Row Driver Assembly and Solid-State Imaging Device

The present disclosure relates to a row driver assembly and to a solid-state imaging device. More specifically, the disclosure relates to row driver assemblies for image sensors.

Active image sensors in solid-state imaging devices include photoelectric conversion elements generating a photocurrent with a current rating in proportion to the received radiation intensity. A pixel circuit transforms the small photocurrent generated by the photoelectric conversion element into a comparatively large output voltage which a downstream analog-to-digital converter converts into a digital signal. The pixel circuit includes several transistors receiving control signals generated in a row decoder unit. A row driver assembly includes amplifier circuits that drive the control signals received from the row decoder unit and pass the amplified control signals to the pixel circuits. Row driver assemblies typically include charge pump circuits for generating the low buffer supply voltages for the amplifier circuits. Off-chip capacitors may be electrically coupled to the charge pump circuits. Cost reduction of solid-state imaging devices without any loss of functionality is challenging and requires solutions for reducing chip area of functional blocks and/or board area.

The present disclosure has been made in view of the above circumstances.

To this purpose, a row driver assembly includes a row driver unit comprising n buffer circuits, n being an integer larger than 1. Each of the n buffer circuits includes a high buffer supply input and a low buffer supply input and is configured to drive a buffered control signal to a pixel circuit configured to convert incident radiation into an electric signal. The row driver assembly further includes a voltage converter unit electrically coupled to low buffer supply inputs of the n buffer circuits. The voltage converter unit includes a voltage regulator circuit comprising an input, an output, and a reference input. The output of the voltage regulator circuit is electrically coupled to a low buffer supply input of a first buffer circuit of the n buffer circuits. The voltage converter unit further includes a charge pump circuit. An output of the charge pump circuit is electrically coupled to the reference input of the voltage regulator circuit.

A solid-state imaging device includes a chip including the row driver assembly defined above.

Embodiments for implementing techniques of the present disclosure (also referred to as “embodiments” in the following) will be described below in detail using the drawings. The techniques of the present disclosure are not limited to the described embodiments, and various numerical values and the like in the embodiments are illustrative only. The same elements or elements with the same functions are denoted by the same reference signs.

The terms “having”, “containing”, “including”, “comprising” and the like are open, and the terms indicate the presence of stated structures, elements or features but do not preclude the presence of additional elements or features. The articles “a”, “an” and “the” are intended to include the plural as well as the singular, unless the context clearly indicates otherwise.

Connected electronic elements may be electrically connected through a direct and/or low-resistive connection, e.g., through a conductive line. The terms “electrically connected” and “electrically coupled” may, in addition to a direct electric connection, also include a connection through other electronic elements provided and suitable for permanent and/or temporary signal transmission and/or transmission of energy. For example, electronic elements may be electrically coupled through resistors, capacitors, and switches such as transistors or transistor circuits, e.g. FETs (field effect transistors), transmission gates, and others. The load path of a transistor is the controlled path of a transistor. For example, a voltage applied to a gate of a FET controls by field effect the current flow through the load path between source and drain.

1 FIG. 100 100 illustrates a configuration example of a row driver assemblyaccording to an embodiment of the present technology. The row driver assemblymay be formed in a chip, e.g. a circuit chip. The chip may include a semiconductor substrate, e.g. a silicon semiconductor substrate, and a wiring area over one or both sides of the semiconductor substrate. While circuit elements, e.g. transistors or diodes, may be integrated in the semiconductor substrate, the wiring area may include one or more than one, e.g. two, three, four or even more wiring levels. Each wiring level may be formed by a single one or a stack of conductive layers, e.g. metal layer(s). The wiring levels may be lithographically patterned, for example. Between stacked wiring levels, an interlayer dielectric structure may be arranged. Contact plug(s) or contact line(s) may be formed in openings in the interlayer dielectric structure to electrically connect parts, e.g. metal lines or contact areas, of different wiring levels to one another. The wiring level may allow for electrically connecting circuit elements to one another for realizing functional circuits, e.g. switches, voltage regulator circuits, buffer circuits, comparators, digital-to-analog converters, analog-to-digital converters, memory elements, charge pumps etc. The wiring level may further allow for providing contact areas configured to be electrically connected from outside of the chip. This may allow for providing the chip with electrical signals from outside of the chip.

100 102 102 104 1 1 1 104 1 1 106 104 1 1 1 104 1 1 104 1 104 1 1 1 FIG. The row driver assemblyincludes a row driver unit. The row driver unitincludes n buffer circuits, n being an integer larger than 1. A first buffer circuit_illustrated inincludes a high buffer supply input VDD_and a low buffer supply input VSS_. The first buffer circuit_is configured to drive a buffered control signal CTR_to a pixel circuit. The first buffer circuit_may include an active amplifier circuit supplied with a low buffer supply voltage supplied to the low buffer supply input VSS_and a high buffer supply voltage supplied to the high buffer supply input VDD_. For example, the buffer circuit_may receive a digital pixel control signal alternating between a buffer input low level and a buffer input high level and output the buffered control signal CTR_as a digital buffered pixel control signal alternating between the low buffer supply voltage and the high buffer supply voltage. The first buffer circuit_may be effective as level-shifter. In particular, the buffer output low level and the buffer input low level may differ from each other and/or the buffer output high level and the buffer input high level differ from each other. The first buffer circuit_may have a comparatively high input impedance with regard to the pixel control signal and may have comparatively low output impedance with regard to the buffered control signal CTR_B. The high buffer supply input VDD_may be electrically connected, e.g. by a high buffer supply voltage line, to an output of a voltage generation unit.

106 106 The pixel circuitis configured to convert incident radiation into an electric signal, e.g. by a photodiode. The pixel circuit may be arranged in a pixel array comprising a plurality of pixel circuits arranged in a matrix pattern including, for example, pixel circuit rows and pixel circuit columns. For example, the pixel array may be formed in a pixel chip separate from a circuit chip including the row driver assembly. In this case, the chips may be stacked over one another and may be electrically connected to one another by one or more suitable interconnection techniques. Examples for interconnection techniques include bond wires, flip chip techniques, TSVs (through silicon vias) or TCVs (through chip vias). TSVs or TCVs involve actually creating a separate pathway through the “stack” by chemically etching, or using lasers or other techniques. The chips may be adhered to each other, e.g. by a film adhesive. The interconnection techniques may be combined and the number of stacked chips may be varied and adapted to the specific needs as required. In some examples, the pixel circuit and the row driver assembly may be integrated in one chip, e.g. in one semiconductor substrate. The number n of buffer circuits may depend on the number of required control signals for circuit elements, e.g. transistors such as MOSFETs, in each pixel circuit. Since a variety of pixel circuit designs exist, the number n may be adapted to the specific design of the pixel circuit, for example. The buffered and/or level-shifted control signal may be passed to one single pixel circuit, to the pixel circuits of one or more pixel circuit rows, to a portion of a pixel circuit row, or to all pixel circuits of the pixel array.

