Patentable/Patents/US-6995959
US-6995959

Integrated spin valve head

PublishedFebruary 7, 2006
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

Currently, the shield-to-shield separation of a spin valve head cannot be below about 800 Å, mainly due to sensor-to-lead shorting problems. This problem has now been overcome by inserting a high permeability, high resistivity, thin film shield on the top or bottom (or both) sides of the spin valve sensor. A permeability greater than about 500 is required together with a resistivity about 5 times greater than that of the free layer and an MrT value for the thin film shield that is 4 times greater than that of the free layer. Five embodiments of the invention are described.

Patent Claims
10 claims

Legal claims defining the scope of protection, as filed with the USPTO.

1

1. A top spin valve structure, comprising: on a first dielectric layer, a layer of magnetic material suitable for use as a free layer in said spin valve; on the free layer, a layer of non-magnetic material; on the layer of non-magnetic material, a layer of magnetic material suitable for use as a pinned layer in said spin valve; on the pinned layer, a layer of an anti-ferromagnetic material suitable for use as a pinning layer in said spin valve; on the anti-ferromagnetic layer, a layer of material suitable for use as a decoupling layer; and on the decoupling layer, a thin film shield that further comprises a layer of high permeability ferromagnetic material, said material having an electrical resistivity greater than about 125 micro-ohm-cm and a thickness such that the product of its moment and thickness is 2 to 5 times that of the free layer; a trench that extends through the thin film shield as far as said first dielectric layer, said trench having a sidewall that slopes; on the first dielectric layer and on the sidewall, a layer of a ferromagnetic material suitable for use as a permanent magnet for providing longitudinal bias to the structure; on the permanent magnet layer, a layer of conductive material suitable for use as a connecting lead to the structure; and on the thin film shield and on the conductive lead layer, a second dielectric layer.

2

2. The structure described in claim 1 wherein the thin film shield is selected from the group consisting of nickel-iron-chromium, cobalt-niobium-zirconium, cobalt-niobium-hafnium, iron-cobalt-nitrogen, iron-cobalt-chromium, iron-cobalt-tantalum, and iron-cobalt-titanium and has a permeability greater than about 500.

3

3. A top spin valve structure, including a free layer, comprising: on a first dielectric layer, a thin film shield that further comprises a layer of high permeability ferromagnetic material, said material having an electrical resistivity greater than about 125 micro-ohm-cm and a thickness such that the product of its moment and thickness is 2 to 5 times that of the free layer; on the thin film shield, a layer of material suitable for use as a decoupling layer; on said decoupling layer, a layer of magnetic material suitable for use as the free layer in said spin valve; on the free layer a layer of non-magnetic material; on the layer of non-magnetic material, a layer of magnetic material suitable for use as a pinned layer in said spin valve; on the pinned layer, a layer of an anti-ferromagnetic material suitable for use as a pinning layer in said spin valve; a trench that extends through the anti-ferromagnetic layer as far as said first dielectric layer, said trench having a sidewall that slopes; on the first dielectric layer and on the sidewall, a layer of a ferromagnetic material suitable for use as a permanent magnet for providing longitudinal bias to the structure; on the permanent magnet layer, a layer of conductive material suitable for use as a connecting lead to the structure; and on the anti-ferromagnetic layer and on the conductive lead layer, a second dielectric layer.

4

4. The structure described in claim 3 wherein the thin film shield is selected from the group consisting of nickel-iron-chromium, cobalt-niobium-zirconium, cobalt-niobium-hafnium, iron-cobalt-nitrogen, iron-cobalt-chromium, iron-cobalt-tantalum, and iron-cobalt-titanium and has a permeability greater than about 500.

5

5. A top spin valve structure, comprising: on part of a first dielectric layer, a layer of conductive material suitable for use as a connecting lead to the structure; on the conductive lead material, a layer of a ferromagnetic material suitable for use as an exchange magnet for providing longitudinal bias to the structure; on said first dielectric layer and on the exchange magnet layer, a layer of magnetic material suitable for use as a free layer in said spin valve; on the free layer, a layer of non-magnetic material; on the layer of non-magnetic material, a layer of magnetic material suitable for use as a pinned layer in said spin valve; on the pinned layer, a layer of an anti-ferromagnetic material suitable for use as a pinning layer in said spin valve; on the anti-ferromagnetic layer, a layer of material suitable for use as a decoupling layer; on the decoupling layer, a thin film shield that further comprises a layer of high permeability ferromagnetic material, said material having an electrical resistivity greater than about 125 micro-ohm-cm and a thickness such that the product of its moment and thickness is 2 to 5 times that of the free layer; and on the thin film shield, a second dielectric layer.

