam B by patterning device MA onto a target portion C (e.g., a portion including one or more dies) of the substrate W. In lithographic apparatus, the patterning device MA and the projection system PS are reflective. In lithographic apparatus’, the patterning device MA and the projection system PS are transmissive.

1 FIG.B In some aspects, in operation, the illumination system IL can receive a radiation beam from a radiation source SO (e.g., via a beam delivery system BD shown in). The illumination system IL can include various types of optical structures, such as refractive, reflective, catadioptric, magnetic, electromagnetic, electrostatic, and other types of optical components, or any combination thereof, for directing, shaping, or controlling radiation. In some aspects, the illumination system IL can be configured to condition the radiation beam B to have a desired spatial and angular intensity distribution in its cross-section at a plane of the patterning device MA.

100 100 In some aspects, the support structure MT can hold the patterning device MA in a manner that depends on the orientation of the patterning device MA with respect to a reference frame, the design of at least one of the lithographic apparatusesand’, and other conditions, such as whether or not the patterning device MA is held in a vacuum environment. The support structure MT can use mechanical, vacuum, electrostatic, or other clamping techniques to hold the patterning device MA. The support structure MT can be a frame or a table, for example, which can be fixed or movable, as required. By using sensors, the support structure MT can ensure that the patterning device MA is at a desired position, for example, with respect to the projection system PS.

The term “patterning device” MA should be broadly interpreted as referring to any device that can be used to impart a radiation beam B with a pattern in its cross-section, such as to create a pattern in the target portion C of the substrate W. The pattern imparted to the radiation beam B can correspond to a particular functional layer in a device being created in the target portion C to form an integrated circuit.

100 100 1 FIG.B 1 FIG.A In some aspects, the patterning device MA can be transmissive (as in lithographic apparatus’ of) or reflective (as in lithographic apparatusof). The patterning device MA can include various structures such as reticles, masks, programmable mirror arrays, programmable LCD panels, other suitable structures, or combinations thereof. Masks can include mask types such as binary, alternating phase shift, or attenuated phase shift, as well as various hybrid mask types. In one example, a programmable mirror array can include a matrix arrangement of small mirrors, each of which can be individually tilted so as to reflect an incoming radiation beam in different directions. The tilted mirrors can impart a pattern in the radiation beam B, which is reflected by a matrix of small mirrors.

The term “projection system” PS should be interpreted broadly and can encompass any type of projection system, including refractive, reflective, catadioptric, magnetic, anamorphic, electromagnetic, and electrostatic optical systems, or any combination thereof, as appropriate for the exposure radiation being used, and/or for other factors such as the use of an immersion liquid (e.g., on the substrate W) or the use of a vacuum. A vacuum environment can be used for EUV or electron beam radiation since other gases can absorb too much radiation or electrons. A vacuum environment can therefore be provided to the whole beam path with the aid of a vacuum wall and vacuum pumps. In addition, any use herein of the term “projection lens” can be interpreted, in some aspects, as synonymous with the more general term “projection system” PS.

100 100 In some aspects, the lithographic apparatusand/or the lithographic apparatus’ can be of a type having two (e.g., “dual stage”) or more substrate tables WT and/or two or more mask tables). In such “multiple stage” machines, the additional substrate tables WT can be used in parallel, or preparatory steps can be carried out on one or more tables while one or more other substrate tables WT are being used for exposure. In one example, steps in preparation of a subsequent exposure of the substrate W can be carried out on the substrate W located on one of the substrate tables WT while another substrate W located on another of the substrate tables WT is being used for exposing a pattern on another substrate W. In some aspects, the additional table may not be a substrate table WT.

100 100 In some aspects, in addition to the substrate table WT, the lithographic apparatusand/or the lithographic apparatus’ can include a measurement stage. The measurement stage can be arranged to hold a sensor. The sensor can be arranged to measure a property of the projection system PS, a property of the radiation beam B, or both. In some aspects, the measurement stage can hold multiple sensors. In some aspects, the measurement stage can move beneath the projection system PS when the substrate table WT is away from the projection system PS.

100 100 In some aspects, the lithographic apparatusand/or the lithographic apparatus’ can also be of a type wherein at least a portion of the substrate can be covered by a liquid having a relatively high refractive index, e.g., water, so as to fill a space between the projection system PS and the substrate W. An immersion liquid can also be applied to other spaces in the lithographic apparatus, for example, between the patterning device MA and the projection system PS. Immersion techniques provide for increasing the numerical aperture of projection systems. The term “immersion” as used herein does not mean that a structure, such as a substrate, must be submerged in liquid, but rather only means that liquid is located between the projection system and the substrate during exposure. Various immersion techniques are described in U.S. Patent No. 6,952,253, issued October 4, 2005, and titled “LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD,” which is incorporated by reference herein in its entirety.

1 1 FIGS.A andB 1 FIG.B 100 100 100 100 100 100 Referring to, the illumination system IL receives a radiation beam B from a radiation source SO. The radiation source SO and the lithographic apparatusor’ can be separate physical entities, for example, when the radiation source SO is an excimer laser. In such cases, the radiation source SO is not considered to form part of the lithographic apparatusor’, and the radiation beam B passes from the radiation source SO to the illumination system IL with the aid of a beam delivery system BD (e.g., shown in) including, for example, suitable directing mirrors and/or a beam expander. In other cases, the radiation source SO can be an integral part of the lithographic apparatusor’, for example, when the radiation source SO is a mercury lamp. The radiation source SO and the illuminator IL, together with the beam delivery system BD, if required, can be referred to as a radiation system.

In some aspects, the illumination system IL can include an adjuster AD for adjusting the angular intensity distribution of the radiation beam. Generally, at least the outer and/or inner radial extent (commonly referred to as “σ-outer” and “σ-inner,” respectively) of the intensity distribution in a pupil plane of the illuminator can be adjusted. In addition, the illumination system IL can include various other components, such as an integrator IN and a radiation collector CO (e.g., a condenser or collector optic). In some aspects, the illumination system IL can be used to condition the radiation beam B to have a desired uniformity and intensity distribution in its cross section.

1 FIG.A 100 Referring to, in operation, the radiation beam B can be incident on the patterning device MA (e.g., a mask, reticle, programmable mirror array, programmable LCD panel, any other suitable structure or combination thereof), which can be held on the support structure MT (e.g., a mask table), and can be patterned by the pattern (e.g., design layout) present on the patterning device MA. In lithographic apparatus, the radiation beam B can be reflected from the patterning device MA. Having traversed (e.g., after being reflected from) the patterning device MA, the radiation beam B can pass through the projection system PS, which can focus the radiation beam B onto a target portion C of the substrate W or onto a sensor arranged at a stage.

In some aspects, with the aid of the second positioner PW and position sensor IFD2 (e.g., an interferometric device, linear encoder, or capacitive sensor), the substrate table WT can be moved accurately, e.g., so as to position different target portions C in the path of the radiation beam B. Similarly, the first positioner PM and another position sensor IFD1 (e.g., an interferometric device, linear encoder, or capacitive sensor) can be used to accurately position the patterning device MA with respect to the path of the radiation beam B.