100 108 108 110 1 110 1 1 104 1 110 1 1 104 1 110 1 1 110 1 1 110 1 1 110 1 1 FIG. The row driver assemblyfurther includes a voltage converter unitthat is electrically coupled to low buffer supply inputs of the n buffer circuits. In the configuration example of, the voltage converter unitincludes a voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the voltage regulator circuit_is electrically coupled to the low buffer supply input VSS_of the first buffer circuit_. The voltage regulator circuit_may supply the low buffer supply voltage to the low buffer supply input VSS_of the first buffer circuit_. For example, the voltage regulator circuit_may be a low-dropout, LDO, regulator circuit. In some examples, the voltage supplied to the high buffer supply input VDD_is equal to the voltage supplied to the input I of the voltage regulator circuit_. In some other examples, the voltage supplied to the high buffer supply input VDD_is larger than the voltage supplied to the input I of the of the voltage regulator circuit_. For example, the high buffer supply input VDD_may be electrically connected to an output of a voltage generation unit that supplies a larger voltage than another output of the voltage generation unit that is electrically connected to the input I of the voltage regulator circuit.

100 112 1 112 1 110 1 112 1 112 1 The row driver assemblyfurther includes a charge pump circuit_. An output Ocp of the charge pump circuit_is electrically coupled to the reference input Ref of the voltage regulator circuit_. For example, an input of the charge pump circuit_may be electrically connected to an external capacitor, e.g. an off-chip capacitor on a circuit board. For example, the charge pump circuit_may be configured to supply negative voltage levels to the pixel circuit, for example.

1 FIG. 112 1 112 1 112 1 112 110 1 As is indicated by the dotted line in, a low buffer supply input of one or more buffer circuits of the n buffer circuits may be electrically coupled to the output Ocp of the charge pump circuit_. For example, a low buffer input of a further buffer circuit may be directly connected to the output Ocp of the charge pump circuit_. In addition or as an alternative, a low buffer input of another buffer circuit may be electrically coupled to the output Ocp of the charge pump circuit_via another voltage regulator circuit. For example, a reference input of the other voltage regulator circuit may be electrically coupled to the output Ocp of the charge pump circuit, or may be electrically coupled to the output O of the voltage regulator circuit_.

100 108 The row driver assemblymay be formed as part of a chip of a solid-state imaging device. The chip may be a circuit chip, and the solid-state imaging device may further include a pixel chip stacked over the circuit chip, the pixel chip including a plurality of pixel circuits arranged in a matrix pattern. For example, the solid-state imaging device may further include a supply voltage generation unit comprising a plurality of outputs, wherein the supply voltage generation unit is configured to provide supply voltages that differ from one another at the plurality of outputs. The voltage converter unitmay include a plurality of voltage regulator circuits, and at least two of the plurality of voltage regulator circuits may include inputs electrically coupled to different outputs of the supply voltage generation unit. For example, high buffer supply inputs of at least two of the n buffer circuits may be electrically coupled to different outputs of the supply voltage generation unit.

100 The row driver assemblydescribed herein allows for technical benefits such as reducing chip area, noise and costs. For example, the charge pump interacting with the voltage regulator circuit may be used for supplying different low buffer supply voltage levels to the low buffer supply inputs of several buffer circuits. This may allow for reducing the number of charge pump circuits, and hence, chip area. Moreover, the use of the voltage regulator circuit(s), e.g. LDO, may allow for a reduction of noise. In addition to the on-chip benefits, also off-chip benefits, e.g. benefits external from the chip, may be achieved. For example, costs and area of external, e.g. off-chip, capacitors electrically coupled to the charge pumps may be reduced. This may allow for reducing PCB (printed circuit board) area, and thus, PCB manufacturing costs.

2 FIG. 2 FIG. 1 FIG. 2 FIG. 2 FIG. 100 100 100 110 1 100 110 2 110 2 2 104 2 112 1 110 2 110 1 2 104 2 110 2 illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated in. The voltage regulator circuit_is a first voltage regulator circuit. The row driver assemblyof the configuration example illustrated infurther includes a second voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the second voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a second buffer circuit_of the n buffer circuits. The output Ocp of the charge pump circuit_is electrically connected to the reference input Ref of the second voltage regulator circuit_. The second voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the second buffer circuit_. For example, the second voltage regulator circuit_may be a low-dropout, LDO, regulator circuit. The circuit configuration ofallows for a flexible supply of low buffer supply voltages to the buffer circuits based on a single charge pump circuit.

3 FIG. 3 FIG. 1 FIG. 3 FIG. 3 FIG. 100 100 100 110 1 100 110 2 110 2 2 104 2 110 1 110 2 110 2 2 104 2 110 2 illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated in. The voltage regulator circuit_is a first voltage regulator circuit. The row driver assemblyof the configuration example illustrated infurther includes a second voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the second voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a second buffer circuit_of the n buffer circuits. The output O of the first voltage regulator circuit_is electrically connected to the reference input Ref of the second voltage regulator circuit_. The second voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the second buffer circuit_. For example, the second voltage regulator circuit_may be a low-dropout, LDO, regulator circuit. The circuit configuration ofallows for a flexible supply of low buffer supply voltages to the buffer circuits based on a single charge pump circuit.

4 FIG. 4 FIG. 1 FIG. 4 FIG. 100 100 100 110 1 112 1 112 1 100 112 2 110 2 110 2 2 104 2 110 2 2 104 2 110 2 illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated in. The voltage regulator circuit_is a first voltage regulator circuit. The charge pump circuit_is a first charge pump circuit_. The row driver assemblyof the configuration example illustrated infurther includes a second charge pump circuit_, a second voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the second voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a second buffer circuit_of the n buffer circuits. The second voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the second buffer circuit_. For example, the second voltage regulator circuit_may be a low-dropout, LDO, regulator circuit.

112 2 110 2 An output Ocp of the second charge pump circuit_is electrically connected to the reference input Ref of the second voltage regulator circuit_.

5 FIG. 5 FIG. 4 FIG. 5 FIG. 100 100 100 100 110 3 110 3 3 104 3 110 3 3 104 3 illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated in. The row driver assemblyof the configuration example illustrated infurther includes a third voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the third voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a third buffer circuit_of the n buffer circuits. The third voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the third buffer circuit_.

112 1 110 3 2 FIG. The output Ocp of the first charge pump circuit_is electrically coupled to the reference input Ref of the third voltage regulator circuit_(similar to the interconnection illustrated in the circuit configuration of).

6 FIG. 6 FIG. 4 FIG. 6 FIG. 100 100 100 100 110 3 110 3 3 104 3 110 3 3 104 3 illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated in. The row driver assemblyof the configuration example illustrated infurther includes a third voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the third voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a third buffer circuit_of the n buffer circuits. The third voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the third buffer circuit_.

110 1 110 3 3 FIG. The output O of the first voltage regulator circuit_is electrically connected to the reference input Ref of the third voltage regulator circuit_(similar to the interconnection illustrated in the circuit configuration of).

7 FIG. 7 FIG. 1 FIG. 7 FIG. 100 100 100 100 112 1 104 112 1 104 n n illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated in. In the row driver assemblyof the configuration example illustrated in, the output Ocp of the charge pump circuit_is electrically connected to a low buffer supply input VSS_n of an n-th buffer circuit_of the n buffer circuits. The charge pump_may supply a low buffer supply voltage to the low buffer supply input VSS_n of the n-th buffer circuit_without any intermediate voltage regulator circuit.

