Patentable/Patents/US-6299991
US-6299991

Selective growth of ferromagnetic films for magnetic memory, storage-based devices

PublishedOctober 9, 2001
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

A device and a method of forming the device, includes selective area deposition of a ferromagnetic material on a substrate. The substrate surface is partially covered with material having a crystal structure having at least one symmetry relation with the crystal structure of the ferromagnetic material

Patent Claims
11 claims

Legal claims defining the scope of protection, as filed with the USPTO.

1

1. A device, comprising: a substrate; an amorphous material, formed on said substrate and having gaps so as to form exposed portions of said substrate; and a ferromagnetic material selectively deposited in said gaps on said exposed portions of said substrate wherein said substrate has a crystal structure having at least one symmetry relation with crystal structure of said ferromagnetic material, and wherein said amorphous material comprises a material on which said ferromagnetic material does not grow.

2

2. The device according to claim 1, wherein said ferromagnetic material comprises CrO.sub.2.

3

3. The device according to claim 2, wherein at a predetermined temperature of said substrate, said CrO.sub.2 grows only on said substrate and does not grow on said amorphous material.

4

4. The device according to claim 3, wherein said substrate comprises one of a single crystal sapphire (Al.sub.2 O.sub.3) and titanium oxide (TiO.sub.2).

5

5. The device according to claim 2, wherein said substrate comprises a crystal structure having a shape one of trigonal, hexagonal, monoclinic, orthorhombic, tetragonal, and cubic.

6

6. The device according to claim 2, wherein said substrate comprises one of a single crystal sapphire (Al.sub.2 O.sub.3) and titanium oxide (TiO.sub.2).

7

7. The device according to claim 2, wherein said amorphous material comprises one of amorphous SiO.sub.2, Si.sub.3 N.sub.4, and a compound of amorphous SiO.sub.2 and Si.sub.3 N.sub.4.

8

8. The device according to claim 1, wherein said ferromagnetic material comprises vapor-deposited CrO.sub.2 without formation of any chromates.

9

9. A device comprising: a substrate; and a selective area-deposited ferromagnetic material layer formed on said substrate; wherein said substrate comprises a non-amorphous material that bears symmetry relation with said ferromagnetic material so that said ferromagnetic material will grow on said non-amorphous material, and an amorphous material upon which said ferromagnetic material does not grow and which does not share a symmetry relation with said ferromagnetic material.

10

10. The device according to claim 9, wherein said ferromagnetic material comprises vapor-deposited CrO.sub.2 without formation of any chromates.

11

11. The device according to claim 9, wherein said amorphous material comprises one of SiO.sub.2, Si.sub.3 N.sub.4, and a compound of SiO.sub.2 and Si.sub.3 N.sub.4.

Classification Codes (CPC)

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Patent Metadata

Filing Date

October 15, 1998

Publication Date

October 9, 2001

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