A novel trench etching method for etching trenches of different depths which are self-aligned to one another is presented. The method comprises the steps of (a) creating first and second trenches of a same depth in a dielectric layer, wherein the second trench is wider than the first trench, (b) forming a conformal gapfill layer on top of the dielectric layer such that the conformal gapfill layer is thicker in the first trench than in the second trench, (c) etching back the conformal gapfill layer until a bottom wall of the second trench is exposed to the atmosphere while a bottom wall of the first trench is still covered by the conformal gapfill layer, (d) etching further into the dielectric layer via the second trench. As a result, the second trench is deeper than the first trench.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A trench etching method, comprising the steps of: (a) providing a holding layer and a patterned hard mask layer on top of the holding layer; (b) etching first and second trenches in the holding layer using the patterned hard mask layer as a mask, wherein the second trench is wider than the first trench, and wherein the first and second trenches have first and second bottom walls, respectively, in the holding layer; (c) forming a conformal gapfill layer on top of the holding layer and the patterned hard mask layer; (d) etching away first and second portions of the conformal gapfill layer directly above the first and second trenches, respectively, so as to expose the second bottom wall of the second trench to the atmosphere whereas the first bottom wall of the first trench is still covered by the conformal gapfill layer; (e) etching down further into the holding layer at the exposed-to-the-atmosphere surface of the second bottom wall of the second trench so as to make the second trench deeper; and (f) etching away portions of the conformal gapfill layer so as to expose the first bottom wall of the first trench to the atmosphere.
2. The method of claim 1 , wherein the holding layer comprises a dielectric material, wherein the patterned hard mask layer comprises silicon nitride, and wherein the conformal gapfill layer comprises a polymer.
3. The method of claim 1 , further comprising the steps of, after the step (f) is performed, forming an electrically conducting liner layer at bottom and side walls of the first and second trenches; and filling the first and second trenches with an electrically conducting material.
4. The method of claim 3 , wherein the step of etching away the portions of the conformal gapfill layer so as to expose the first bottom wall of the first trench to the atmosphere is essentially selective to the holding layer and the patterned hard mask layer.
5. The method of claim 1 , further comprising the steps of, after the step (f) is performed, forming an electrically conducting liner layer at bottom and side walls of the first and second trenches; and filling the first and second trenches with an electrically conducting material, wherein said etching away portions of the conformal gapfill layer comprises completely etching away the conformal gapfill layer.
6. The method of claim 5 , wherein the step of completely etching away the conformal gapfill layer is performed by wet etching.
7. The method of claim 5 , wherein the step of completely etching away the conformal gapfill layer is essentially selective to the holding layer and the patterned hard mask layer.
8. The method of claim 1 , wherein the step of forming the conformal gapfill layer comprises the step of blanket-depositing a gapfill material on top of the holding layer and the patterned hard mask layer.
9. The method of claim 1 , wherein the step of etching away the first and second portions of the conformal gapfill layer directly above the first and second trenches, respectively, comprises the step of isotropically etching the conformal gapfill layer until the second bottom of the second trench is exposed to the atmosphere but the first bottom of the first trench is still covered by the conformal gapfill layer.
10. The method of claim 1 , wherein the step of etching away the first and second portions of the conformal gapfill layer directly above the first and second trenches, respectively comprises the step of anisotropically etching the conformal gapfill layer until the second bottom of the second trench is exposed to the atmosphere but the first bottom of the first trench is still covered by the conformal gapfill layer.
11. The method of claim 1 , wherein the step of etching away the first and second portions of the conformal gapfill layer directly above the first and second trenches, respectively is essentially selective to the holding layer and the patterned hard mask layer.
12. The method of claim 1 , wherein the step of etching down further into the holding layer at the second bottom wall of the second trench is performed until an electrically conducting line directly beneath the second trench is exposed to the atmosphere.
13. The method of claim 12 , wherein the step of etching down further into the holding layer at the exposed-to-the-atmosphere surface of the second bottom wall of the second trench is essentially selective to the patterned hard mask layer, the conformal gapfill layer, and the electrically conducting line.
14. The method of claim 1 , wherein the step of etching down further into the holding layer at the exposed-to-the-atmosphere surface of the second bottom wall of the second trench is essentially selective to the patterned hard mask layer and the conformal gapfill layer and is performed until the second trench has a pre-specified depth.
15. The method of claim 1 , wherein the step of etching down further into the holding layer at the exposed-to-the-atmosphere surface of the second bottom wall of the second trench is performed using anisotropic etching.
16. A trench etching method, comprising the steps of: (a) providing a holding layer, a hard mask layer on top of the holding layer, and a photo resist layer on top of the hard mask layer; (b) patterning the photo resist layer to a trench pattern; (c) etching first and second trenches in the hard mask layer and the holding layer according the trench pattern, wherein the second trench is wider than the first trench, and wherein the first and second trenches have first and second bottom walls, respectively, in the holding layer; (d) forming a conformal gapfill layer on top of the holding layer and the hard mask layer; (e) isotropically etching away first and second portions of the conformal gapfill layer directly above the first and second trenches, respectively, so as to expose the second bottom wall of the second trench to the atmosphere whereas the first bottom wall of the first trench is still covered by the conformal gapfill layer; and, (f) etching down further into the holding layer at the exposed-to-the-atmosphere surface of the second bottom wall of the second trench so as to make the second trench deeper.
17. The method of claim 16 , wherein the step of forming the conformal gapfill layer on top of the holding layer and the hard mask layer is performed such that the conformal gapfill layer is thicker in the first trench than in the second trench.
18. A trench etching method, comprising the steps of: (a) providing a holding layer and a patterned hard mask layer on top of the holding layer; (b) etching first and second trenches in the holding layer using the patterned bard mask layer as a mask, wherein the first and second trenches have first and second bottom walls, respectively, in the holding layer; (c) forming a conformal gapfill layer on top of the holding layer and the patterned hard mask layer such that the conformal gapfill layer is thicker in the first trench than in the second trench; (d) etching away first and second portions of the conformal gapfill layer directly above the first and second trenches, respectively, so as to expose the second bottom wall of the second trench to the atmosphere whereas the first bottom wall of the first trench is still covered by the conformal gapfill layer; and (c) etching down further into the holding layer at the exposed-to-the-atmosphere surface of the second bottom wall of the second trench so as to make the second trench deeper until an electrically conducting line directly beneath the second trench is exposed to the atmosphere.
19. The method of claim 18 , further comprising the steps of, after the step (e) is performed, etching away portions of the conformal gapfill layer so as to expose the first bottom wall of the first trench to the atmosphere; and filling the first and second trenches with an electrically conducting material.
20. The method of claim 18 , further comprising the steps of, after the step (c) is performed, completely etching away the conformal gapfill layer, and filling the first and second trenches with an electrically conducting material.
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October 22, 2004
January 24, 2006
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