8 FIG. 8 FIG. 2 FIG. 100 100 100 102 106 illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated inand is one example of a row driver unitincluding six driver circuits, e.g. for supplying six control signals to the pixel circuit.

100 110 3 110 3 3 104 3 112 1 110 3 110 3 3 104 3 110 3 8 FIG. The row driver assemblyof the configuration example illustrated infurther includes a third voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the third voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a third buffer circuitof the six buffer circuits. The output Ocp of the charge pump circuit_is electrically connected to the reference input Ref of the third voltage regulator circuit_. The third voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the third buffer circuit_. For example, the third voltage regulator circuit_may be a low-dropout, LDO, regulator circuit.

100 110 4 110 4 4 104 4 112 1 110 4 110 4 4 104 4 110 4 8 FIG. The row driver assemblyof the configuration example illustrated infurther includes a fourth voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the fourth voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a fourth buffer circuit_of the six buffer circuits. The output Ocp of the charge pump circuit_is electrically connected to the reference input Ref of the fourth voltage regulator circuit_. The fourth voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the fourth buffer circuit_. For example, the fourth voltage regulator circuit_may be a low-dropout, LDO, regulator circuit.

100 110 5 110 5 5 104 5 112 1 110 5 110 5 5 104 5 110 5 8 FIG. The row driver assemblyof the configuration example illustrated infurther includes a fifth voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the fifth voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a fifth buffer circuit_of the six buffer circuits. The output Ocp of the charge pump circuit_is electrically connected to the reference input Ref of the fifth voltage regulator circuit_. The fifth voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the fifth buffer circuit_. For example, the fifth voltage regulator circuit_may be a low-dropout, LDO, regulator circuit.

100 112 1 6 104 6 112 1 6 104 6 8 FIG. In the row driver assemblyof the configuration example illustrated in, the output Ocp of the charge pump circuit_is electrically connected to a low buffer supply input VSS_of a sixth buffer circuit_of the six buffer circuits. The charge pump_may supply a low buffer supply voltage to the low buffer supply input VSS_of the sixth buffer circuit_without any intermediate voltage regulator circuit.

100 114 102 106 6 8 FIG. The row driver assemblyof the configuration example illustrated infurther includes a control signal switching unitelectrically coupled between the row driver unitand the pixel circuit. The control signal switching unit may allow for a flexible distribution of the control signals to pixel circuit elements, e.g. gates of MOSFETs, of the pixel circuit.

9 FIG. 9 FIG. 3 FIG. 100 100 100 102 illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated inand is one example of a row driver unitincluding six driver circuits, e.g. for supplying six control signals to the pixel circuit.

100 110 3 110 3 3 104 3 110 2 110 3 110 3 3 104 3 110 3 9 FIG. The row driver assemblyof the configuration example illustrated infurther includes a third voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the third voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a third buffer circuit_of the six buffer circuits. The output O of the second voltage regulator circuit_is electrically connected to the reference input Ref of the third voltage regulator circuit_. The third voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the third buffer circuit_. For example, the third voltage regulator circuit_may be a low-dropout, LDO, regulator circuit.

100 110 4 110 4 4 104 4 110 3 110 4 110 4 4 104 4 110 4 9 FIG. The row driver assemblyof the configuration example illustrated infurther includes a fourth voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the fourth voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a fourth buffer circuit_of the six buffer circuits. The output O of the third voltage regulator circuit_is electrically connected to the reference input Ref of the fourth voltage regulator circuit_. The fourth voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the fourth buffer circuit_. For example, the fourth voltage regulator circuit_may be a low-dropout, LDO, regulator circuit.

100 110 5 110 5 5 104 5 110 4 110 5 110 5 5 104 5 110 5 9 FIG. The row driver assemblyof the configuration example illustrated infurther includes a fifth voltage regulator circuit_comprising an input I, an output O, and a reference input Ref. The output O of the fifth voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a fifth buffer circuit_of the six buffer circuits. The output O of the fourth voltage regulator circuit_is electrically connected to the reference input Ref of the fifth voltage regulator circuit_. The fifth voltage regulator circuit_may supply a low buffer supply voltage to the low buffer supply input VSS_of the fifth buffer circuit_. For example, the fifth voltage regulator circuit_may be a low-dropout, LDO, regulator circuit.

100 112 1 6 104 6 112 1 6 104 6 9 FIG. In the row driver assemblyof the configuration example illustrated in, the output Ocp of the charge pump circuit_is electrically connected to a low buffer supply input VSS_of a sixth buffer circuit_of the six buffer circuits. The charge pump_may supply a low buffer supply voltage to the low buffer supply input VSS_of the sixth buffer circuit_without any intermediate voltage regulator circuit.

100 114 102 106 6 9 FIG. The row driver assemblyof the configuration example illustrated infurther includes a control signal switching unitelectrically coupled between the row driver unitand the pixel circuit. The control signal switching unit may allow for a flexible distribution of the control signals to pixel circuit elements, e.g. gates of MOSFETs, of the pixel circuit.

10 FIG. 10 FIG. 5 FIG. 100 100 100 102 illustrates a configuration example of a row driver assemblyaccording to another embodiment of the present technology. The row driver assemblyofis based on the row driver assemblyillustrated inand is one example of a row driver unitincluding six driver circuits, e.g. for supplying six control signals to the pixel circuit.

10 FIG. 112 1 6 104 6 110 1 110 2 112 2 5 104 5 110 3 110 4 In the configuration example of, the output Ocp of the first charge pump circuit_is electrically connected to a low buffer supply input VSS_of a sixth buffer circuit_, to a reference input Ref of a first voltage regulator circuit_, and to a to a reference input Ref of a second voltage regulator circuit_. Likewise, the output Ocp of the second charge pump circuit_is electrically connected to a low buffer supply input VSS_of a fifth buffer circuit_, to a reference input Ref of a third voltage regulator circuit_, and to a to a reference input Ref of a fourth voltage regulator circuit_.

110 1 1 104 1 110 2 2 104 2 110 3 3 104 3 110 4 4 104 4 Similar to the circuit configurations described above, an output O of the first voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a first buffer circuit_of the six buffer circuits. An output O of the second voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a second buffer circuit_of the six buffer circuits. An output O of the third voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a third buffer circuit_of the six buffer circuits. An output O of the fourth voltage regulator circuit_is electrically connected to a low buffer supply input VSS_of a fourth buffer circuit_of the six buffer circuits.

100 114 102 106 6 10 FIG. The row driver assemblyof the configuration example illustrated infurther includes a control signal switching unitelectrically coupled between the row driver unitand the pixel circuit. The control signal switching unit may allow for a flexible distribution of the control signals to pixel circuit elements, e.g. gates of MOSFETs, of the pixel circuit.

11 FIG. is a block diagram schematically depicting an outline of a system configuration of the CMOS image sensor which is an example of a solid-state imaging device to which the technology according to the present disclosure is applied.