1 1 FIGS.A andB In some aspects, patterning device MA and substrate W can be aligned using mask alignment marks M1 and M2 and substrate alignment marks P1 and P2. Althoughillustrate the substrate alignment marks P1 and P2 as occupying dedicated target portions, the substrate alignment marks P1 and P2 may be located in spaces between target portions. Substrate alignment marks P1 and P2 are known as scribe-lane alignment marks when they are located between the target portions C. Substrate alignment marks P1 and P2 can also be arranged in the target portion C area as in-die marks. These in-die marks can also be used as metrology marks, for example, for overlay measurements.

In some aspects, for purposes of illustration and not limitation, one or more of the figures herein can utilize a Cartesian coordinate system. The Cartesian coordinate system includes three axes: an X-axis; a Y-axis; and a Z-axis. Each of the three axes is orthogonal to the other two axes (e.g., the X-axis is orthogonal to the Y-axis and the Z-axis, the Y-axis is orthogonal to the X-axis and the Z-axis, the Z-axis is orthogonal to the X-axis and the Y-axis). A rotation around the X-axis is referred to as an Rx-rotation. A rotation around the Y-axis is referred to as an Ry-rotation. A rotation around about the Z-axis is referred to as an Rz-rotation. In some aspects, the X-axis and the Y-axis define a horizontal plane, whereas the Z-axis is in a vertical direction. In some aspects, the orientation of the Cartesian coordinate system may be different, for example, such that the Z-axis has a component along the horizontal plane. In some aspects, another coordinate system, such as a cylindrical coordinate system, can be used.

1 FIG.B Referring to, the radiation beam B is incident on the patterning device MA, which is held on the support structure MT, and is patterned by the patterning device MA. Having traversed the patterning device MA, the radiation beam B passes through the projection system PS, which focuses the beam onto a target portion C of the substrate W. In some aspects, the projection system PS can have a pupil conjugate to an illumination system pupil. In some aspects, portions of radiation can emanate from the intensity distribution at the illumination system pupil and traverse a mask pattern without being affected by diffraction at the mask pattern MP and create an image of the intensity distribution at the illumination system pupil.

The projection system PS projects an image MP’ of the mask pattern MP, where image MP’ is formed by diffracted beams produced from the mask pattern MP by radiation from the intensity distribution, onto a resist layer coated on the substrate W. For example, the mask pattern MP can include an array of lines and spaces. A diffraction of radiation at the array and different from zeroth-order diffraction generates diverted diffracted beams with a change of direction in a direction perpendicular to the lines. Reflected light (e.g., zeroth-order diffracted beams) traverses the pattern without any change in propagation direction. The zeroth-order diffracted beams traverse an upper lens or upper lens group of the projection system PS, upstream of the pupil conjugate of the projection system PS, to reach the pupil conjugate. The portion of the intensity distribution in the plane of the pupil conjugate and associated with the zeroth-order diffracted beams is an image of the intensity distribution in the illumination system pupil of the illumination system IL. In some aspects, an aperture device can be disposed at, or substantially at, a plane that includes the pupil conjugate of the projection system PS.

The projection system PS is arranged to capture, by means of a lens or lens group, not only the zeroth-order diffracted beams, but also first-order or first- and higher-order diffracted beams (not shown). In some aspects, dipole illumination for imaging line patterns extending in a direction perpendicular to a line can be used to utilize the resolution enhancement effect of dipole illumination. For example, first-order diffracted beams interfere with corresponding zeroth-order diffracted beams at the level of the substrate W to create an image of the mask pattern MP at highest possible resolution and process window (e.g., usable depth of focus in combination with tolerable exposure dose deviations). In some aspects, astigmatism aberration can be reduced by providing radiation poles (not shown) in opposite quadrants of an illumination system pupil. Further, in some aspects, astigmatism aberration can be reduced by blocking the zeroth-order beams in the pupil conjugate of the projection system PS associated with radiation poles in opposite quadrants. This is described in more detail in U.S. Patent No. 7,511,799, issued March 31, 2009, and titled “LITHOGRAPHIC PROJECTION APPARATUS AND A DEVICE MANUFACTURING METHOD,” which is incorporated by reference herein in its entirety.

1 FIG.B In some aspects, with the aid of the second positioner PW and a position measurement system PMS (e.g., including a position sensor such as an interferometric device, linear encoder, or capacitive sensor), the substrate table WT can be moved accurately, e.g., so as to position different target portions C in the path of the radiation beam B at a focused and aligned position. Similarly, the first positioner PM and another position sensor (e.g., an interferometric device, linear encoder, or capacitive sensor) (not shown in) can be used to accurately position the patterning device MA with respect to the path of the radiation beam B (e.g., after mechanical retrieval from a mask library or during a scan). Patterning device MA and substrate W can be aligned using mask alignment marks M1 and M2 and substrate alignment marks P1 and P2.

In general, movement of the support structure MT can be realized with the aid of a long-stroke positioner (coarse positioning) and a short-stroke positioner (fine positioning), which form part of the first positioner PM. Similarly, movement of the substrate table WT can be realized using a long-stroke positioner and a short-stroke positioner, which form part of the second positioner PW. In the case of a stepper (as opposed to a scanner), the support structure MT can be connected to a short-stroke actuator only or can be fixed. Patterning device MA and substrate W can be aligned using mask alignment marks M1 and M2, and substrate alignment marks P1 and P2. Although the substrate alignment marks (as illustrated) occupy dedicated target portions, they can be located in spaces between target portions (e.g., scribe-lane alignment marks). Similarly, in situations in which more than one die is provided on the patterning device MA, the mask alignment marks M1 and M2 can be located between the dies.

Support structure MT and patterning device MA can be in a vacuum chamber V, where an in-vacuum robot can be used to move patterning devices such as a mask in and out of vacuum chamber. Alternatively, when support structure MT and patterning device MA are outside of the vacuum chamber, an out-of-vacuum robot can be used for various transportation operations, similar to the in-vacuum robot. In some instances, both the in-vacuum and out-of-vacuum robots need to be calibrated for a smooth transfer of any payload (e.g., a mask) to a fixed kinematic mount of a transfer station.

100 100 In some aspects, the lithographic apparatusesand’ can be used in at least one of the following modes:

1. In step mode, the support structure MT and the substrate table WT are kept essentially stationary, while an entire pattern imparted to the radiation beam B is projected onto a target portion C at one time (e.g., a single static exposure). The substrate table WT is then shifted in the X and/or Y direction so that a different target portion C can be exposed.

2. In scan mode, the support structure MT and the substrate table WT are scanned synchronously while a pattern imparted to the radiation beam B is projected onto a target portion C (e.g., a single dynamic exposure). The velocity and direction of the substrate table WT relative to the support structure MT (e.g., mask table) can be determined by the (de-)magnification and image reversal characteristics of the projection system PS.

3. In another mode, the support structure MT is kept substantially stationary holding a programmable patterning device MA, and the substrate table WT is moved or scanned while a pattern imparted to the radiation beam B is projected onto a target portion C. A pulsed radiation source SO can be employed and the programmable patterning device is updated as required after each movement of the substrate table WT or in between successive radiation pulses during a scan. This mode of operation can be readily applied to maskless lithography that utilizes a programmable patterning device MA, such as a programmable mirror array.

