A process for selectively removing an anti-reflective coating (ARC) in the manufacturing of semiconductor integrated circuits using an oxygen-free plasma of one or more fluorine containing compounds, chlorine and an optional inert carrier gas. The process renders effective etching of the anti-reflective coating while maintaining dimensional control of a previously etched photoresist.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A process for removing exposed areas of an organic ARC on a metallic layer, the exposed areas of the ARC having been exposed by previously etching a photoresist covering the ARC, the processing comprising exposing the exposed areas of the ARC to an oxygen-free system of etching agents in an ionized state in a reaction chamber of a plasma generating device, the system of etching agents being nitrogen-free and including one or more fluorine containing compounds, chlorine and an optional inert carrier gas.
2. The process of claim 1 , wherein the one or more fluorine-containing compounds is selected from the group consisting of CF 4 , CHF 3 , C 2 F 6 , CH 2 F 2 , SF 6 , and C n F n 4 .
3. The process of claim 1 , wherein the plasma generating device is evacuated to a pressure below 100 mTorr while etching the ARC with the etching agents.
4. The process of claim 1 , wherein the plasma generating device comprises an ECR reactor and the ARC is on a semiconductor substrate.
5. The process of claim 1 , wherein the ARC is on a semiconductor wafer.
6. The process of claim 1 , wherein the plasma is generated adjacent a substrate including the ARC, the plasma generating device including a dielectric window facing the substrate and an antenna outside the reaction chamber, the antenna forming the plasma by inductively coupling radio frequency energy through the dielectric window and into the reaction chamber.
7. The method of claim 1 , wherein the organic ARC consists essentially of polyimide.
8. The method of claim 1 , wherein the plasma generating device is evacuated to a pressure below 40 mTorr while etching the ARC with the etching agents.
9. The process of claim 1 , wherein the ARC is exposed by channels forming a circuit pattern previously etched in the photoresist covering the ARC.
10. The process of claim 9 , wherein the ARC on the metallic layer has been used to prevent actinic light passing completely through the photoresist from being reflected from the metallic layer back through the photoresist during the exposure process.
11. The process of claim 1 , wherein the system of etching agents consists essentially of CHF 3 , Ar, and Cl 2 .
12. The process of claim 11 , carried out within the following window: Pressure about 1 to about 100 millitorr Temperature about 30 to about 80 C. Cl 2 flow about 5 to about 60 sccm Ar flow about 5 to about 80 sccm CHF 3 flow about 5 to about 80 sccm.
13. A method for substantially preserving a photoresist while removing exposed areas of an organic ARC during the manufacturing of an integrated circuit comprising exposing the ARC to an oxygen-free system of etching agents, in an ionized state in a reaction chamber of a plasma generating device, the system of etching agents being nitrogen-free and including one or more fluorine-containing compounds, an inert carrier gas and chlorine.
14. The method of claim 13 , wherein the organic ARC consists essentially of polyimide.
15. The method of claim 13 , wherein the plasma generating device is evacuated to a pressure below 40 mTorr while etching the ARC with the etching agents.
16. The method of claim 13 , wherein the one or more fluorine-containing compounds is trifluoromethane and the inert carrier gas is argon.
17. The method of claim 16 , carried out within the following window Pressure about 1 to about 100 millitorr Temperature about 30 to about 80 C. Cl 2 flow about 5 to about 60 sccm Ar flow about 5 to about 80 sccm CHF 3 flow about 5 to about 80 sccm.
18. A process for etching a pattern of exposed areas of an organic ARC, comprising exposing the ARC to an oxygen-free system of etching agents in an ionized state in a reaction chamber of a plasma generating device, the system of etching agents being nitrogen-free and including one or more fluorine-containing compounds, chlorine, and an inert carrier gas, wherein a photoresist layer forming the pattern of exposed area is disposed on the organic ARC, and wherein the organic ARC is selectively etched and the photoresist is substantially preserved such that lateral degradation of the photoresist layer forming the pattern of exposed areas is substantially prevented.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
December 31, 1997
May 21, 2002
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