A method and apparatus for scanning a media is described. More particularly, polarization detector and an atomic force microscope are coupled to a common platform indexed to a spindle. Optionally, an optical microscope may be coupled to the common platform. The polarization detector is used to detect a magnetic image, such as at least a portion of a servo pattern, of the media, and the atomic force microscope, which may be aligned using the magnetic image, is used with a magnetic microscopy module to scan the media. Accordingly, magnetic imagery may be achieved with indexing to a single spindle for positional consistency as between equipment. Moreover, the polarization detector may further be configured to detect scattered light for providing topographic imagery of the media.
Legal claims defining the scope of protection, as filed with the USPTO.
1. An apparatus for metrology on a media, comprising: a stage; a spindle configured to support the media; a first linear actuator coupled to the stage; a second linear actuator coupled to the stage; a polarization detector coupled to the first linear actuator and positionable to scan the media, the polarization detector configured to provide optical energy incident on the media and to detect change in polarization of the optical energy reflected from the media to provide magnetic imagery of the media; an atomic force microscope connected to the second linear actuator and positionable to scan the media, the atomic force microscope configured for magnetic microscopy; and the polarization detector and the atomic force microscope indexed to the spindle.
2. The apparatus of claim 1 wherein the stage is rotatable for rotating the polarization detector and the atomic force microscope at least partially around the spindle, the spindle centrally disposed with respect to the stage.
3. The apparatus of claim 2 further comprising: a third linear actuator connected to the stage; and an optical microscope connected to the third linear actuator for radial movement to and away from the central point of the spindle.
4. The apparatus of claim 3 further comprising an information processing system in electrical communication with the first linear actuator, the second linear actuator and the third linear actuator.
5. The apparatus of claim 2 wherein the magnetic imagery is a servo pattern.
6. The apparatus of claim 1 wherein the first linear actuator and the second linear actuator are configured to provide radial movement to and away from a central point of the spindle, and the spindle is configured to rotate the media.
7. The apparatus of claim 1 further comprising an information processing system in communication with the atomic force microscope and the polarization detector and programmed to provide positioning information thereto for positioning the atomic force microscope and the polarization detector.
8. The apparatus of claim 7 wherein the information processing system is configured to process reflectance information from the polarization detector to provide the magnetic imagery and to process scan information from the atomic force microscope.
9. The apparatus of claim 8 wherein the information processing system is in electrical communication with the first linear actuator and the second linear actuator, the information processing system configured to position the polarization detector and the atomic force microscope radially toward and way from the spindle.
10. The apparatus of claim 1 wherein the polarization detector comprises a plurality of detectors.
11. The apparatus of claim 10 wherein the polarization detector comprises a laser for providing a linearly polarized beam.
12. A method for scanning a media, comprising: providing a polarization detector providing an atomic force microscope having a magnetic microscopy module; providing a platform; providing a first linear actuator coupled to the platform and the polarization detector; providing a second linear actuator coupled to the platform and the atomic force microscope; providing a spindle centrally located with respect to the platform; detecting with the polarization detector a servo pattern magnetically written to the media; and positioning the atomic force microscope in response to the servo pattern for the scanning of the media with the atomic force microscope.
13. The method of claim 12 further comprising providing an optical microscope for detection of a defect.
14. The method of claim 12 further comprising: providing an information processing system in communication with the first linear actuator, the second linear actuator, the polarization detector and the atomic force microscope; and the positioning of the atomic force microscope under control of the information processing system.
15. The method of claim 12 wherein the spindle is configured to rotate the media for the scanning.
16. The method of claim 15 wherein the platform is configured for at least partial rotation around the spindle.
17. The method of claim 12 wherein the polarization detector comprises a plurality of detectors.
18. An apparatus for scanning a media, comprising: means for supporting and rotating the media; means for detecting polarization for providing a magnetic image of the media indexed to the means for supporting and rotating the media; means for probing the media for providing a topographic image indexed to the means for supporting and rotating the media; and means for providing a common rotatable platform for the means for detecting polarization and the means for probing.
19. The apparatus of claim 18 further comprising information processing means in communications with the means for probing and the means for detecting polarization for processing information respectively therefrom to provide the magnetic image and the topographic image.
20. The apparatus of claim 19 wherein the magnetic image is a servo pattern.
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November 27, 2001
December 9, 2003
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