A semiconductor circuit that includes components and registration features that are electrically isolated from the components. The registration features form projecting parts that are uniformly distributed in the form of a matrix over at least part of the external surface of the circuit so as to define adjacent registration areas. In a preferred embodiment, the semiconductor circuit also includes metal registration features that are produced in at least one metallization level of the circuit. Also provided is a method of adjusting a tool so as to put it into a particular position with respect to the surface of a semiconductor circuit that has registration features defining adjacent registration areas. According to the method, an at least partial topographic record of the registration features on the surface of the semiconductor circuit is produced, and the registration features of the topographic record are brought into coincidence with reference features of a reference drawing. The reference features of the reference drawing correspond to the registration features of the circuit. The position of the tool is adjusted with respect to at least some of the reference features or registration features.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method of adjusting a tool so as to put it into a particular position with respect to a surface of a semiconductor circuit that has a plurality of registration features electrically isolated from the components of the circuit, said method comprising the steps of: producing an at least partial topographic record of the registration features on the surface of the semiconductor circuit, the registration features forming a plurality of projecting parts that are uniformly distributed in the form of a graduated matrix over at least part of the surface of the circuit so as to define a plurality of adjacent registration areas on the surface of the circuit; determining an adjustment position for the tool with respect to at least one of the registration features of the graduated matrix, the at least one registration feature defining the registration area that includes the adjustment position; bringing the at least one registration feature of the graduated matrix of the topographic record into coincidence with at least one reference feature of a reference drawing for at least part of the circuit, the reference features of the reference drawing corresponding to the registration features of the circuit; and adjusting the position of the tool using the at least one registration feature defining the registration area that includes the adjustment position as adjustment reference, so as to bring the tool to the adjustment position.
2. The method as defined in claim 1 , wherein the registration features are metal registration features that are covered with an external insulating layer that follows the profile of the metal registration features.
3. The method as defined in claim 1 , wherein the tool is navigated with respect to the surface of the circuit by using an electronic navigation system.
4. The method as defined in claim 1 , wherein the registration features on the surface of the semiconductor circuit include different registration numbers so at to form graduated scales of the graduated matrix.
5. The method as defined in claim 1 , wherein the step of determining an adjustment position for the tool is performed after the registration features of the topographic record are brought into coincidence with the reference features of the reference drawing.
6. A method of adjusting a tool so as to put it into a particular position with respect to a surface of a semiconductor circuit that has a plurality of registration features electrically isolated from the components of the circuit, said method comprising the steps of: producing an at least partial topographic record of the registration features on the surface of the semiconductor circuit, the registration features forming a plurality of projecting parts that are uniformly distributed in the form of a graduated matrix over at least part of the surface of the circuit so as to define a plurality of adjacent registration areas on the surface of the circuit; determining an adjustment position for the tool with respect to at least one reference feature of a reference drawing for at least part of the circuit, the reference features of the reference drawing corresponding to the registration features of the circuit and the at least one reference feature defining the registration area that includes the adjustment position; bringing the at least one reference feature of the reference drawing into coincidence with at least one registration feature of the graduated matrix of the topographic record; and adjusting the position of the tool using the at least one reference feature defining the registration area that includes the adjustment position as adjustment reference, so as to bring the tool to the adjustment position.
7. The method as defined in claim 6 , wherein the registration features are metal registration features that are covered with an external insulating layer that follows the profile of the metal registration features.
8. The method as defined in claim 6 , wherein the tool is navigated with respect to the surface of the circuit by using an electronic navigation system.
9. The method as defined in claim 6 , wherein the registration features on the surface of the semiconductor circuit include different registration numbers so at to form graduated scales of the graduated matrix.
10. The method as defined in claim 6 , wherein the step of determining an adjustment position for the tool is performed after the reference features of the reference drawing are brought into coincidence with the registration features of the topographic record.
11. A method of adjusting a tool so as to put it into a desired position, said method comprising the steps of: providing a semiconductor circuit that includes a plurality of registration features electrically isolated from components of the circuit, the registration features forming a plurality of projecting parts that are uniformly distributed in the form of a graduated matrix over at least part of the surface of the circuit so as to define a plurality of adjacent registration areas on the surface of the circuit; and adjusting the position of the tool using as adjustment reference at least one of the registration features defining the registration area that includes the desired position for the tool, so as to bring the tool to the desired position.
12. The method as defined in claim 11 , wherein the registration features are metal registration features that are produced in at least one metallization level of the circuit.
13. The method as defined in claim 12 , wherein the metal registration features are produced in at least two metallization levels and superimposed.
14. The method as defined in claim 12 , wherein the metal registration features are covered with an external insulating layer that follows the profile of the metal registration features.
15. The method as defined in claim 11 , wherein the registration features are alternately of different shape.
16. The method as defined in claim 11 , wherein a pitch of the registration features is equal to a multiple of a pitch of at least some of the components of the circuit.
17. The method as defined in claim 11 , wherein the registration features on the surface of the semiconductor circuit include different registration numbers so at to form graduated scales of the graduated matrix.
18. The method as defined in claim 11 , wherein at least some of the registration features have shapes that indicate a common direction.
19. A machine-readable medium encoded with a program for controlling at least one machine to adjust a tool so as to put it into a particular position with respect to a surface of a semiconductor circuit that has a plurality of registration features electrically isolated from the components of the circuit, said program containing instructions for performing the steps of: producing an at least partial topographic record of the registration features on the surface of the semiconductor circuit, the registration features forming a plurality of projecting parts that are uniformly distributed in the form of a graduated matrix over at least part of the surface of the circuit so as to define a plurality of adjacent registration areas on the surface of the circuit; determining an adjustment position for the tool with respect to at least one of the registration features of the graduated matrix, the at least one registration feature defining the registration area that includes the adjustment position; bringing the at least one registration feature of the graduated matrix of the topographic record into coincidence with at least one reference feature of a reference drawing for at least part of the circuit, the reference features of the reference drawing corresponding to the registration features of the circuit; and adjusting the position of the tool using the at least one registration feature or reference feature defining the registration area that includes the adjustment position as adjustment reference, so as to bring the tool to the adjustment position.
20. The machine-readable medium as defined in claim 19 , wherein the registration features are metal registration features that are covered with an external insulating layer that follows the profile of the metal registration features.
21. The machine-readable medium as defined in claim 19 , wherein the tool is navigated with respect to the surface of the circuit by using an electronic navigation system.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
September 28, 1999
March 25, 2003
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