It is an object of the present invention to provide an aqueous dispersion for CMP that has low generation of coarse particles from abrasive particles or the like during storage or transport and maintains excellent polishing performance The aqueous dispersion for CMP according to the first aspect of the invention comprises abrasive particles, an amphipathic compound and water. The aqueous dispersion for CMP according to the second aspect of the invention comprising abrasive particles and water, wherein a boundary film is formed at the interface between the aqueous dispersion and the air. The boundary film may comprise an amphipathic compound. The HLB value of the amphipathic compound is preferably greater than 0 but no greater than 6. As amphipathic compounds there may be used one or more compounds selected from among [1] aliphatic alcohols, [2] fatty acids, [3] sorbitan fatty acid esters, [4] glycerin fatty acid esters, [5] propylene glycol fatty acid esters and [6] polyethylene glycol fatty acid esters.
Legal claims defining the scope of protection, as filed with the USPTO.
1. An aqueous dispersion for chemical mechanical polishing comprising abrasive particles, an amphipathic compound and water; wherein said amphipathic compound is one or more compounds selected from: aliphatic alcohols; sorbitan fatty acid esters; glycerin fatty acid esters; propylene glycol fatty acid esters; and wherein said amphipathic compound is present in an amount of 0.0001-1 part by weight per 100 parts by weight of said aqueous dispersion; and wherein said abrasive particles are present in an amount of 0.05-20 parts by weight per 100 parts by weight of said aqueous dispersion.
2. An aqueous dispersion for chemical mechanical polishing according to claim 1 , wherein an HLB value which represents a hydrophilic/lipophilic balance of said amphipathic compound is greater than 0 but no greater than 6.
3. An aqueous dispersion for chemical mechanical polishing comprising abrasive particles and water, wherein a boundary film is formed at an interface between said aqueous dispersion and air; wherein said boundary film comprises an amphipathic compound; wherein said amphipathic compound is one or more compounds selected from: aliphatic alcohols; sorbitan fatty acid esters; glycerin fatty acid esters; propylene glycol fatty acid esters; and wherein said amphipathic compound is present in an amount of 0.0001-1 part by weight per 100 parts by weight of said aqueous dispersion; and wherein said abrasive particles are present in an amount of 0.05-20 parts by weight per 100 parts by weight of said aqueous dispersion.
4. An aqueous dispersion for chemical mechanical polishing according to claim 3 , wherein an HLB value which represents a hydrophilic/lipophilic balance of said amphipathic compound is greater than 0 but no greater than 6.
5. The aqueous dispersion according to claim 1 , wherein said abrasive particles are present in an amount of 0.07-15 parts by weight per 100 parts by weight of said aqueous dispersion.
6. The aqueous dispersion according to claim 3 , wherein said abrasive particles are present in an amount of 0.07-15 parts by weight per 100 parts by weight of said aqueous dispersion.
7. The aqueous dispersion according to claim 1 , wherein said abrasive particles are present in an amount of 0.1-10 parts by weight per 100 parts by weight of said aqueous dispersion.
8. The aqueous dispersion according to claim 3 , wherein said abrasive particles are present in an amount of 0.1-10 parts by weight per 100 parts by weight of said aqueous dispersion.
9. The aqueous dispersion according to claim 1 , wherein said amphipathic compound is present in an amount of 0.0005-0.1 parts by weight per 100 parts by weight of said aqueous dispersion.
10. The aqueous dispersion according to claim 3 , wherein said amphipathic compound is present in an amount of 0.0005-0.1 parts by weight per 100 parts by weight of said aqueous dispersion.
11. The aqueous dispersion according to claim 1 , wherein said amphipathic compound has an HLB value of 0.1-6.
12. The aqueous dispersion according to claim 3 , wherein said amphipathic compound has an HLB value of 0.1-6.
13. The aqueous dispersion according to claim 1 , wherein said amphipathic compound has an HLB value of 0.3-5.
14. The aqueous dispersion according to claim 3 , wherein said amphipathic compound has an HLB value of 0.3-5.
15. The aqueous dispersion according to claim 1 , further comprising an oxidizing agent in an amount of 0.05-15 parts by weight per 100 parts by weight of said aqueous dispersion and selected from the group consisting of hydrogen peroxide, peracetic acid, perbenzoic acid, tert-butylhydroperoxide, nitric acid, iron nitrate, perchloric acid, potassium ferricyanide, ammonium persulfate and hetero polyacids.
16. The aqueous dispersion according to claim 3 , further comprising an oxidizing agent in an amount of 0.05-15 parts by weight per 100 parts by weight of said aqueous dispersion and selected from the group consisting of hydrogen peroxide, peracetic acid, perbenzoic acid, tert-butylhydro peroxide, nitric acid, iron nitrate, perchloric acid, potassium ferricyanide, ammonium persulfate and hetero polyacids.
17. The aqueous dispersion according to claim 1 , wherein said aqueous dispersion comprises a medium selected from the group consisting of water and a mixture of water and methanol.
18. The aqueous dispersion according to claim 3 , wherein said aqueous dispersion comprises a medium selected from the group consisting of water and a mixture of water and methanol.
19. The aqueous dispersion according to claim 1 , wherein said sorbitan fatty acid esters are selected from the group consisting of sorbitan monostearate, sorbitan distearate, sorbitan tristearate, sorbitan tetrastearate, sorbitan monooleate, sorbitan dioleate, sorbitan trioleate, sorbitan sesquioleate, and mixtures thereof.
20. The aqueous dispersion according to claim 3 , wherein said sorbitan fatty acid esters are selected from the group consisting of sorbitan monostearate, sorbitan distearate, sorbitan tristearate, sorbitan tetastearate, sorbitan monooleate, sorbitan dioleate, sorbitan trioleate, sorbitan sesquioleate, and mixtures thereof.
21. The aqueous dispersion according to claim 1 , wherein said glycerin fatty acid esters are selected from the group consisting of glycerol monostearate, glycerol monooleate, and mixtures thereof.
22. The aqueous dispersion according to claim 3 , wherein said glycerin fatty acid esters are selected from the group consisting of glycerol monostearate, glycerol monooleate, and mixtures thereof.
23. The aqueous dispersion according to claim 1 , wherein said propylene glycol fatty acid esters are selected from the group consisting of propylene glycol monostearate, propylene glycol monolaurate, and mixtures thereof.
24. The aqueous dispersion according to claim 3 , wherein said propylene glycol fatty acid esters are selected from the group consisting of propylene glycol monostearate, propylene glycol monolaurate, and mixtures thereof.
25. The aqueous dispersion according to claim 1 , wherein said aliphatic alcohols are selected from the group consisting of hexanol, heptanol, octanol, decanol, dodecanol, tetradecanol, hexadecanol, octadecanol, oleyl alcohol, and mixtures thereof.
26. The aqueous dispersion according to claim 3 , wherein said aliphatic alcohols are selected from the group consisting of hexanol, heptanol, octanol, decanol, dodecanol, tetradecanol,. hexadecanol, octadecanol, oleyl alcohol, and mixtures thereof.
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September 29, 2000
May 7, 2002
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