1 11 11 11 20 20 20 20 A CMOS image sensormay include a pixel array sectionand a peripheral circuit section of the pixel array section. The pixel array sectionhas a configuration in which pixels (pixel circuits)including light receiving elements are two-dimensionally arranged in a row direction and a column direction, that is, in a matrix. Here, the row direction refers to an array direction of the pixelsin a pixel row, and the column direction refers to an array direction of the pixelsin a pixel column. The pixelperforms photoelectric conversion to generate and accumulate a photocharge corresponding to the amount of received light.

11 12 13 14 15 100 12 The peripheral circuit section of the pixel array sectionincludes, for example, a row selection section, an analog-to-digital conversion section, a logic circuit sectionas a signal processing section, a timing control section, and the like. The peripheral section may include the row driver assemblyas described in the embodiments of the present disclosure, e.g. as part of the row selection section. The peripheral section may further include a supply voltage generation unit configured to supply different voltages to inputs of the voltage converter circuits or high buffer supply inputs of buffer circuits of the row driver assembly according to the embodiments described herein.

11 31 31 31 32 32 32 31 20 31 31 12 1 m 1 n 11 FIG. In the pixel array section, pixel control lines(to) are wired along the row direction for each pixel row with respect to the matrix-shaped pixel array. Furthermore, vertical signal lines(to) are wired along the column direction for each pixel column. The pixel control linetransmits a drive signal for performing driving at the time of reading a signal from the pixel. The pixel control lineis illustrated as one wiring in, but is not limited to one. The pixel control linehas one end connected to an output end corresponding to each row of the row selection section.

11 12 13 14 15 Hereinafter, the respective constituent elements of the peripheral circuit section of the pixel array section, that is, the row selection section, the analog-to-digital conversion section, the logic circuit section, and the timing control sectionwill be described.

12 20 11 12 The row selection sectionincludes a shift register, an address decoder, and the like, and controls scanning of pixel rows and addresses of pixel rows in selection of each of the pixelsof the pixel array section. The row selection sectiongenerally includes two scanning systems of a reading scanning system and a sweeping scanning system although a specific configuration thereof is not illustrated.

20 11 20 20 The reading scanning system sequentially selects and scans the pixelsof the pixel array sectionrow by row in order to read a pixel signal from the pixel. The pixel signal read from the pixelis an analog signal. The sweeping scanning system performs sweeping scanning on a reading row on which reading scanning is to be performed by the reading scanning system prior to the reading scanning by a time corresponding to a shutter speed.

20 The sweeping scanning performed by the sweeping scanning system sweeps out unnecessary charges from photoelectric conversion elements of the pixelsin the reading row, whereby the photoelectric conversion elements are reset. Then, a so-called electronic shutter operation is performed by sweeping out (resetting) the unnecessary charges by the sweeping scanning system. Here, the electronic shutter operation refers to an operation of sweeping out photocharges of photoelectric conversion elements and newly starting exposure (starting accumulation of photocharges).

13 11 13 32 32 1 n The analog-to-digital conversion sectionincludes a set of a plurality of analog-to-digital converters (ADC) provided to correspond to the pixel columns (for example, for each pixel column) of the pixel array section. The analog-to-digital conversion sectionis a column-parallel analog-to-digital conversion section that converts an analog pixel signal output through each of the signal linestointo a digital signal for each pixel column.

13 As the analog-to-digital converter in the analog-to-digital conversion section, it is possible to use, for example, a single-slope analog-to-digital converter, which is an example of a reference signal comparison analog-to-digital converter.

14 13 14 14 1 The logic circuit section, which is the signal processing section, reads the pixel signal digitized by the analog-to-digital conversion sectionand performs predetermined signal processing. Specifically, as the predetermined signal processing, the logic circuit sectionperforms, for example, correction of a vertical line defect and a point defect or clamping of a signal, and further, digital signal processing such as parallel-to-serial conversion, compression, encoding, addition, averaging, or intermittent operation. The logic circuit sectionoutputs generated image data to a subsequent device as an output signal OUT of the CMOS image sensor.

15 15 12 13 14 The timing control sectiongenerates various timing signals, clock signals, control signals, and the like on the basis of a synchronization signal provided from the outside. Then, the timing control sectioncontrols driving of the row selection section, the analog-to-digital conversion section, the logic circuit section, and the like on the basis of the generated signals.

12 FIG. 20 20 21 20 22 23 24 25 21 is a circuit diagram depicting an exemplary circuit configuration of the pixel or pixel circuit. The pixelincludes, for example, a photodiodeas the photoelectric conversion element. The pixelincludes a transfer transistor, a reset transistor, an amplification transistor, and a selection transistorin addition to the photodiode. Other pixel circuit designs that may be based on a different number of transistors per pixel circuit may likewise be used. When using a different number of transistors per pixel circuit, the number n of the buffer circuits of the row driver assembly described in the embodiments of the present disclosure may be adapted, for example.

22 23 24 25 22 25 As the four transistors of the transfer transistor, the reset transistor, the amplification transistor, and the selection transistor, for example, N-channel MOS field-effect transistors are used. However, a combination of conductivity types of the four transistorstoexemplified here is merely an example, and the combination is not limited thereto.

20 31 31 31 20 12 12 1 m For the pixel, as the above-described pixel control lines(to), a plurality of pixel control lines is wired in common to the respective pixelsin the same pixel row. The plurality of pixel control lines is connected to an output end corresponding to each pixel row of the row selection sectionin units of pixel rows. The row selection section, e.g. the row driver assembly as defined in the embodiments of the present disclosure, appropriately outputs a transfer signal TRG, a reset signal RST, and a selection signal SEL to the plurality of pixel control lines.

21 21 24 22 24 The photodiodehas an anode electrode connected to a low-potential-side power supply (for example, ground), photoelectrically converts received light into photocharges (here, photoelectrons) of a charge amount corresponding to the amount of the light, and accumulates the photocharges. The photodiodehas a cathode electrode electrically connected to a gate electrode of the amplification transistorvia the transfer transistor. Here, a region where the gate electrode of the amplification transistoris electrically connected is a floating diffusion (floating diffusion region/impurity diffusion region) FD. The floating diffusion FD is a charge-voltage conversion section that converts a charge into a voltage.

DD 12 22 22 21 21 The transfer signal TRG activated at a high level (for example, Vlevel) is supplied from the row selection sectionto a gate electrode of the transfer transistor. The transfer transistoris brought into a conductive state in response to the transfer signal TRG, thereby transferring the photocharges, photoelectrically converted by the photodiodeand accumulated in the photodiode, to the floating diffusion FD.

23 12 23 23 DD DD The reset transistoris connected between a node of a high-potential-side power supply voltage Vand the floating diffusion FD. The reset signal RST that is activated at a high level is provided from the row selection sectionto a gate electrode of the reset transistor. The reset transistoris brought into a conductive state in response to the reset signal RST, and resets the floating diffusion FD by sweeping out charges of the floating diffusion FD to the node of the voltage V.

24 24 21 24 32 25 DD The amplification transistorhas the gate electrode connected to the floating diffusion FD and a drain electrode connected to the node of the high-potential-side power supply voltage V. The amplification transistorserves as an input section of a source-follower that reads a signal obtained by photoelectric conversion in the photodiode. That is, the amplification transistorhas a source electrode connected to the signal linevia the selection transistor.

