The resin-encapsulated semiconductor device of the present invention includes: a die pad provided by thinning a lower portion of a lead frame; a semiconductor chip mounted on the die pad; a plurality of leads provided by thinning an upper portion of the lead frame; a connection member for connecting the semiconductor chip and the lead with each other; a plurality of suspension leads connected to the die pad; and an encapsulation resin for encapsulating an upper portion of the lead frame. In this way, it is possible to further reduce the thickness of a resin-encapsulated semiconductor device, while upsetting the die pad. Furthermore, the stress occurring from the encapsulation resin is absorbed by the self flexural deformation of the die pad and the lead, which are thinned, thereby improving the connection reliability.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method for manufacturing a resin-encapsulated semiconductor device including a die pad, a semiconductor chip mounted on the die pad, a lead connected to the semiconductor chip by a connection member, and a suspension lead, the method comprising the steps of: (a) preparing a lead frame including the die pad, the lead and the suspension lead for supporting the die pad; and (b) thinning a lower portion of the die pad and an upper portion of the lead so that an upper surface of the die pad is located higher than an upper surface of the lead, and a lower surface of the die pad is located higher than a lower surface of the lead.
2. The method for manufacturing a resin-encapsulated semiconductor device of claim 1 , wherein the step (b) further includes a step (b2) of thinning at least a portion of the suspension lead that is close to the die pad.
3. The method for manufacturing a resin-encapsulated semiconductor device of claim 1 , wherein in the step (b), the lower portion of the die pad and the upper portion of the lead are thinned by a half etching process.
4. The method for manufacturing a resin-encapsulated semiconductor device of claim 1 , wherein in the step (b), at least a portion of each of the die pad and the lead whose thicknesses are both 200 mm to 300 mm is thinned so that the thicknesses of the die pad and the lead are both 100 mm to 150 mm.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
August 29, 2002
February 17, 2004
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