The bonding position between a bonding wire and an electrode is maintained accurately, an ultrasonic horn is mounted to a bonding machine by the attachment portions of support portions situated at minimum vibration amplitude points equally distant from a capillary in opposite directions in such a manner that it is supported on both sides, and the ultrasonic horn, capillary and bonding work portion are vibrated by ultrasonic waves to bond the end portion of the bonding wire.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A resonator for ultrasonic wire bonding, wherein an ultrasonic horn comprises support portions located at minimum vibration amplitude points on both sides of a capillary for passing a bonding wire therethrough.
2. The resonator for ultrasonic wire bonding according to claim 1 , wherein said ultrasonic horn is provided with a wire path for passing a bonding wire in said ultrasonic horn, said wire path is positioned at one of maximum vibration amplitude points and is formed so as to penetrate at least a bottom surface of said ultrasonic horn, said capillary has a shape of a straight rod and a wire path for passing said bonding wire is formed in said capillary such that said wire paths in said ultrasonic horn and capillary communicate to each other, and said wire path in said capillary is formed so as to penetrate said capillary in an axial direction of said capillary.
3. The resonator for ultrasonic wire bonding according to claim 1 , wherein a wire path formed in said capillary penetrates a lower end of said capillary and has, at lower portion thereof, a shape of corn in which an interior diameter of said wire path is gradually reduced toward an end thereof.
4. The resonator for ultrasonic wire bonding according to claim 1 , wherein said ultrasonic horn and said capillary are formed separately, a connection portion is formed on a bottom surface of said ultrasonic horn at a position of one maximum vibration amplitude points of said unltrasonic horn, and a connection portion is formed at an upper portion of said capillary, wherein said ultrasonic horn and said capillary are connected mutually by connecting said connection portions of said ultrasonic horn and said capillary.
5. The resonator for ultrasonic wire bonding according to claim 4 , wherein said connection portion of said ultrasonic horn consists of a threaded hole of a female screw and said connection portion of said capillary consists of a male screw, wherein said capillary is fastened to said ultrasonic horn by screwing said male screw into said female screw.
6. The resonator for ultrasonic wire bonding according to claim 1 , wherein a bonding work portion is formed separately from said capillary and bonded to a lower end face of said capillary.
7. The resonator for ultrasonic wire bonding according to claim 6 , wherein a bonding work portion is made from a super hard steel.
8. The resonator for ultrasonic wire bonding according to claim 6 , wherein a bonding work portion having a small aperture for passing said bonding wire is formed separately from said capillary and bonded to said capillary through an adhesive at a bottom surface thereof.
9. The resonator for ultrasonic wire bonding according to claim 8 , wherein said adhesive is made from wax.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
July 3, 2002
December 30, 2003
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