The invention includes a semiconductor construction having a wire bonding region associated with a metal-containing layer, and having radiation-imageable material over the metal-containing layer. The radiation-imageable material can be configured as a multi-level pattern having a first topographical region with a first elevational height and a second topographical region with a second elevational height above the first elevational height. The second topographical region can be laterally displaced from the bonding region by at least a lateral width of the first topographical region, with said lateral width being at least about 10 microns. Additionally, or alternatively, the elevational height of the second topographical region can be at least about 2 microns above the elevational height of the first topographical region. The invention also includes a method of forming wire bonds for semiconductor constructions in which a multi-level pattern is photolithographically formed in a radiation-imageable material (such as, for example, polyimide).
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method of forming a wire bond for a semiconductor construction, comprising: providing a semiconductor substrate having a wire bonding region; providing a stepped electrically-insulative-radiation-imageable material at least partially around the wire bonding region, the stepped electrically-insulative-radiation-imageable material having a first region proximate the wire bonding region and a second region laterally further from the wire bonding region than first region; the second region being laterally spaced from the wire bonding region by a distance which includes at least a lateral width of the first region; the first region having a first elevational height, and the second region having a second elevational height which is above the first elevational height; the second region being joined to the first region through multiple steps; and forming a wire bond to the wire bonding region with a capillary having a lateral width less than the distance from the wire bonding region to the second region of the electrically-insulative-radiation-imageable material, the capillary being brought to a closest distance to the substrate during the wire bonding with said closest distance being above the first elevational height and below the second elevational height.
2. The method of claim 1 wherein the second elevational height is from about 2 microns to about 20 microns above the first elevational height.
3. The method of claim 1 wherein the second elevational height is at least about 4 microns above the first elevational height.
4. The method of claim 1 wherein the electrically-insulative-radiation-imageable material comprises polyimide.
5. The method of claim 1 wherein the electrically-insulative-radiation-imageable material consists essentially of polyimide.
6. The method of claim 1 wherein the electrically-insulative-radiation-imageable material consists of polyimide.
7. The method of claim 1 wherein the first region of the electrically-insulative-radiation-imageable material extends entirely around the wire bonding region.
8. The method of claim 1 wherein the first region of the electrically-insulative-radiation-imageable material does not extend entirely around the wire bonding region.
9. A method of forming a wire bond for a semiconductor construction, comprising: providing a semiconductor substrate, the semiconductor substrate comprising a metal-containing layer; forming a radiation-imageable material of substantially uniform thickness over the metal-containing layer; exposing the radiation-imageable material to a pattern of radiation, the radiation changing the solubility of the radiation-imageable material in a developing solvent, the pattern comprising moderate intensity regions interposed between high intensity regions and low intensity regions; a first portion of the radiation-imageable material being exposed to the high intensity regions, a second portion of the radiation-imageable material being exposed to the moderate intensity regions, and a third portion of the radiation-imageable material being exposed to the low intensity regions; after exposing the radiation-imageable material to the pattern of radiation, exposing the radiation-imageable material to the solvent to form a multi-level pattern in the radiation-imageable material, the first, second and third portions of the radiation-imageable material being removed to a first extent, second extent and third extent, respectively, by the solvent, the second extent being less than the first extent and greater than the third extent; utilizing the patterned radiation-imageable material as a mask to define a wiring bond region of the metal-containing layer; and forming a wire bond to the wiring bond region, the forming of the wire bond comprising pressing a wire against the wiring bond region with a tool, the tool having a footprint where it is proximate the wiring bond region, the third portion of the radiation-imaging material being offset beyond said footprint of the tool by the combined first and second portions of the patterned radiation-imaging material.
10. The method of claim 9 wherein the first extent to which the first portion of the radiation-imageable material is removed by the solvent is removal of substantially an entirety of the first portion.
11. The method of claim 9 wherein the third extent to which the third portion of the radiation-imageable material is removed by the solvent is substantially zero removal of the third portion.