25 24 32 12 25 25 24 32 20 The selection transistorhas a drain electrode connected to the source electrode of the amplification transistorand a source electrode connected to the signal line. The selection signal SEL that is activated at a high level is provided from the row selection sectionto a gate electrode of the selection transistor. The selection transistoris brought into a conductive state in response to the selection signal SEL, thereby transmitting the signal output from the amplification transistorto the signal linewith the pixelin a selected state.

20 22 23 24 25 25 24 25 Note that the pixeladopting a 4-Tr configuration including four transistors, that is, the transfer transistor, the reset transistor, the amplification transistor, and the selection transistorhas been exemplified in the above-described circuit example, but the present invention is not limited thereto. For example, a 3-Tr configuration in which the selection transistoris omitted and the amplification transistoralso functions as the selection transistorcan also be adopted, and a 5-Tr, or 6-Tr, or more configuration in which the number of transistors is increased can also be adopted as necessary.

1 As a semiconductor chip structure of the CMOS image sensorhaving the above-described configuration, a flat semiconductor chip structure and a stacked semiconductor chip structure can be exemplified. Furthermore, regarding a pixel structure, assuming that a substrate surface on a side on which a wiring layer is formed is defined as a front surface (front), it is possible to adopt a back surface irradiation pixel structure which captures light irradiated from a back surface side on the opposite side, or a front surface irradiation pixel structure which captures light irradiated from the front surface side.

Hereinafter, an outline of the flat semiconductor chip structure and the stacked semiconductor chip structure will be described.

13 FIG.A 13 FIG.A 1 11 41 11 20 12 13 14 15 41 11 42 41 is a perspective view schematically depicting the flat chip structure of the CMOS image sensor. As depicted in, the flat semiconductor chip structure has a structure in which the respective constituent elements of the peripheral circuit section of the pixel array sectionare formed on the same semiconductor substrateas the pixel array sectionin which the pixels (pixel circuits)are arranged in a matrix. Specifically, the row selection section, the analog-to-digital conversion section, the logic circuit section, the timing control section, and the like are formed on the same semiconductor substrateas the pixel array section. Padsfor external connection and power supply are provided, for example, at both left and right ends of the semiconductor chipof the first layer.

Hereinafter, an outline of the stacked semiconductor chip structure will be described.

13 FIG.B 13 FIG. 1 43 44 is an exploded perspective view schematically depicting the stacked semiconductor chip structure of the CMOS image sensor. As depicted in, the stacked semiconductor chip structure, that is, the stacked structure has a structure in which at least two semiconductor chips of a semiconductor chipof the first layer and a semiconductor chipof the second layer are stacked.

43 11 20 21 42 43 44 11 12 13 14 15 12 13 14 15 In this stacked semiconductor chip structure, the semiconductor chipof the first layer is a pixel chip in which the pixel array sectionin which the pixelsincluding photoelectric conversion elements (for example, the photodiodes) are two-dimensionally arranged in a matrix is formed. The padsfor external connection and power supply are provided, for example, at both left and right ends of the semiconductor chipof the first layer. The semiconductor chipof the second layer is a circuit chip in which the peripheral circuit section of the pixel array section, that is, the row selection section, the analog-to-digital conversion section, the logic circuit section, the timing control section, and the like are formed. Note that the arrangement of the row selection section, the analog-to-digital conversion section, the logic circuit section, and the timing control sectionis an example, and is not limited to this arrangement example.

11 43 44 72 73 The pixel array sectionon the semiconductor chipof the first layer and the peripheral circuit section on the semiconductor chipof the second layer are electrically connected via junction portionsandincluding a metal-metal junction including a Cu—Cu junction, a through silicon via (TSV), a micro-bump, and the like.

11 43 44 1 1 According to the stacked semiconductor chip structure described above, a process suitable for manufacturing the pixel array sectioncan be applied to the semiconductor chipof the first layer, and a process suitable for manufacturing the circuit part can be applied to the semiconductor chipof the second layer. Therefore, the processes can be optimized in manufacturing the CMOS image sensor. Therefore, the processes can be optimized in manufacturing the CMOS image sensor. In particular, an advanced process can be applied to manufacture the circuit part.

13 13 Next, an exemplary configuration of the analog-to-digital conversion sectionwill be described. Here, a single-slope analog-to-digital converter is used as each analog-to-digital converter of the analog-to-digital conversion section.

14 FIG. 13 1 13 11 130 illustrates the exemplary configuration of the analog-to-digital conversion section. In the CMOS image sensor, the analog-to-digital conversion sectionincludes a set of a plurality of single-slope analog-to-digital converters provided to respectively correspond to pixel columns of the pixel array section. Here, a single-slope analog-to-digital converterof the n-th column will be described as an example.

130 131 132 130 16 16 131 RAMP RAMP The analog-to-digital converterhas a circuit configuration including a comparatorand a counter. Then, in the single-slope analog-to-digital converter, a reference signal generated by a reference signal generating sectionis used. The reference signal generating sectionincludes, for example, a digital-to-analog converter (DAC), generates a reference signal Vof a sloped waveform (so-called ramp wave) whose level (voltage) monotonously decreases with the passage of time, and provides the reference signal Vto the comparatorprovided for each pixel column as a standard signal.

131 20 16 131 131 VSL RAMP RAMP VSL RAMP VSL VSL The comparatoruses an analog pixel signal Vread from the pixelas a comparison input and the reference signal Vof the ramp wave generated by the reference signal generating sectionas a reference input to compares both the signals. Then, for example, an output of the comparatoris in a first state (high level) when the reference signal Vis more than the pixel signal V, and an output is in a second state (for example, low level) when the reference signal Vis equal to or less than the pixel signal V. Therefore, the comparatoroutputs, as a comparison result, a pulse signal having a pulse width according to a signal level of the pixel signal V, specifically, corresponding to the magnitude of the signal level.

15 132 131 132 131 132 14 RAMP VSL A clock signal CLK is supplied from the timing control sectionto the counterat the same timing as a supply start timing of the reference signal Vto the comparator. Then, the counterperforms a counting operation in synchronization with the clock signal CLK to measure a period of a pulse width of an output pulse of the comparator, that is, a period from the start of a comparison operation to the end of the comparison operation. A count result (count value) of the counteris supplied to the logic circuit sectionas a digital value obtained by digitizing the analog pixel signal V.

13 130 16 20 32 RAMP VSL According to the analog-to-digital conversion sectionincluding the set of single-slope analog-to-digital convertersdescribed above, it is possible to obtain a digital value from time information until a magnitude relationship between the reference signal Vof the ramp wave generated by the reference signal generating sectionand the analog pixel signal Vread from the pixelthrough the signal linechanges.

15 FIG. 23020 is a perspective view showing an example of a laminated structure of a solid-state imaging devicewith a plurality of pixels arranged matrix-like in array form. Each pixel includes at least one photoelectric conversion element.

23020 910 920 910 920 910 23020 910 920 The solid-state imaging devicehas the laminated structure of a first chip (upper chip)and a second chip (lower chip). The laminated first and second chips,may be electrically connected to each other through TC(S)Vs (Through Contact (Silicon) Vias) formed in the first chip. The solid-state imaging devicemay be formed to have the laminated structure in such a manner that the first and second chipsandare bonded together at wafer level and cut out by dicing.

