A method and apparatus are provided for inspecting an electrical defectiveness of a liquid crystal display substrate. The method includes shorting ESD protection devices with a conductive shorting bar to form a current path on each of signal wirings of the substrate, supplying a current to the signal wirings, and determining a defectiveness of the signal wirings depending on the current flowing on the signal wirings.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method for inspecting a display device substrate having a plurality of signal wirings and a plurality of electrostatic discharge damage (ESD) protection devices, each of the ESD protection devices being respectively on a corresponding one of the signal wirings, the method comprising steps of: using a shorting bar to individually short-circuit both ends of each of the ESD protection devices to form a current path on the corresponding one of the signal wirings; supplying a current to the corresponding one of the signal wirings; and determining a defectiveness of the corresponding one of the signal wirings depending on the current flowing on the corresponding one of the signal wirings.
2. The method according to claim 1 , wherein the short-circuiting step comprises moving the shorting bar to short-circuit the both ends of each of the ESD protection devices.
3. The method according to claim 1 , wherein the step of supplying the current to the corresponding one of the signal wirings includes: supplying a high voltage through a first shorting wiring connected to the corresponding one of the signal wirings; and supplying a low voltage through a second shorting wiring connected to the at least one of the ESD protection devices.
4. The method according to claim 1 , wherein in the short-circuiting step, the display device substrate is a TFT array substrate of a liquid crystal display.
5. An apparatus for inspecting a display device substrate having a plurality of signal wirings and a plurality of electrostatic discharge damage (ESD) protection devices, each of the ESD protection devices being respectively on a corresponding one of the signal wirings, the apparatus comprising: a conductive shorting bar to individually short-circuit both ends of each of the ESD protection devices to form a current path on the corresponding one of the signal wirings; a power supply to supply a current to the corresponding one of the signal wirings; and a detection circuit to determine a defectiveness of the corresponding one of the signal wirings depending on the current flowing on the corresponding one of the signal wirings.
6. The apparatus according to claim 5 , wherein the conductive shorting bar is provided in a jig and is movable.
7. The apparatus according to claim 5 , further comprising: a first shorting wiring connected to the corresponding one of the signal wirings; and a second shorting wiring connected to the at least one of the ESD protection devices, wherein the power supply supplies a high voltage to the corresponding one of the signal wirings through the first shorting wiring, and a low voltage to the at least one of the ESD protection devices through the second shorting wiring.
8. The apparatus according to claim 5 , wherein the display device substrate is a TFT array substrate of a liquid crystal display.
9. An apparatus for inspecting a display device substrate having a plurality of signal wirings and a plurality of electrostatic discharge damage (ESD) protection devices connected to the signal wiring, each of the ESD protection devices being respectively on a corresponding one of the signal wirings, the apparatus comprising: a movable conductive shorting bar, the conductive shorting bar being movable to selectively short-circuit both ends of at least one of the ESD protection devices to form a current path on the corresponding one of the signal wirings; a power supply to supply a current to the corresponding one of the signal wirings; and a detection circuit to determine a defectiveness of the corresponding one of the signal wirings depending on the current flowing on the corresponding one of the signal wirings.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
September 22, 2003
November 7, 2006
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