12. The method of claim 9 wherein the radiation-imageable material comprises polyimide.
13. The method of claim 9 wherein the radiation-imageable material consists essentially of polyimide.
14. The method of claim 9 wherein the radiation-imageable material consists of polyimide.
15. The method of claim 9 wherein: the substrate comprises an electrically-insulative cap over the metal-containing layer; the first extent to which the first portion of the radiation-imageable material is removed by the solvent is removal of substantially an entirety of the first portion to form a patterned opening through the remaining radiation-imageable material; and the utilizing the patterned radiation-imageable material as a mask comprises conducting an etch which extends the patterned opening through the electrically-insulative cap to the metal-containing layer.
16. The method of claim 15 wherein the removal of the second portion of the radiation-imageable material to the second extent leaves a recessed remainder of the second portion over the substrate at the initiation of the etch, and wherein the etch does not remove a substantial entirety of such recessed remainder.
17. The method of claim 15 wherein the removal of the second portion of the radiation-imageable material to the second extent leaves a recessed remainder of the second portion over the substrate at the initiation of the etch, and wherein a substantial entirety of such recessed remainder is removed by the etch.
18. A method of forming a wire bond for a semiconductor construction, comprising: providing a semiconductor substrate, the semiconductor substrate comprising a metal-containing layer and an electrically insulative cap over the metal-containing layer; forming a polyimide-containing layer of substantially uniform thickness over the electrically insulative cap; exposing the polyimide-containing layer to a pattern of radiation, the radiation changing the solubility of the polyimide-containing layer in a developing solvent, the pattern comprising moderate intensity regions interposed between high intensity regions and low intensity regions; a first portion of the polyimide-containing layer being exposed to the high intensity regions, a second portion of the polyimide-containing layer being exposed to the moderate intensity regions, and a third portion of the polyimide-containing layer being exposed to the low intensity regions; after exposing the polyimide-containing layer to the pattern of radiation, exposing the polyimide-containing layer to the solvent to form a multi-level pattern in the polyimide-containing layer, the first portion of the polyimide-containing layer being substantially entirely removed by the solvent, the third portion of the polyimide-containing layer being substantially not removed by the solvent, and the second portion of the polyimide-containing layer being partially removed by the solvent so that the second portion is reduced in thickness relative to the third portion; utilizing the multi-level patterned polyimide-containing layer as a mask while forming an opening through the cap and to the metal-containing layer; and forming a wire bond within the opening.
19. The method of claim 18 wherein the thickness of the third portion of multi-level patterned polyimide-containing layer is at least about 2 microns greater than the thickness of the second portion of the multi-level patterned polyimide-containing layer.
20. The method of claim 18 wherein the thickness of the third portion of multi-level patterned polyimide-containing layer is at least about 4 microns greater than the thickness of the second portion of the multi-level patterned polyimide-containing layer.
21. The method of claim 18 wherein the cap comprises one or both of silicon nitride and silicon dioxide.
22. The method of claim 18 wherein the polyimide-containing layer consists essentially of polyimide.
23. The method of claim 18 wherein the polyimide-containing layer consists of polyimide.
24. The method of claim 18 wherein: the second portion of the multi-level patterned polyimide-containing layer extends at least partially around the opening; and the wire bond is formed with a capillary having a lateral width less than a distance from the wire bond to the third region of the multi-level patterned polyimide-containing layer.
25. The method of claim 24 wherein the second portion of the multi-level patterned polyimide-containing layer extends entirely around the opening.
26. The method of claim 24 wherein the second portion of the multi-level patterned polyimide-containing layer extends entirely around the opening and has a different lateral thickness along one portion of the opening than along another portion of the opening.
27. The method of claim 24 wherein the second portion of the multi-level patterned polyimide-containing layer extends only partially around the opening.
28. The method of claim 18 wherein: the second portion of the multi-level patterned polyimide-containing layer extends entirely around the opening; and the wire bond is formed with a tool having a lateral footprint proximate the wire bond less than a distance to the third region of the multi-level patterned polyimide-containing layer.
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July 29, 2004
August 28, 2007
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