A multi-chip electronics module is provided which utilizes benzocyclobutene as a laminate adhesive for bonding the upper dielectric films in a high density interconnect structure. The benzocyclobutene thermosetting polymer is spin coated on a polyimide film, and baked at low temperature to remove any solvent to leave a B-staged coating on the polyimide film. The composite film can be laminated to an underlying electrical structure using a vacuum laminator and heat. As the heat is applied, the BCB layer softens, flows and then cures to bond the polyimide film to the underlying electrical structure.
Legal claims defining the scope of protection, as filed with the USPTO.
1. An electronics module, incorporating a high density interconnect structure, comprising: a substrate with a plurality of electronic component chips disposed on a surface thereof, each of said plurality of chips having contact pads disposed thereon, and additionally having a first stratum of said high density interconnect structure, said first stratum having a dielectric layer including an uppermost sublayer comprising a thermoset polymer, a lowermost sublayer comprising a thermoplastic polymer, and any sublayers intervening between said uppermost and lowermost sublayers comprising a thermoset polymer, where said dielectric layer of said first stratum supports a conductive segment which is electrically connected to at least some of said contact pads disposed on said plurality of chips; and at least one additional stratum of said high density interconnect structure disposed over said first stratum, each additional stratum having a dielectric layer including an uppermost sublayer comprising a thermoset polymer, a lowermost sublayer comprising benzocyclobutene polymer, and any sublayers intervening between said uppermost and lowermost sublayers of said dielectric layer of said additional stratum comprise a thermoset polymer, where said dielectric layer supports a conductive segment which is electrically connected to at least some of said contact pads disposed on said plurality of chips.
2. The module of claim 1, where said plurality of chips are disposed in chipwells formed in said substrate surface, and where said first stratum of high density interconnect structure has an upper sublayer comprising a polyimide and a lower sublayer comprising a plasticized polyetherimide.
3. The module of claim 2, where each said at least one additional strata of high density interconnect structure has an upper layer comprising a polyimide and where each of said benzocyclobutene polymer layers is approximately 5 to approximately 15 microns thick.
4. The module of claim 2, where each of said at least one benzocyclobutene polymer layer is about 9 microns to about 13 microns thick.
5. The module of claim 2, where each of said at least one benzocyclobutene polymer layer is about 12 microns thick.
6. The electronics module according to claim 2 wherein each of said at least one benzocyclobutene polymer layer has a glass transition temperature greater than 300.degree. C.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
August 8, 1997
September 25, 2001
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