100 100 In some aspects, the lithographic apparatusesand’ can employ combinations and/or variations of the above-described modes of use or entirely different modes of use.

1 FIG.A 100 In some aspects, as shown in, the lithographic apparatuscan include an EUV source configured to generate an EUV radiation beam B for EUV lithography. In general, the EUV source can be configured in a radiation source SO, and a corresponding illumination system IL can be configured to condition the EUV radiation beam B of the EUV source.

2 FIG. 2 FIG. 100 100 shows the lithographic apparatusin more detail, including the radiation source SO (e.g., a source collector apparatus), the illumination system IL, and the projection system PS. As shown in, the lithographic apparatusis illustrated from a point of view (e.g., a side view) that is normal to the XZ plane (e.g., the X-axis points to the right and the Z-axis points upward).

220 211 212 210 210 The radiation source SO is constructed and arranged such that a vacuum environment can be maintained in an enclosing structure. The radiation source SO includes a source chamberand a collector chamberand is configured to produce and transmit EUV radiation. EUV radiation can be produced by a gas or vapor, for example xenon (Xe) gas, lithium (Li) vapor, or tin (Sn) vapor in which an EUV radiation emitting plasmais created to emit radiation in the EUV range of the electromagnetic spectrum. The EUV radiation emitting plasma, at least partially ionized, can be created by, for example, an electrical discharge or a laser beam. Partial pressures of, for example, about 10.0 pascals (Pa) of Xe gas, Li vapor, Sn vapor, or any other suitable gas or vapor can be used for efficient generation of the radiation. In some aspects, a plasma of excited tin is provided to produce EUV radiation.

210 211 212 230 211 230 230 230 The radiation emitted by the EUV radiation emitting plasmais passed from the source chamberinto the collector chambervia an optional gas barrier or contaminant trap(e.g., in some cases also referred to as contaminant barrier or foil trap), which is positioned in or behind an opening in the source chamber. The contaminant trapcan include a channel structure. Contaminant trapcan also include a gas barrier or a combination of a gas barrier and a channel structure. The contaminant trapfurther indicated herein at least includes a channel structure.

212 251 252 240 219 220 210 240 The collector chambercan include a radiation collector CO (e.g., a condenser or collector optic), which can be a so-called grazing incidence collector. Radiation collector CO has an upstream radiation collector sideand a downstream radiation collector side. Radiation that traverses radiation collector CO can be reflected off a grating spectral filterto be focused in a virtual source point IF. The virtual source point IF is commonly referred to as the intermediate focus, and the source collector apparatus is arranged such that the virtual source point IF is located at or near an openingin the enclosing structure. The virtual source point IF is an image of the EUV radiation emitting plasma. The grating spectral filtercan be used to suppress infrared (IR) radiation.

222 224 221 221 226 226 228 229 Subsequently the radiation traverses the illumination system IL, which can include a faceted field mirror deviceand a faceted pupil mirror devicearranged to provide a desired angular distribution of the radiation beam, at the patterning device MA, as well as a desired uniformity of radiation intensity at the patterning device MA. Upon reflection of the radiation beamat the patterning device MA, held by the support structure MT, a patterned beamis formed and the patterned beamis imaged by the projection system PS via reflective elements,onto a substrate W held by the wafer stage or substrate table WT.

240 2 FIG. 2 FIG. More elements than shown can generally be present in illumination system IL and projection system PS. Optionally, the grating spectral filtercan be present depending upon the type of lithographic apparatus. Further, there can be more mirrors present than those shown in the. For example, there can be one to six additional reflective elements present in the projection system PS than shown in.

2 FIG. 253 254 255 253 254 255 Radiation collector CO, as illustrated in, is depicted as a nested collector with grazing incidence reflectors,, and, just as an example of a collector (or collector mirror). The grazing incidence reflectors,, andare disposed axially symmetric around an optical axis O and a radiation collector CO of this type is preferably used in combination with a discharge produced plasma (DPP) source.

3 FIG. 3 FIG. 300 300 shows a lithographic cell, also sometimes referred to a lithocell or cluster. As shown in, the lithographic cellis illustrated from a point of view (e.g., a top view) that is normal to the XY plane (e.g., the X-axis points to the right and the Y-axis points upward).

100 100 300 300 100 100 Lithographic apparatusor’ can form part of lithographic cell. Lithographic cellcan also include one or more apparatuses to perform pre- and post-exposure processes on a substrate. For example, these apparatuses can include spin coaters SC to deposit resist layers, developers DE to develop exposed resist, chill plates CH, and bake plates BK. A substrate handler RO (e.g., a robot) picks up substrates from input/output ports I/O1 and I/O2, moves them between the different process apparatuses and delivers them to the loading bay LB of the lithographic apparatusor’. These devices, which are often collectively referred to as the track, are under the control of a track control unit TCU, which is itself controlled by a supervisory control system SCS, which also controls the lithographic apparatus via lithography control unit LACU. Thus, the different apparatuses can be operated to maximize throughput and processing efficiency.

100 1 FIG.A 4 FIG. 4 FIG. An example of the radiation source SO for an example reflective lithographic apparatus (e.g., lithographic apparatusof) is shown in. As shown in, the radiation source SO is illustrated from a point of view (e.g., a top view) that is normal to the XY plane as described below.

4 FIG. 2 402 403 403 401 403 403 402 402 403 The radiation source SO shown inis of a type which can be referred to as a laser produced plasma (LPP) source. A laser system 401, which can for example include a carbon dioxide (CO) laser, is arranged to deposit energy via one or more laser beamsinto fuel targets’, such as one or more discrete tin (Sn) droplets, which are provided from a fuel target generator(e.g., example, fuel emitter, droplet generator). According to some aspects, laser systemcan be, or can operate in the fashion of, a pulsed, continuous wave or quasi-continuous wave laser. The trajectory of fuel targets’ (e.g., example, droplets) emitted from the fuel target generatorcan be parallel to an X-axis. According to some aspects, the one or more laser beamspropagate in a direction parallel to a Y-axis, which is perpendicular to the X-axis. A Z-axis is perpendicular to both the X-axis and the Y-axis and extends generally into (or out of) the plane of the page, but in other aspects, other configurations are used. In some embodiments, the laser beamscan propagate in a direction other than parallel to the Y-axis (e.g., in a direction other than orthogonal to the X-axis direction of the trajectory of the fuel targets’).

402 401 403 401 407 In some aspects, the one or more laser beamscan include a pre-pulse laser beam and a main pulse laser beam. In such aspects, the laser systemcan be configured to hit each of the fuel targets’ with a pre-pulse laser beam to generate a modified fuel target. The laser systemcan be further configured to hit each of the modified fuel targets with a main pulse laser beam to generate the plasma.

