A device, method and computer program product are disclosed for indicating a function deviation of one or more details of manufacturing equipment using frequency component analysis for analyzing deviations between a nominal product shape and an actual product shape of a product using surface data of a physical surface, the product having been processed by the manufacturing equipment. The analysis can be based on the surface data and a set of function deviation indicating frequencies corresponding to frequencies at which function deviations occur in the one or more details. The function deviation indicating frequencies can be comprised in a frequency map. A method of configuring a frequency map is also disclosed.
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May 31, 2002
March 16, 2004
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