Display apparatus and fabrication process thereof

1. A method of producing an active matrix substrate for a liquid crystal display apparatus, said active matrix substrate having pixel electrodes each of which is provided with a thin film transistor at each intersecting point between plural signal lines and plural scanning lines perpendicular to the signal lines, comprising the steps of: providing a substrate; producing on the substrate a first insulation layer of silicon nitride; producing on the first silicon nitride insulation layer a second insulation layer of silicone oxide by thermally oxidizing the surface of the first silicon nitride insulation layer; producing a polycrystal silicon layer on the second silicone oxide insulation layer; producing the thin film transistors in the polycrystal silicon layer; forming insulation on the thin film transistors having through holes reaching to the source and drain regions of the thin film transistors; forming respective electrodes on said insulation in contact with the source and drain regions, said respective electrodes being formed by depositing aluminum and thereafter laminating TiN on the deposited aluminum; forming further insulation on said respective electrodes and the adjacent surface of said insulation, said further insulation having through holes reaching to the respective electrodes; and forming pixel electrodes on the said further insulation, each pixel electrode being in ohmic contact with an associated one of said respective electrodes.

2. A method according to claim 1, wherein said step of producing the first silicon nitride insulation layer is performed by a low pressure CVD process or by a plasma enhanced CVD process.

3. A method of producing a liquid crystal display apparatus, comprising the steps of: producing an active matrix substrate according to either of claims 1 and 2; disposing a substrate with a common electrode opposite the active matrix substrate; and providing a liquid crystal material between the active matrix substrate and the substrate disposed opposite thereto.