An improved liquid crystal display apparatus for low power consumption has a thin film transistor as a switching device. The thin film transistor has a gate insulating layer of laminated film of silicon nitride and silicon oxide, a semiconductor layer, a drain electrode and a source electrode, and supplementary insulating layer, laminated in order on the gate electrode. The supplementary insulating layer includes a portion of silicon oxide formed by oxidizing a surface of the semiconductor layer.
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October 4, 2000
July 29, 2003
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