Legal claims defining the scope of protection, as filed with the USPTO.
1. A modular isolation capsule, comprising: a housing defining a chamber for semiconductor manufacturing materials, said housing including a base; an inlet tower disposed in said base for admitting a gaseous working fluid to said modular isolation capsule for purging said modulation isolation chamber with said gaseous working fluid, said inlet tower including a check valve and filter assembly for permitting one-way flow of said gaseous working fluid into said modular isolation capsule and for filtering said gaseous working fluid being admitted to said modular isolation capsule; and an outlet port disposed in said base for removing said gaseous working fluid from said modular isolation capsule, said outlet port including a check valve assembly for permitting one-way flow of said gaseous working fluid being removed from said modular isolation capsule.
2. The modular isolation capsule of claim 1, wherein said inlet tower has a plurality of spaced apart orifices.
3. The modular isolation capsule of claim 2, wherein said spaced apart orifices comprise a series of nozzles that are graduated in size.
4. The modular isolation capsule of claim 1, wherein said inlet tower has a plurality of spaced apart radial slotted ports.
5. The modular isolation capsule of claim 1, wherein said outlet port comprises an outlet tower having a plurality of spaced apart orifices.
6. The modular isolation capsule of claim 1, wherein said outlet port comprises an outlet tower having a plurality of spaced apart radial slotted ports.
Complete technical specification and implementation details from the patent document.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
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Unknown
March 28, 2000
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