6

6. The structure described in claim 5 wherein the thin film shield is selected from the group consisting of nickel-iron-chromium, cobalt-niobium-zirconium, cobalt-niobium-hafnium, iron-cobalt-nitrogen, iron-cobalt-chromium, iron-cobalt-tantalum, and iron-cobalt-titanium and has a permeability greater than about 500.

7

7. A bottom spin valve structure, including a free layer, comprising: on a first dielectric layer, thin film shield that further comprises a layer of high permeability ferromagnetic material, said material having an electrical resistivity greater than about 125 micro-ohm-cm and a thickness such that the product of its moment and thickness is 2 to 5 times that of the free layer; on the thin film shield, a layer of material suitable for use as a decoupling layer; on the decoupling layer, a layer of an anti-ferromagnetic material suitable for use as a pinning layer in said spin valve; on the anti-ferromagnetic layer, a layer of magnetic material suitable for use as a pinned layer in said spin valve; on the pinned layer, a layer of non-magnetic material; on said pinned layer, a layer of magnetic material suitable for use as a free layer in said spin valve; a shallow trench that extends part way through the free layer, said trench having a sidewall that slopes; on the free layer outside the trench, a capping layer selected from the group consisting of tantalum, tantalum oxide, and alumina; on the free layer inside the trench, a layer of material that is the same as that of the free layer; on the capping layer, a layer of a ferromagnetic material suitable for use as an exchange magnet for providing longitudinal bias to the structure; on the exchange magnet layer, a layer of conductive material suitable for use in connecting leads to the structure; on the conducting lead layer, a second dielectric layer.

8

8. The structure described in claim 7 wherein the thin film shield is selected from the group consisting of nickel-iron-chromium, cobalt-niobium-zirconium, cobalt-niobium-hafnium, iron-cobalt-nitrogen, iron-cobalt-chromium, iron-cobalt-tantalum, and iron-cobalt-titanium and has a permeability greater than about 500.

9

9. A double shielded top spin valve structure, including a free layer, comprising: providing a lower primary magnetic shield on which is a first dielectric layer; on a first dielectric layer, a first thin film shield that further comprises a first layer of high permeability ferromagnetic material, said material having an electrical resistivity greater than about 125 micro-ohm-cm and a thickness such that the product of its moment and thickness is 2 to 5 times that of the free layer; on the first thin film shield, a layer of material suitable for use as a first decoupling layer; on said first decoupling layer, a layer of magnetic material suitable for use as a free layer in said spin valve; on the free layer, a layer of non-magnetic material; on the layer of non-magnetic material, a layer of magnetic material suitable for use as a pinned layer in said spin valve; on the pinned layer, a layer of an anti-ferromagnetic material suitable for use as a pinning layer in said spin valve; on the anti-ferromagnetic layer, a layer of material suitable for use as a second decoupling layer; and on the second decoupling layer, a second thin film shield that further comprises a second layer of high permeability ferromagnetic material, said material having an electrical resistivity greater than about 125 micro-ohm-cm and a thickness such that the product of its moment and thickness is 2 to 5 times that of the free layer; a trench that extends through the second thin film shield as far as said first dielectric layer, said trench having a sidewall that slopes; on the first dielectric layer and on the sidewall, a layer of a ferromagnetic material suitable for use as a permanent magnet for providing longitudinal bias to the structure; on the permanent magnet layer a layer of conductive material suitable for use as a connecting lead to the structure; and on the second thin film shield and on the conductive lead layer, a second dielectric layer.

10

10. The structure described in claim 9 wherein the thin film shields are selected from the group consisting of nickel-iron-chromium, cobalt-niobium-zirconium, cobalt-niobium-hafnium, iron-cobalt-nitrogen, iron-cobalt-chromium, iron-cobalt-tantalum, and iron-cobalt-titanium and has a permeability greater than about 500.

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Patent Metadata

Filing Date

December 14, 2004

Publication Date

February 7, 2006

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