Patentable/Patents/US-6844566
US-6844566

Suspended gate single-electron device

PublishedJanuary 18, 2005
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

The present invention provides a single-electron transistor device (100). The device (100) comprises a source (105) and drain (100) located over a substrate (115) and a quantum island (120) situated between the source and drain (105, 110), to form tunnel junctions (125, 130) between the source and drain (105, 110). The device (100) further includes a movable electrode (135) located adjacent the quantum island (120) and a displaceable dielectric (140) located between the moveable electrode (135) and the quantum island (120). The present invention also includes a method of fabricating a single-electron device (200), and a transistor circuit (300) that include a single-electron device (310).

Patent Claims
15 claims

Legal claims defining the scope of protection, as filed with the USPTO.

1

1. A single-electron transistor device, comprising: a source and drain supported by a substrate; a quantum island located between said source and drain and that forms tunnel junctions between said source and said drain; and a movable electrode located adjacent said quantum island.

2

2. The single-electron transistor device as recited in claim 1 , wherein said movable electrode is movable with respect to said quantum island to change a capacitance between said quantum island and said movable electrode when a voltage is applied to said movable electrode.

3

3. The single-electron transistor device as recited in claim 1 , wherein said moveable electrode is a cantilevered arm member or a supported membrane.

4

4. The single-electron transistor device as recited in claim 1 , wherein said source and drain and said quantum island are located in substantially a same plane and said moveable electrode is located substantially out of said plane.

5

5. The single-electron transistor device as recited in claim 1 , wherein said tunnel junctions include a gap between said source and drain and said quantum island, said gap ranging from about 1 nanometer to about 1000 nanometers.

6

6. The single-electron transistor device as recited in claim 5 , wherein a dielectric material is located within said gap.

7

7. The single-electron transistor device as recited in claim 1 , wherein said source and drain and said quantum island comprises silicon and said moveable electrode comprises aluminum.

8

8. The single-electron transistor device as recited in claim 1 , further including a gap that separates said quantum island and said moveable electrode and wherein a displaceable dielectric is located within said gap.

9

9. The single-electron transistor device as recited in claim 8 , further including a fixed gate located adjacent said quantum island, said fixed gate located to cause a change in a Coulomb blockade energy of said tunnel junctions when a gate voltage is applied to said fixed gate.

10

10. The single-electron transistor device as recited in claim 1 , further includes a filter configured to allow a drain current having a predefined Coulomb oscillation frequency to pass through said filter.

11

11. A transistor circuit, comprising: a single-electron device comprising: a source and drain located over a substrate; a quantum island situated between said source and drain and that forms tunnel junctions between said source and said drain; and a movable gate located adjacent said quantum island and that is separated from said quantum island by a gap; and a MOSFET coupled to said single-electron device and configured to amplify a drain current from said single-electron device.

12

12. The transistor circuit as recited in claim 11 , wherein said movable gate is configured to move with respect to said quantum island to change a capacitance between said quantum island and said movable gate when a voltage is applied to said movable gate.

13

13. The transistor circuit as recited in claim 12 wherein a displaceable dielectric is located with said gap.

14

14. The transistor circuit as recited in claim 13 , wherein said transistor circuit when operated at a given voltage is configured to have a first amplitude that causes said drain current to have a first Coulomb oscillation frequency that is between about 0.1 and about 1.0 GHz which corresponds to a first logic state, and further configured to have a second amplitude that causes a second Coulomb oscillation frequency of said drain current that is between about 10 and about 20 GHz corresponds to a second logic state.

15

15. The transistor circuit as recited in claim 11 , further including a filter coupled to said single-electron device and said MOSFET, said filter configured to allow said drain current to pass through said filter when said drain current has a predefined Coulomb oscillation frequency.

Classification Codes (CPC)

Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.

Patent Metadata

Filing Date

May 30, 2003

Publication Date

January 18, 2005

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Cite as: Patentable. “Suspended gate single-electron device” (US-6844566). https://patentable.app/patents/US-6844566

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