910 In the laminated structure of the upper and lower two chips, the first chipmay be an analog chip (sensor chip) including at least one analog component of each pixel circuit, e.g., the photoelectric conversion elements arranged in array form.

910 910 910 910 For example, the first chipmay include only the photoelectric conversion elements of the pixel circuits as described above with reference to the preceding FIGS. Alternatively, the first chipmay include further elements of each pixel circuit. For example, the first chipmay include, in addition to the photoelectric conversion elements, at least the transfer transistor, the reset transistor, the amplifier transistor, and/or the selection transistor of the pixel circuits. Alternatively, the first chipmay include each element of the pixel circuit.

920 910 920 910 920 The second chipmay be mainly a logic chip (digital chip) that includes the elements complementing the elements on the first chipto complete pixel circuits and current control circuits. The second chipmay also include analog circuits, for example circuits that quantize analog signals transferred from the first chipthrough the TCVs. For example, the second chipmay include all or at least some of the components of the row driver assembly as described in the embodiments herein.

920 910 920 23020 910 920 The second chipmay have one or more bonding pads BPD and the first chipmay have openings OPN for use in wire-bonding to the second chip. The solid-state imaging devicewith the laminated structure of the two chips,may have the following characteristic configuration:

910 920 23020 910 The electrical connection between the first chipand the second chipis performed through, for example, the TCVs. The TCVs may be arranged at chip ends or between a pad region and a circuit region. The TCVs for transmitting control signals and supplying power may be mainly concentrated at, for example, the four corners of the solid-state imaging device, by which a signal wiring area of the first chipcan be reduced.

16 FIG. i) A device that captures an image for use in viewing, such as a digital camera or a portable device equipped with a camera function. ii) A device used in transportation, such as a vehicle-mounted sensor that captures images of a front, a rear, surroundings, an interior, and the like of a vehicle, a monitoring camera that monitors traveling vehicles and roads, or a range-finding sensor that measures a distance between vehicles and the like, for safety driving such as automatic stop, recognition of a state of a driver state, and the like iii) A device used for home appliances such as a TV, a refrigerator, and an air conditioner, to capture an image of a gesture of a user and operate such an appliance in accordance with the gesture. iv) A device used for medical care and health care, such as an endoscope or a device that performs angiography by receiving infrared light. v) A device used for security, such as a monitoring camera for a crime prevention application or a camera for a person authentication application. vi) A device used for beauty care, such as a skin measuring instrument that captures an image of a skin or a microscope that captures an image of a scalp. vi) A device used for sports, such as an action camera or a wearable camera for sports applications and the like vii) A device used for agriculture, such as a camera for monitoring states of fields and crops. Examples of Application will be described below. The solid-state imaging device according to the examples described above can be used for various devices that sense light such as visible light, infrared light, ultraviolet light, and X-rays, for example, as depicted in. Specific examples of the various devices are listed hereinafter:

The technology according to the present disclosure may be realized in a light receiving device mounted in a mobile body of any type such as automobile, electric vehicle, hybrid electric vehicle, motorcycle, bicycle, personal mobility, airplane, drone, ship, or robot.

17 FIG. is a block diagram depicting an example of schematic configuration of a vehicle control system as an example of a mobile body control system to which the technology according to an embodiment of the present disclosure can be applied.

12000 12001 12000 12010 12020 12030 12040 12050 12051 12052 12053 12050 17 FIG. The vehicle control systemincludes a plurality of electronic control units connected to each other via a communication network. In the example depicted in, the vehicle control systemincludes a driving system control unit, a body system control unit, an outside-vehicle information detecting unit, an in-vehicle information detecting unit, and an integrated control unit. In addition, a microcomputer, a sound/image output section, and a vehicle-mounted network interface (I/F)are illustrated as a functional configuration of the integrated control unit.

12010 12010 The driving system control unitcontrols the operation of devices related to the driving system of the vehicle in accordance with various kinds of programs. For example, the driving system control unitfunctions as a control device for a driving force generating device for generating the driving force of the vehicle, such as an internal combustion engine, a driving motor, or the like, a driving force transmitting mechanism for transmitting the driving force to wheels, a steering mechanism for adjusting the steering angle of the vehicle, a braking device for generating the braking force of the vehicle, and the like.

12020 12020 12020 12020 The body system control unitcontrols the operation of various kinds of devices provided to a vehicle body in accordance with various kinds of programs. For example, the body system control unitfunctions as a control device for a keyless entry system, a smart key system, a power window device, or various kinds of lamps such as a headlamp, a backup lamp, a brake lamp, a turn signal, a fog lamp, or the like. In this case, radio waves transmitted from a mobile device as an alternative to a key or signals of various kinds of switches can be input to the body system control unit. The body system control unitreceives these input radio waves or signals, and controls a door lock device, the power window device, the lamps, or the like of the vehicle.

12030 12000 12030 12031 12030 12031 12030 The outside-vehicle information detecting unitdetects information about the outside of the vehicle including the vehicle control system. For example, the outside-vehicle information detecting unitis connected with an imaging section. The outside-vehicle information detecting unitmakes the imaging sectionimaging an image of the outside of the vehicle and receives the imaged image. On the basis of the received image, the outside-vehicle information detecting unitmay perform processing of detecting an object such as a human, a vehicle, an obstacle, a sign, a character on a road surface, or the like, or processing of detecting a distance thereto.

12031 12031 The imaging sectionmay be or may include an image sensor that includes an ADC with a voltage ramp generator according to the embodiments of the present disclosure. The light received by the imaging sectionmay be visible light or may be invisible light such as infrared rays or the like.

12040 12040 12041 12041 12041 12040 The in-vehicle information detecting unitdetects information about the inside of the vehicle and may be or may include a solid-state imaging device with a raw driver assembly according to the embodiments of the present disclosure. The in-vehicle information detecting unitis, for example, connected with a driver state detecting sectionthat detects the state of a driver. The driver state detecting section, for example, includes a camera that includes the solid-state imaging device and that is focused on the driver. On the basis of detection information input from the driver state detecting section, the in-vehicle information detecting unitmay calculate a degree of fatigue of the driver or a degree of concentration of the driver, or may determine whether the driver is dozing.

12051 12030 12040 12010 12051 The microcomputercan calculate a control target value for the driving force generating device, the steering mechanism, or the braking device on the basis of the information about the inside or outside of the vehicle which information is obtained by the outside-vehicle information detecting unitor the in-vehicle information detecting unitand output a control command to the driving system control unit. For example, the microcomputercan perform cooperative control intended to implement functions of an advanced driver assistance system (ADAS) which functions include collision avoidance or shock mitigation for the vehicle, following driving based on a following distance, vehicle speed maintaining driving, a warning of collision of the vehicle, a warning of deviation of the vehicle from a lane, or the like.

12051 12030 12040 In addition, the microcomputercan perform cooperative control intended for automatic driving, which makes the vehicle to travel autonomously without depending on the operation of the driver, or the like, by controlling the driving force generating device, the steering mechanism, the braking device, or the like on the basis of the information about the outside or inside of the vehicle which information is obtained by the outside-vehicle information detecting unitor the in-vehicle information detecting unit.

