A photosensitive device with a microlens array may be packaged for surface mount packaging and subsequent mass reflow processing without significantly degrading the optical performance of the microlens. The microlens may be formed using a series of heat steps of increasing time and temperature. In addition, the microlens may be bleached to prevent degradation of its optical transmissivity at temperatures normally associated with surface mount techniques.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method comprising: forming a photosensitive device; arranging a microlens over said device; packaging said device; and exposing, said packaged device to a surface mount mass reflow step.
2. The method of claim 1 further including bleaching said microlens forming material using deep ultraviolet radiation.
3. The method of claim 1 including filtering out wavelengths less than about 400 nanometers.
4. The method of claim 3 including bleaching for about 10 seconds.
5. The method of claim 1 further including exposing said microlens forming material to a series of processing steps of increasing temperature.
6. The method of claim 5 including exposing said microlens forming material to three heat steps each having progressively higher temperatures for longer periods of time.
7. The method of claim 1 including using positive photoresist as the microlens forming material.
8. The method of claim 1 including patterning a microlens forming material in a first shape and exposing said material to heat to cause said material to change shape.
9. The method of claim 8 further including exposing said material to a first thermal treatment of approximately 100 C., exposing said material to a second thermal treatment of approximately 150 C. and exposing said material to a third thermal treatment of approximately 200 C.
10. The method of claim 1 including hard baking a microlens forming material at a temperature of at least 200 C. for at least about two minutes.
11. The method of claim 1 including hard baking a microlens material at a temperature and for a time sufficient to enable said material to be heat stable at temperatures of over 200 C. for at least two minutes.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
October 4, 2000
September 17, 2002
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