403 403 404 403 403 402 404 407 404 407 Although tin is referred to in the following description, any suitable target material can be used. The target material can for example be in liquid form, and can for example be a metal or alloy. Fuel target generatorcan include a nozzle configured to direct tin, e.g., in the form of fuel targets’ (e.g., discrete droplets) along a trajectory towards a plasma formation region. Throughout the remainder of the description, references to “fuel”, “fuel target” or “fuel droplet” are to be understood as referring to the target material (e.g., droplets) emitted by fuel target generator. Fuel target generatorcan include a fuel emitter. The one or more laser beamsare incident upon the target material (e.g., tin) at the plasma formation region. The deposition of laser energy into the target material creates a plasmaat the plasma formation region. Radiation, including EUV radiation, is emitted from the plasmaduring de-excitation and recombination of ions and electrons of the plasma.

405 405 405 405 404 406 The EUV radiation is collected and focused by a radiation collector(e.g., radiation collector CO). In some aspects, radiation collectorcan include a near normal-incidence radiation collector (sometimes referred to more generally as a normal-incidence radiation collector). The radiation collectorcan be a multilayer structure, which is arranged to reflect EUV radiation (e.g., EUV radiation having a desired wavelength such as about 13.5 nm). According to some aspects, radiation collectorcan have an ellipsoidal configuration, having two focal points. A first focal point can be at the plasma formation region, and a second focal point can be at an intermediate focus, as discussed herein.

401 402 401 401 In some aspects, laser systemcan be located at a relatively long distance from the radiation source SO. Where this is the case, the one or more laser beamscan be passed from laser systemto the radiation source SO with the aid of a beam delivery system (not shown) including, for example, suitable directing mirrors and/or a beam expander, and/or other optics. Laser systemand the radiation source SO can together be considered to be a radiation system.

405 406 404 406 406 408 409 Radiation that is reflected by radiation collectorforms a radiation beam B. The radiation beam B is focused at a point (e.g., the intermediate focus) to form an image of plasma formation region, which acts as a virtual radiation source for the illumination system IL. The point at which the radiation beam B is focused can be referred to as the intermediate focus (IF) (e.g., intermediate focus). The radiation source SO is arranged such that the intermediate focusis located at or near to an openingin an enclosing structureof the radiation source SO.

2 FIG. The radiation beam B passes from the radiation source SO into the illumination system IL, which is configured to condition the radiation beam B. The radiation beam B passes from the illumination system IL and is incident upon the patterning device MA held by the support structure MT. The patterning device MA reflects and patterns the radiation beam B. Following reflection from the patterning device MA the patterned radiation beam B enters the projection system PS. The projection system includes a plurality of mirrors, which are configured to project the radiation beam B onto a substrate W held by the substrate table WT. The projection system PS can apply a reduction factor to the radiation beam, forming an image with features that are smaller than corresponding features on the patterning device MA. For example, a reduction factor of four can be applied. Although the projection system PS is shown as having two mirrors in, the projection system can include any number of mirrors (e.g., six mirrors).

4 FIG. The radiation source SO can also include components which are not illustrated in. For example, a spectral filter can be provided in the radiation source SO. The spectral filter can be substantially transmissive for EUV radiation but substantially blocking for other wavelengths of radiation such as infrared radiation.

404 The radiation source SO (or radiation system) can further include a fuel target imaging system to obtain images of fuel targets (e.g., droplets) in the plasma formation regionor, more particularly, to obtain images of shadows of the fuel targets. The fuel target imaging system can detect light diffracted from the edges of the fuel targets. References to images of the fuel targets in the following text should be understood also to refer to images of shadows of the fuel targets or diffraction patterns caused by the fuel targets.

410 410 410 404 405 410 402 403 410 410 411 412 412 412 4 FIG. The fuel target imaging system can include a photodetector such as a CCD array or a CMOS sensor, but it will be appreciated that any imaging device suitable for obtaining images of the fuel targets can be used. It will be appreciated that the fuel target imaging system can include optical components, such as one or more lenses, in addition to a photodetector. For example, the fuel target imaging system can include a camera, e.g., a combination of a photosensor or photodetector and one or more lenses. The optical components can be selected so that the photosensor or cameraobtains near-field images and/or far-field images. The cameracan be positioned within the radiation source SO at any appropriate location from which the camera has a line of sight to the plasma formation regionand one or more markers (not shown in) provided on the radiation collector. In some aspects, however, it can be necessary to position the cameraaway from the propagation path of the one or more laser beamsand from the trajectory of the fuel targets emitted from fuel target generatorso as to avoid damage to the camera. According to some aspects, the camerais configured to provide images of the fuel targets to a controllervia a connection. The connectionis shown as a wired connection, though it will be appreciated that the connection(and other connections referred to herein) can be implemented as either a wired connection or a wireless connection or a combination thereof.

4 FIG. 403 403 404 401 403 402 407 404 405 407 As shown in, the radiation source SO can include a fuel target generatorconfigured to generate and emit fuel targets’ (e.g., discrete tin droplets) towards a plasma formation region. The radiation source SO can further include a laser systemconfigured to hit one or more of the fuel targets’ with one or more laser beamsfor generating a plasmaat the plasma formation region. The radiation source SO can further include a radiation collector(e.g., a radiation collector CO) configured to collect radiation emitted by the plasma.

5 5 FIGS.A andB 500 are schematic illustrations of an example illumination uniformity correction systemaccording to some aspects of the present disclosure.

5 FIG.A 500 502 28 504 528 530 532 500 502 As shown in, example illumination uniformity correction systemcan include a set of finger assemblies(e.g.,finger assemblies at a pitch of about x4 mm), a set of fingertips(e.g., each finger assembly includes a respective fingertip), a frame, a set of flexures, and a set of flexures. In some aspects, example illumination uniformity correction systemcan individually control (e.g., using a motion control system that includes, but is not limited to, one or more magnet assemblies) the position of each finger assembly in the set of finger assembliesto modify the intensity of the illumination slit in order to achieve a target uniformity.

5 FIG.B 500 540 560 540 542 542 502 560 542 500 502 560 542 542 542 As shown in, example illumination uniformity correction systemcan include a radiation sourceand a radiation detector. In some aspects, radiation sourcecan be configured to generate radiationand transmit radiationacross the set of finger assembliestowards radiation detector. In some aspects, radiationcan include a laser curtain. In some aspects, example illumination uniformity correction systemcan be configured to move one or more finger assemblies in the set of finger assembliesinto the laser curtain during a wafer exchange operation (e.g., between wafer exposure operations) to check for fingertip thermal growth. In some aspects, radiation detectorcan be configured to receive at least a portion of radiation. In some aspects, the received portion of radiationcan include radiation reflected from a surface (e.g., a mechanical edge disposed opposite an optical edge) of a fingertip of a finger assembly in response to an irradiation of the surface of the fingertip by the transmitted radiation.

504 580 500 502 542 In some aspects, the optical edges of one or more fingertips in the set of fingertipscan be exposed to radiation(e.g., DUV or EUV radiation) during a wafer exposure operation of a lithographic apparatus, which may cause the one or more fingertips to grow as a result of the exposure (or over the course of multiple exposures). In some aspects, example illumination uniformity correction systemcan further include a processor (not shown) configured to determine a change in a shape of one or more finger assemblies in the set of finger assembliesbased on the received radiation.

6 FIG. 600 is a schematic illustration of an example illumination uniformity correction systemaccording to some aspects of the present disclosure.

6 FIG. 620 620 622 624 626 620 628 630 632 624 624 624 624 624 680 a b a As shown in, a set of finger assemblies can include a finger assembly. Finger assemblycan include a finger body, a fingertip, an actuator(e.g., to adjust the position of finger assembly), a position sensor(e.g., including but not limited to an encoder scale), a flexure, and a flexure. Fingertipcan include an optical edgeand a mechanical edge. In some aspects, optical edgeof fingertipcan be exposed to radiation(e.g., DUV or EUV radiation) during a wafer exposure operation of a lithographic apparatus, which may cause fingertip 624 to grow as a result of the exposure (or over the course of multiple exposures).

642 620 624 624 642 624 624 642 b b In some aspects, a radiation source can be configured to transmit radiationtowards finger assembly(e.g., towards mechanical edgeof fingertip). In some aspects, the radiation source can be configured to transmit radiationduring a wafer exchange operation (e.g., following a wafer exposure operation) of a lithographic apparatus, during which mechanical edgeof fingertipmoves across radiation.

642 620 642 620 624 624 620 624 624 620 b a In some aspects, a radiation detector can be configured to receive at least a portion of radiationin response to an irradiation of a portion of finger assemblyby radiation. In some aspects, the portion of finger assemblycan include mechanical edgeof fingertipof finger assemblydisposed separate from optical edgeof fingertipof finger assembly.

600 642 624 624 620 624 624 680 a In some aspects, example illumination uniformity correction systemcan further include a processor (not shown) configured to determine a change in a shape of one or more finger assemblies in a set of finger assemblies based on the received radiation. For example, the processor can be configured to determine a change in a position of optical edgeof fingertipof finger assemblybased on a growth of fingertipin response to an exposure of fingertipto radiation.

620 620 In some aspects, the processor can be further configured to measure a change in a position of a reference mark disposed on finger assemblybased on the received radiation. In some aspects, the processor can be further configured to determine the change in the shape of finger assemblybased on the measured change in the position of the reference mark.

620 620 In some aspects, the processor can be further configured to generate a control signal configured to modify a position of one or more finger assemblies in the set of finger assemblies based on the determined change in the shape of one or more finger assemblies in the set of finger assemblies. For example, the processor can be configured to generate a control signal configured to modify a position of finger assemblybased on the determined change in the shape of finger assembly.

626 622 The processor can be further configured to transmit the control signal to a motion control system (e.g., including, but not limited to, one or more magnet assemblies) coupled to the one or more finger assemblies in the set of finger assemblies. For example, the processor can be configured to transmit the control signal to a motion control system including, but not limited to, actuatorcoupled to finger body.

7 FIG. 700 is a schematic illustration of an example illumination uniformity correction systemaccording to some aspects of the present disclosure.

7 FIG. 700 724 740 760 740 722 725 740 760 725 As shown in, example illumination uniformity correction systemcan include a finger assembly having a fingertip, a radiation source, and a radiation detectorper finger assembly (e.g., 28 radiation detectors for 28 finger assemblies). In some aspects, radiation sourcecan be configured to generate radiation and transmit the generated radiation towards a set of reference marks(e.g., one or more reference marks) disposed on a surfaceof the finger assembly (e.g., on the optical side of the finger assembly). In some aspects, radiation sourcecan be configured to transmit the radiation during a wafer exchange operation (e.g., following a wafer exposure operation) of a lithographic apparatus. In some aspects, radiation detectorcan be configured to receive at least a portion of radiation reflected from surface.

700 724 724 724 In some aspects, example illumination uniformity correction systemcan further include a processor (not shown) configured to determine a change in a shape of the finger assembly based on the received radiation. For example, the processor can be configured to determine a change in a position of the optical edge of fingertipof the finger assembly based on a growth of fingertipin response to an exposure of fingertipto EUV or DUV radiation.

722 725 722 In some aspects, the processor can be further configured to measure a change in a position of the set of reference marksdisposed on surfaceof the finger assembly based on the received radiation. In some aspects, the processor can be further configured to determine the change in the shape of the finger assembly based on the measured change in the position of the set of reference marks.

In some aspects, the processor can be further configured to generate a control signal configured to modify a position of the finger assembly based on the determined change in the shape of the finger assembly. In some aspects, the processor can be further configured to transmit the control signal to a motion control system (e.g., including, but not limited to, an actuator such as a magnet assembly) coupled to the finger assembly.

8 FIG. 800 is a schematic illustration of an example illumination uniformity correction systemaccording to some aspects of the present disclosure.

8 FIG. 800 824 840 860 28 28 840 822 823 840 860 823 As shown in, example illumination uniformity correction systemcan include a finger assembly having a fingertip, a radiation source, and a radiation detectorper finger assembly (e.g.,radiation detectors forfinger assemblies). In some aspects, radiation sourcecan be configured to generate radiation and transmit the generated radiation towards a set of reference marks(e.g., one or more reference marks) disposed on a surfaceof the finger assembly (e.g., on the mechanical (non-optical) side of the finger assembly). In some aspects, radiation sourcecan be configured to transmit the radiation during a wafer exchange operation (e.g., following a wafer exposure operation) of a lithographic apparatus. In some aspects, radiation detectorcan be configured to receive at least a portion of radiation reflected from surface.

800 824 824 824 In some aspects, example illumination uniformity correction systemcan further include a processor (not shown) configured to determine a change in a shape of the finger assembly based on the received radiation. For example, the processor can be configured to determine a change in a position of the optical edge of fingertipof the finger assembly based on a growth of fingertipin response to an exposure of fingertipto EUV or DUV radiation.

822 823 822 In some aspects, the processor can be further configured to measure a change in a position of the set of reference marksdisposed on surfaceof the finger assembly based on the received radiation. In some aspects, the processor can be further configured to determine the change in the shape of the finger assembly based on the measured change in the position of the set of reference marks.

In some aspects, the processor can be further configured to generate a control signal configured to modify a position of the finger assembly based on the determined change in the shape of the finger assembly. In some aspects, the processor can be further configured to transmit the control signal to a motion control system (e.g., including, but not limited to, an actuator) coupled to the finger assembly.

9 FIG. 900 is a schematic illustration of an example set of reference marksaccording to some aspects of the present disclosure.

9 FIG. 900 902 902 902 902 900 904 904 0 1 As shown in, example set of reference markscan include a reference mark(e.g., referred to asa at time tandb at time t) disposed on a surface of a finger assembly. In some aspects, reference markcan be referred to as a fingertip reference. Example set of reference markscan further include index marksdisposed on a surface of a finger assembly, such as, but not limited to, a surface of a position sensor (e.g., an encoder) disposed on, or attached to, the finger assembly. In one illustrative and non-limiting example, index markscan be referred to as an “encoder index.”

0 0 0 902 902 904 a In some aspects, time tcan correspond to a time associated with a calibration process performed during the manufacturing of an example illumination uniformity correction system, and reference marka can correspond to a reference position on a fingertip measured at time t, where the value Dcorresponds to the distance from reference markto index marks.

1 1 1 1 0 0 1 0 1 0 1 0 1 902 902 904 902 902 902 In some aspects, time tcan correspond to a time associated with a measurement performed during operation (e.g., a wafer exchange operation, a wafer exposure operation), and reference markb can correspond to the reference position on the fingertip measured at time t, where the value Dcorresponds to the distance from reference markb to index marks. In some aspects, the value Dcan be greater than the value Ddue to fingertip growth during operation of the lithographic apparatus. In some aspects, a change in the position of reference markfrom time tto time tcan be determined based on the difference between the value Dand the value D. For example, the change in the position of reference marka at time tto reference markb at time tcan be proportional to the difference between the value Dand the value D.

10 FIG. 1000 is a schematic illustration of an example illumination uniformity correction systemaccording to some aspects of the present disclosure.

10 FIG. 1000 1024 1024 1024 1024 1024 1024 1080 1024 a b a As shown in, example illumination uniformity correction systemcan include a finger assembly having a fingertip. In some aspects, fingertipcan include an optical edgeand a mechanical edge. In some aspects, optical edgeof fingertipcan be exposed to incident radiation(e.g., DUV or EUV radiation, such as an actinic EUV light) during a wafer exposure operation of a lithographic apparatus, which may cause fingertipto grow as a result of the exposure (or over the course of multiple exposures).

1024 1025 1024 1024 1025 1080 1090 1082 1024 1000 In some aspects, fingertipcan further include a multi-layer mirror material disposed on a surfaceof fingertip. In some aspects, the multi-layer mirror material can include alternating layers of molybdenum and silicon. In some aspects, maximum steady-state fingertip temperatures can be reduced to allow the multi-layer mirror material to remain substantially stable. In some aspects, the multi-layer mirror material can reflect a substantial portion of incident radiation to reduce thermal impact while improving drift compensating capability and reducing the risk of non-survivable loss of fingertip attachment as radiation source power increases. In some aspects, fingertipcan be an angled fingertip, and the multi-layer mirror material disposed on surfacecan reflect greater than 60 percent of incident radiationtowards radiation detector(e.g., as reflected radiation). As a result, the thermal load on fingertipcan be reduced, and the reliability, lifetime, and performance of example illumination uniformity correction systemcan be increased.

1000 1090 1000 1080 1090 1090 1080 1082 In some aspects, example illumination uniformity correction systemcan further include a radiation detector(e.g., a one-dimensional or two-dimensional sensor array, a “beam+fingertip movement sensor”). In some aspects, example illumination uniformity correction systemcan include one radiation detector per finger assembly. In some aspects, the multi-layer mirror material can be configured to reflect, during an exposure operation of a lithographic apparatus, incident radiationtowards radiation detector. In some aspects, radiation detectorcan be configured to sense a reflected portion of incident radiation(e.g., reflected radiation) used during a wafer exposure operation of a lithographic apparatus.

1024 1090 In some aspects, a set of reference marks can be applied to a region of the multi-layer mirror material. In some aspects, the set of reference marks can include two or more reference marks. In some aspects, a mark (e.g., composed as a thin line with a specific shape (e.g., series of lines) formed by an absorber material, as done on EUV reticles) or a set of marks can be applied to specific regions of the multi-layer mirror material to enhance the detectability, accuracy, or both of the location of fingertip. In some aspects, the data from other radiation detectors described herein can be combined with the data from radiation detectorto remove the separate impact of illumination beam movement.

1000 1024 1024 1024 1024 1024 1080 1025 1024 1024 1024 1024 1082 1000 a In some aspects, example illumination uniformity correction systemcan further include a processor (not shown) configured to determine a change in a shape of fingertipbased on the received radiation. For example, the processor can be configured to determine a change in a position of optical edgeof fingertipbased on a growth of fingertipin response to an exposure of fingertipto radiation. In some aspects, the processor can be further configured to measure a change in a position of the reference mark disposed on surfaceof fingertipbased on the received radiation. In some aspects, the processor can be further configured to determine the change in the shape of fingertipbased on the measured change in the position of the reference mark. In some aspects, the processor can be further configured to generate a control signal configured to modify a position of fingertipbased on the determined change in the shape of fingertip. In some aspects, the processor can be further configured to transmit the control signal to a motion control system (e.g., including, but not limited to, an actuator) coupled to the finger assembly. In some aspects, the processor may be configured to compare reflected radiationto a previously-obtained and saved data set to determine finger positions and thereby reduce dose and uniformity errors. As a result, the performance of example illumination uniformity correction systemcan be increased based on the increased accuracy and availability of this beam movement data.

11 FIG. 1 10 FIGS.- 12 FIG. 1100 1100 is an example methodfor adjusting illumination slit uniformity in a lithographic apparatus according to some aspects of the present disclosure or portion(s) thereof. The operations described with reference to example methodcan be performed by, or according to, any of the systems, apparatuses, components, techniques, or combinations thereof described herein, such as those described with reference toabove andbelow.

1102 1 10 FIGS.- 12 FIG. At operation, the method can include moving one or more finger assemblies to correct slit uniformity. In some aspects, the moving of the one or more finger assemblies can be accomplished using suitable mechanical or other methods and include moving the one or more finger assemblies in accordance with any aspect or combination of aspects described with reference toabove andbelow.

1104 1106 1108 At operation, the method can include steps performed in parallel to wafer exchange operations (or, in some aspects, wafer exposure operations), including but not limited to measuring and estimating fingertip growth at operationand correcting finger assembly position if needed at operation.

1106 1106 1 10 FIGS.- 12 FIG. At operation, the method can include measuring and estimating fingertip growth. For example, at operation, the method can include irradiating, by a radiation source, a portion of a finger assembly with radiation. In some aspects, the radiation can include a laser curtain, and the receiving at least the portion of the radiation can include receiving, by the radiation detector, at least the portion of the transmitted radiation in response to irradiating the portion of the finger assembly with the laser curtain. In some aspects, the portion of the finger assembly can include a mechanical edge of a fingertip of the finger assembly disposed separate from an optical edge of the fingertip of the finger assembly. In some aspects, the irradiating of the portion of the finger assembly can be accomplished using suitable mechanical or other methods and include irradiating the portion of the finger assembly in accordance with any aspect or combination of aspects described with reference toabove andbelow.

1106 1 10 FIGS.- 12 FIG. Further at operation, the method can include receiving, by a radiation detector, at least a portion of the radiation in response to the irradiating of the portion of the finger assembly. In some aspects, the irradiating the portion of the finger assembly can include irradiating, by the radiation source, the portion of the finger assembly with the radiation during a wafer exchange operation of the lithographic apparatus. In other aspects, the irradiating the portion of the finger assembly can include irradiating, by the radiation source, the portion of the finger assembly with the radiation during a wafer exposure operation of the lithographic apparatus. In some aspects, the receiving at least the portion of the radiation can include receiving, by the radiation detector, radiation reflected from a surface of a fingertip of the finger assembly in response to irradiating the surface of the fingertip with the radiation. In some aspects, the receiving of the radiation can be accomplished using suitable mechanical or other methods and include receiving the radiation in accordance with any aspect or combination of aspects described with reference toabove andbelow.

1106 1 10 FIGS.- 12 FIG. Further at operation, the method can include determining, by a processor, a change in a shape of the finger assembly based on the received radiation. In some aspects, the determining the change in the shape of the finger assembly can include determining, by the processor, a change in a position of an optical edge of a fingertip of the finger assembly based on a growth of the fingertip in response to an exposure of the fingertip to DUV radiation or EUV radiation. In some aspects, the determining the change in the shape of the finger assembly can include measuring, by the processor, a change in a position of a reference mark disposed on the finger assembly based on the received radiation. In some aspects, the determining the change in the shape of the finger assembly can further include determining, by the processor, the change in the shape of the finger assembly based on the measured change in the position of the reference mark. In some aspects, the reference mark is applied to a region of a multi-layer mirror material disposed on a fingertip of the finger assembly. For example, in such aspects, the method can include sensing, by the radiation detector, a reflected portion of an actinic EUV light used during a wafer exposure operation of a lithographic apparatus. In some aspects, the determining of the change can be accomplished using suitable mechanical or other methods and include determining the change in accordance with any aspect or combination of aspects described with reference toabove andbelow.

1108 1106 1106 1 10 FIGS.- 12 FIG. At operation, the method can include correcting finger assembly position if needed. For example, at operation, the method can include generating, by the processor, a control signal configured to modify a position of the finger assembly based on the determined change in the shape of the finger assembly. Further at operation, the method can include transmitting, by the processor, the control signal to a motion control system coupled to the finger assembly. In some aspects, the correcting of the finger assembly position can be accomplished using suitable mechanical or other methods and include correcting the finger assembly position in accordance with any aspect or combination of aspects described with reference toabove andbelow.

1110 1102 1112 1112 1102 1114 1114 At operation, the method can include determining whether the wafer lot is complete. If not, the method can proceed to operation. If so, the method can proceed to operation. At operation, the method can include determining whether to perform uniformity refresh (UR). If not, the method can proceed to operation. If so, the method can proceed to operation. At operation, the method can include performing UR correction.

Aspects of the disclosure can be implemented in hardware, firmware, software, or any combination thereof. Aspects of the disclosure can also be implemented as instructions stored on a machine-readable medium, which can be read and executed by one or more processors. A machine-readable medium can include any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computing device). For example, a machine-readable medium can include read only memory (ROM); random access memory (RAM); magnetic disk storage media; optical storage media; flash memory devices; electrical, optical, acoustical, or other forms of propagated signals (e.g., carrier waves, infrared signals, digital signals, etc.), and others. Further, firmware, software, routines, instructions, and combinations thereof can be described herein as performing certain actions. However, it should be appreciated that such descriptions are merely for convenience and that such actions in fact result from computing devices, processors, controllers, or other devices executing the firmware, software, routines, instructions, or combinations thereof and, in doing so, causing actuators or other devices (e.g., servo motors, robotic devices) to interact with the physical world.

1200 1200 500 600 700 800 1000 1200 1204 1204 1206 1200 1203 1206 1202 1200 1208 1208 1208 12 FIG. 5 5 FIGS.A andB 6 FIG. 7 FIG. 8 FIG. 10 FIG. 11 FIG. Various aspects can be implemented, for example, using one or more computing systems, such as example computing systemshown in. Example computing systemcan be a specialized computer capable of performing the functions described herein such as: the example illumination uniformity correction systemshown in; the example illumination uniformity correction systemshown in; the example illumination uniformity correction systemshown in; the example illumination uniformity correction systemshown in; the example illumination uniformity correction systemshown in; any system, sub-system, or component described with reference to; any other suitable system, sub-system, or component; or any combination thereof. Example computing systemcan include one or more processors (also called central processing units, or CPUs), such as a processor. Processoris connected to a communication infrastructure(e.g., a bus). Example computing systemcan also include user input/output device(s), such as monitors, keyboards, pointing devices, etc., that communicate with communication infrastructurethrough user input/output interface(s). Example computing systemcan also include a main memory(e.g., one or more primary storage devices), such as random access memory (RAM). Main memorycan include one or more levels of cache. Main memoryhas stored therein control logic (e.g., computer software) and/or data.

1200 1210 1210 1212 1214 1214 Example computing systemcan also include a secondary memory(e.g., one or more secondary storage devices). Secondary memorycan include, for example, a hard disk driveand/or a removable storage drive. Removable storage drivecan be a floppy disk drive, a magnetic tape drive, a compact disk drive, an optical storage device, tape backup device, and/or any other storage device/drive.

1214 1218 1218 1218 1214 1218 Removable storage drivecan interact with a removable storage unit. Removable storage unitincludes a computer usable or readable storage device having stored thereon computer software (control logic) and/or data. Removable storage unitcan be a floppy disk, magnetic tape, compact disk, DVD, optical storage disk, and/or any other computer data storage device. Removable storage drivereads from and/or writes to removable storage unit.

1210 1200 1222 1220 1222 1220 According to some aspects, secondary memorycan include other means, instrumentalities or other approaches for allowing computer programs and/or other instructions and/or data to be accessed by example computing system. Such means, instrumentalities or other approaches can include, for example, a removable storage unitand an interface. Examples of the removable storage unitand the interfacecan include a program cartridge and cartridge interface (such as that found in video game devices), a removable memory chip (such as an EPROM or PROM) and associated socket, a memory stick and USB port, a memory card and associated memory card slot, and/or any other removable storage unit and associated interface.

1200 1224 1224 1200 1228 1224 1200 1228 1226 1200 1226 Example computing systemcan further include a communications interface(e.g., one or more network interfaces). Communications interfaceenables example computing systemto communicate and interact with any combination of remote devices, remote networks, remote entities, etc. (individually and collectively referred to as remote devices). For example, communications interfacecan allow example computing systemto communicate with remote devicesover communications path, which can be wired and/or wireless, and which can include any combination of LANs, WANs, the Internet, etc. Control logic, data, or both can be transmitted to and from example computing systemvia communications path.

1200 1208 1210 1218 1222 1200 The operations in the preceding aspects of the present disclosure can be implemented in a wide variety of configurations and architectures. Therefore, some or all of the operations in the preceding aspects can be performed in hardware, in software or both. In some aspects, a tangible, non-transitory apparatus or article of manufacture includes a tangible, non-transitory computer useable or readable medium having control logic (software) stored thereon is also referred to herein as a computer program product or program storage device. This includes, but is not limited to, example computing system, main memory, secondary memoryand removable storage unitsand, as well as tangible articles of manufacture embodying any combination of the foregoing. Such control logic, when executed by one or more data processing devices (such as example computing system), causes such data processing devices to operate as described herein.

12 FIG. Based on the teachings contained in this disclosure, it will be apparent to persons skilled in the relevant art(s) how to make and use aspects of the disclosure using data processing devices, computer systems and/or computer architectures other than that shown in. In particular, aspects of the disclosure can operate with software, hardware, and/or operating system implementations other than those described herein.

Embodiments of the present disclosure can be further described by the following clauses.

1 . A system, comprising:

a radiation source configured to:

generate radiation; and

transmit the generated radiation towards a finger assembly;

a radiation detector configured to:

receive at least a portion of the transmitted radiation; and

a processor configured to:

determine a change in a shape of the finger assembly based on the received radiation;

generate a control signal configured to modify a position of the finger assembly based on the determined change in the shape of the finger assembly; and

transmit the control signal to a motion control system coupled to the finger assembly.

2 1 . The system of clause, wherein the determined change in the shape of the finger assembly comprises a change in a position of an optical edge of a fingertip of the finger assembly based on a growth of the fingertip in response to an exposure of the fingertip to deep ultraviolet (DUV) radiation or extreme ultraviolet (EUV) radiation.

3 1 . The system of clause, wherein the radiation source is configured to transmit the radiation during a wafer exchange operation of a lithographic apparatus.

4 1 . The system of clause, wherein:

the generated radiation comprises a laser curtain; and

the radiation detector is configured to receive at least the portion of the transmitted radiation in response to an irradiation of a portion of the finger assembly by the laser curtain.

5 4 . The system of clause, wherein the portion of the finger assembly comprises a mechanical edge of a fingertip of the finger assembly disposed separate from an optical edge of the fingertip of the finger assembly.

6 1 . The system of clause, wherein the received radiation comprises radiation reflected from a surface of a fingertip of the finger assembly in response to an irradiation of the surface of the fingertip by the transmitted radiation.

7 1 . The system of clause, wherein the processor is configured to:

measure a change in a position of a reference mark disposed on the finger assembly based on the received radiation; and

determine the change in the shape of the finger assembly based on the measured change in the position of the reference mark.

8 7 . The system of clause, wherein the reference mark is applied to a region of a multi-layer mirror material disposed on a fingertip of the finger assembly.

9 . A method for adjusting illumination slit uniformity in a lithographic apparatus, comprising:

irradiating, by a radiation source, a portion of a finger assembly with radiation;

receiving, by a radiation detector, at least a portion of the radiation in response to the irradiating of the portion of the finger assembly;

determining, by a processor, a change in a shape of the finger assembly based on the received radiation;

generating, by the processor, a control signal configured to modify a position of the finger assembly based on the determined change in the shape of the finger assembly; and

transmitting, by the processor, the control signal to a motion control system coupled to the finger assembly.

10 9 . The method of clause, wherein the determining the change in the shape of the finger assembly comprises determining, by the processor, a change in a position of an optical edge of a fingertip of the finger assembly based on a growth of the fingertip in response to an exposure of the fingertip to deep ultraviolet (DUV) radiation or extreme ultraviolet (EUV) radiation.

11 9 . The method of clause, wherein the irradiating the portion of the finger assembly comprises irradiating, by the radiation source, the portion of the finger assembly with the radiation during a wafer exchange operation of the lithographic apparatus.

12 9 . The method of clause, wherein:

the radiation comprises a laser curtain; and

the receiving at least the portion of the radiation comprises receiving, by the radiation detector, at least the portion of the transmitted radiation in response to irradiating the portion of the finger assembly with the laser curtain.

13 12 . The method of clause, wherein the portion of the finger assembly comprises a mechanical edge of a fingertip of the finger assembly disposed separate from an optical edge of the fingertip of the finger assembly.

14 9 . The method of clause, wherein the receiving at least the portion of the radiation comprises receiving, by the radiation detector, radiation reflected from a surface of a fingertip of the finger assembly in response to irradiating the surface of the fingertip with the radiation.

15 9 . The method of clause, wherein the determining the change in the shape of the finger assembly comprises:

measuring, by the processor, a change in a position of a reference mark disposed on the finger assembly based on the received radiation; and

determining, by the processor, the change in the shape of the finger assembly based on the measured change in the position of the reference mark.

16 15 . The method of clause, wherein the reference mark is applied to a region of a multi-layer mirror material disposed on a fingertip of the finger assembly.

17 . An apparatus, comprising:

a finger assembly comprising:

a finger body;

a fingertip;

a multi-layer mirror material disposed on a surface of the fingertip; and

a set of reference marks applied to a region of the multi-layer mirror material.

18 17 . The apparatus of clause, wherein the set of reference marks comprises two or more reference marks.

19 17 . The apparatus of clause, wherein the multi-layer mirror material is configured to reflect, during an exposure operation of a lithographic apparatus, deep ultraviolet (DUV) radiation or extreme ultraviolet (EUV) radiation towards a radiation detector.

20 17 . The apparatus of clause, wherein the multi-layer mirror material comprises molybdenum.

Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it should be understood that the lithographic apparatuses described herein can have other applications, such as the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, flat-panel displays, LCDs, thin-film magnetic heads, etc. The skilled artisan will appreciate that, in the context of such alternative applications, any use of the terms “wafer” or “die” herein may be considered as synonymous with the more general terms “substrate” or “target portion”, respectively. The substrate referred to herein can be processed, before or after exposure, in for example a track unit (a tool that typically applies a layer of resist to a substrate and develops the exposed resist), a metrology unit and/or an inspection unit. Where applicable, the disclosure herein can be applied to such and other substrate processing tools. Further, the substrate can be processed more than once, for example in order to create a multi-layer IC, so that the term substrate used herein may also refer to a substrate that already contains multiple processed layers.

It is to be understood that the phraseology or terminology herein is for the purpose of description and not of limitation, such that the terminology or phraseology of the present specification is to be interpreted by those skilled in relevant art(s) in light of the teachings herein.

The term “substrate” as used herein describes a material onto which material layers are added. In some aspects, the substrate itself can be patterned and materials added on top of it can also be patterned, or can remain without patterning.

The examples disclosed herein are illustrative, but not limiting, of the embodiments of this disclosure. Other suitable modifications and adaptations of the variety of conditions and parameters normally encountered in the field, and which would be apparent to those skilled in the relevant art(s), are within the spirit and scope of the disclosure.

While specific aspects of the disclosure have been described above, it will be appreciated that the aspects can be practiced otherwise than as described. The description is not intended to limit the embodiments of the disclosure.

It is to be appreciated that the Detailed Description section, and not the Background, Summary, and Abstract sections, is intended to be used to interpret the claims. The Summary and Abstract sections may set forth one or more but not all example embodiments as contemplated by the inventor(s), and thus, are not intended to limit the present embodiments and the appended claims in any way.

Some aspects of the disclosure have been described above with the aid of functional building blocks illustrating the implementation of specified functions and relationships thereof. The boundaries of these functional building blocks have been arbitrarily defined herein for the convenience of the description. Alternate boundaries can be defined so long as the specified functions and relationships thereof are appropriately performed.

The foregoing description of the specific aspects of the disclosure will so fully reveal the general nature of the aspects that others can, by applying knowledge within the skill of the art, readily modify and/or adapt for various applications such specific aspects, without undue experimentation, without departing from the general concept of the present disclosure. Therefore, such adaptations and modifications are intended to be within the meaning and range of equivalents of the disclosed aspects, based on the teaching and guidance presented herein.

The breadth and scope of the present disclosure should not be limited by any of the above-described example aspects or embodiments, but should be defined only in accordance with the following claims and their equivalents.