12051 12020 12030 12051 12030 In addition, the microcomputercan output a control command to the body system control uniton the basis of the information about the outside of the vehicle which information is obtained by the outside-vehicle information detecting unit. For example, the microcomputercan perform cooperative control intended to prevent a glare by controlling the headlamp so as to change from a high beam to a low beam, for example, in accordance with the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detecting unit.

12052 12061 12062 12063 12062 17 FIG. The sound/image output sectiontransmits an output signal of at least one of a sound or an image to an output device capable of visually or audible notifying information to an occupant of the vehicle or the outside of the vehicle. In the example of, an audio speaker, a display section, and an instrument panelare illustrated as the output device. The display sectionmay, for example, include at least one of an on-board display or a head-up display, wherein each of them may include a solid-state imaging device using a latch comparator circuit for event detection.

18 FIG. 12031 12031 12101 12102 12103 12104 12105 is a diagram depicting an example of the installation position of the imaging section, wherein the imaging sectionmay include imaging sections,,,, and.

12101 12102 12103 12104 12105 12100 12101 12105 12100 12102 12103 12100 12104 12100 12105 The imaging sections,,,, andare, for example, disposed at positions on a front nose, side-view mirrors, a rear bumper, and a back door of the vehicleas well as a position on an upper portion of a windshield within the interior of the vehicle. The imaging sectionprovided to the front nose and the imaging sectionprovided to the upper portion of the windshield within the interior of the vehicle obtain mainly an image of the front of the vehicle. The imaging sectionsandprovided to the side view mirrors obtain mainly an image of the sides of the vehicle. The imaging sectionprovided to the rear bumper or the back door obtains mainly an image of the rear of the vehicle. The imaging sectionprovided to the upper portion of the windshield within the interior of the vehicle is used mainly to detect a preceding vehicle, a pedestrian, an obstacle, a signal, a traffic sign, a lane, or the like.

18 FIG. 12101 12104 12111 12101 12112 12113 12102 12103 12114 12104 12100 12101 12104 Incidentally,depicts an example of photographing ranges of the imaging sectionsto. An imaging rangerepresents the imaging range of the imaging sectionprovided to the front nose. Imaging rangesandrespectively represent the imaging ranges of the imaging sectionsandprovided to the side view mirrors. An imaging rangerepresents the imaging range of the imaging sectionprovided to the rear bumper or the back door. A bird's-eye image of the vehicleas viewed from above is obtained by superimposing image data imaged by the imaging sectionsto, for example.

12101 12104 12101 12104 At least one of the imaging sectionstomay have a function of obtaining distance information. For example, at least one of the imaging sectionstomay be a stereo camera constituted of a plurality of imaging elements, imaging element having pixels for phase difference detection or may include a ToF module including a high dynamic range image sensor that includes an ADC with a voltage ramp generator according to the present disclosure.

12051 12111 12114 12100 12101 12104 12100 12100 12051 For example, the microcomputercan determine a distance to each three-dimensional object within the imaging rangestoand a temporal change in the distance (relative speed with respect to the vehicle) on the basis of the distance information obtained from the imaging sectionsto, and thereby extract, as a preceding vehicle, a nearest three-dimensional object in particular that is present on a traveling path of the vehicleand which travels in substantially the same direction as the vehicleat a predetermined speed (for example, equal to or more than 0 km/hour). Further, the microcomputercan set a following distance to be maintained in front of a preceding vehicle in advance, and perform automatic brake control (including following stop control), automatic acceleration control (including following start control), or the like. It is thus possible to perform cooperative control Intended for automatic driving that makes the vehicle travel autonomously without depending on the operation of the driver or the like.

12051 12101 12104 12051 12100 12100 12100 12051 12051 12061 12062 12010 12051 For example, the microcomputercan classify three-dimensional object data on three-dimensional objects into three-dimensional object data of a two-wheeled vehicle, a standard-sized vehicle, a large-sized vehicle, a pedestrian, a utility pole, and other three-dimensional objects on the basis of the distance information obtained from the imaging sectionsto, extract the classified three-dimensional object data, and use the extracted three-dimensional object data for automatic avoidance of an obstacle. For example, the microcomputeridentifies obstacles around the vehicleas obstacles that the driver of the vehiclecan recognize visually and obstacles that are difficult for the driver of the vehicleto recognize visually. Then, the microcomputerdetermines a collision risk indicating a risk of collision with each obstacle. In a situation in which the collision risk is equal to or higher than a set value and there is thus a possibility of collision, the microcomputeroutputs a warning to the driver via the audio speakeror the display section, and performs forced deceleration or avoidance steering via the driving system control unit. The microcomputercan thereby assist in driving to avoid collision.

12101 12104 12051 12101 12104 12101 12104 12051 12101 12104 12052 12062 12052 12062 At least one of the imaging sectionstomay be an infrared camera that detects infrared rays. The microcomputercan, for example, recognize a pedestrian by determining whether or not there is a pedestrian in imaged images of the imaging sectionsto. Such recognition of a pedestrian is, for example, performed by a procedure of extracting characteristic points in the imaged images of the imaging sectionstoas infrared cameras and a procedure of determining whether or not it is the pedestrian by performing pattern matching processing on a series of characteristic points representing the contour of the object. When the microcomputerdetermines that there is a pedestrian in the imaged images of the imaging sectionsto, and thus recognizes the pedestrian, the sound/image output sectioncontrols the display sectionso that a square contour line for emphasis is displayed so as to be superimposed on the recognized pedestrian. The sound/image output sectionmay also control the display sectionso that an icon or the like representing the pedestrian is displayed at a desired position.

The example of the vehicle control system to which the technology according to an embodiment of the present disclosure is applicable has been described above. By applying an image sensor that includes an ADC with a voltage ramp generator according to the present disclosure, the results of image recognition can be more reliable. For example, recognition of pedestrians can be performed on more reliable pixel information. A faulty image sensor can be reliably detected and reported to a higher instance.

Additionally, embodiments of the present technology are not limited to the above-described embodiments, but various changes can be made within the scope of the present technology without departing from the gist of the present technology.

A solid-state imaging device including an image sensor that includes an ADC with a voltage ramp generator circuit according to the present disclosure may be any device used for analyzing and/or processing radiation such as visible light, infrared light, ultraviolet light, and X-rays. For example, the solid-state imaging device may be any electronic device in the field of traffic, the field of home appliances, the field of medical and healthcare, the field of security, the field of beauty, the field of sports, the field of agriculture, the field of image reproduction or the like.

Specifically, in the field of image reproduction, the solid-state imaging device may be a device for capturing an image to be provided for appreciation, such as a digital camera, a smart phone, or a mobile phone device having a camera function. In the field of traffic, for example, the solid-state imaging device may be integrated in an in-vehicle sensor that captures the front, rear, peripheries, an interior of the vehicle, etc. for safe driving such as automatic stop, recognition of a state of a driver, or the like, in a monitoring camera that monitors traveling vehicles and roads, or in a distance measuring sensor that measures a distance between vehicles or the like.

In the field of home appliances, the solid-state imaging device may be integrated in any type of sensor that can be used in devices provided for home appliances such as TV receivers, refrigerators, and air conditioners to capture gestures of users and perform device operations according to the gestures. Accordingly the solid-state imaging device may be integrated in home appliances such as TV receivers, refrigerators, and air conditioners and/or in devices controlling the home appliances. Furthermore, in the field of medical and healthcare, the solid-state imaging device may be integrated in any type of sensor, e.g. a solid-state image device, provided for use in medical and healthcare, such as an endoscope or a device that performs angiography by receiving infrared light.

In the field of security, the solid-state imaging device can be integrated in a device provided for use in security, such as a monitoring camera for crime prevention or a camera for person authentication use. Furthermore, in the field of beauty, the solid-state imaging device can be used in a device provided for use in beauty, such as a skin measuring instrument that captures skin or a microscope that captures a probe. In the field of sports, the solid-state imaging device can be integrated in a device provided for use in sports, such as an action camera or a wearable camera for sport use or the like. Furthermore, in the field of agriculture, the solid-state imaging device can be used in a device provided for use in agriculture, such as a camera for monitoring the condition of fields and crops.

100 102 104 1 104 1 1 1 1 106 a row driver unit () comprising n buffer circuits (_), n being an integer larger than 1, wherein each of the n buffer circuits (_) includes a high buffer supply input (VDD_) and a low buffer supply input (VSS_), and is configured to drive a buffered control signal (CTR_) to a pixel circuit () configured to 108 1 104 1 108 110 1 110 1 1 104 1 104 1 a voltage regulator circuit (_) comprising an input (I), an output (O), and a reference input (Ref), wherein the output (O) of the voltage regulator circuit (_) is electrically coupled to a low buffer supply input (VSS_) of a first buffer circuit (_) of the n buffer circuits (_); and 112 1 112 1 110 1 a charge pump circuit (_), wherein an output (Ocp) of the charge pump circuit (_) is electrically coupled to the reference input (Ref) of the voltage regulator circuit (_). a voltage converter unit () electrically coupled to low buffer supply inputs (VSS_) of the n buffer circuits (_), the voltage converter unit () including [1] A row driver assembly (), comprising: 100 110 1 [2] The row driver assembly () according to [1] above, wherein the voltage regulator circuit (_) is a low-dropout, LDO, regulator circuit. 100 110 1 110 1 100 110 2 110 2 2 104 2 104 1 104 2 112 1 110 2 a second voltage regulator circuit (_) comprising an input (I), an output (O), and a reference input (Ref), wherein the output (O) of the second voltage regulator circuit (_) is electrically coupled to a low buffer supply input (VSS_) of a second buffer circuit (_) of the n buffer circuits (_,_), and the output (Ocp) of the charge pump circuit (_) is electrically coupled to the reference input (Ref) of the second voltage regulator circuit (_). [3] The row driver assembly () according to [1] or [2] above, wherein the voltage regulator circuit (_) is a first voltage regulator circuit (_), the row driver assembly () further comprising: 100 110 1 110 1 100 110 2 110 2 2 104 2 104 1 104 2 110 1 110 2 a second voltage regulator circuit (_) comprising an input (I), an output (O), and a reference input (Ref), wherein the output (O) of the second voltage regulator circuit (_) is electrically coupled to a low buffer supply input (VSS_) of a second buffer circuit (_) of the n buffer circuits (_,_), and the output (O) of the first voltage regulator circuit (_) is electrically coupled to the reference input (Ref) of the second voltage regulator circuit (_). [4] The row driver assembly () according to [1] or [2] above, wherein the voltage regulator circuit (_) is a first voltage regulator circuit (_), the row driver assembly () further comprising: 100 110 1 110 1 112 1 112 1 100 112 2 a second charge pump circuit (_); and 110 2 110 2 2 104 2 104 1 104 2 112 2 110 2 a second voltage regulator circuit (_) comprising an input (I), an output (O), and a reference input (Ref), wherein the output (O) of the second voltage regulator circuit (_) is electrically coupled to a low buffer supply input (VSS_) of a second buffer circuit (_) of the n buffer circuits (_,_), and an output (Ocp) of the second charge pump circuit (_) is electrically coupled to the reference input (Ref) of the second voltage regulator circuit (_). [5] The row driver assembly () according to [1] or [2] above, wherein the voltage regulator circuit (_) is a first voltage regulator circuit (_) and the charge pump circuit (_) is a first charge pump circuit (_), the row driver assembly () further comprising: 100 110 3 110 3 3 104 3 104 1 104 2 104 3 112 1 110 3 a third voltage regulator circuit (_) comprising an input (I), an output (O), and a reference input (Ref), wherein the output (O) of the third voltage regulator circuit (_) is electrically coupled to a low buffer supply input (VSS_) of a third buffer circuit (_) of the n buffer circuits (_,_,_), and the output (Ocp) of the first charge pump circuit (_) is electrically coupled to the reference input (Ref) of the third voltage regulator circuit (_). [6] The row driver assembly () according to [5] above, further comprising: 100 110 1 110 1 100 110 3 110 3 3 104 3 104 1 104 2 104 3 110 1 110 3 a third voltage regulator circuit (_) comprising an input (I), an output (O), and a reference input (Ref), wherein the output (O) of the third voltage regulator circuit (_) is electrically coupled to a low buffer supply input (VSS_) of a third buffer circuit (_) of the n buffer circuits (_,_,_), and the output (O) of the first voltage regulator circuit (_) is electrically coupled to the reference input (Ref) of the third voltage regulator circuit (_). [7] The row driver assembly () according to [5] above, wherein the voltage regulator circuit (_) is a first voltage regulator circuit (_), the row driver assembly () further comprising: 100 112 1 5 104 5 104 1 104 6 [8] The row driver assembly () according to [5], wherein the output (Ocp) of the second charge pump circuit (_) is electrically coupled to a low buffer supply input (VSS_) of an n−1-th buffer circuit (_) of the n buffer circuits (_. . .). 100 112 1 104 104 1 104 n n [9] The row driver assembly () according to any of [1] to [8] above, wherein the output (Ocp) of the charge pump circuit (_) is electrically coupled to a low buffer supply input (VSS_n) of an n-th buffer circuit (_) of the n buffer circuits (_,_). 100 114 102 106 [10] The row driver assembly () according to any of [1] to [9] above, further comprising a control signal switching unit () electrically coupled between the row driver unit () and the pixel circuit (). [11] A solid-state imaging device comprising a chip including the row driver assembly according to any of to [10] above. [12] The solid-state imaging device according to [11] above, wherein the chip is a circuit chip, and the solid-state imaging device further includes a pixel chip stacked over the circuit chip, the pixel chip including a plurality of pixel circuits arranged in a matrix pattern. 108 110 1 110 5 110 1 110 5 a supply voltage generation unit comprising a plurality of outputs, wherein the supply voltage generation unit is configured to provide supply voltages that differ from one another at the plurality of outputs, wherein the voltage converter unit () includes a plurality of voltage regulator circuits (_. . ._), and at least two of the plurality of voltage regulator circuits (_. . ._) include inputs (I) electrically coupled to different outputs of the supply voltage generation unit. [13] The solid-state imaging device according to [11] or [12] above, further comprising: 1 6 104 1 104 6 [1] The solid-state imaging device according to [13] above, wherein high buffer supply inputs (VDD_. . . VDD_) of at least two of the n buffer circuits (_. . ._) are electrically coupled to different outputs of the supply voltage generation unit. The present technology can also be configured as described below: