Fast swap dual substrate transport for load lock

1. A load lock system constructed to supply semiconductor substrates to a process chamber according to a predetermined sequence, said process chamber processing said substrate in a process cycle, said load lock system comprising: a housing having a load lock chamber constructed therein, said load lock chamber connected to said process chamber by a process port and to a front end delivery module by a delivery port; a first valve for opening and closing said process port according to said predetermined sequence; a second valve for opening and closing said delivery port according to said predetermined sequence; a pump connected to the housing and arranged for cycling said load lock chamber , with said first and second valves closed between different loadlock atmospheres, at least one of which enables opening of the first valve, and at least another of which enables opening of the second valve; a transport, mounted in the load lock chamber, constructed to move substrates into said process chamber for processing, said transport further comprising: a lower arm mounted in the load lock chamber at a proximal end of said arm for pivotal motion about a first axis, said lower arm connected to a first drive element of a drive mechanism to provide a controlled rotation of said lower arm about said first axis; at least one effector arm mounted on a distal end of said lower arm for pivotal motion about a second axis parallel to said first axis, said effector arm having a receiving end for engagement of said substrates and being connected to a second drive of said drive mechanism to provide a controlled rotation about said second axis; and a process controller connected to said process chamber, first and second valves and biaxial drive for controlling the operation thereof in said predetermined sequence; wherein said predetermined sequence is timed to cycle said load lock chamber within the process cycle of said processing chamber.

2. A substrate processing apparatus module for a substrate processing apparatus, the module comprising: a housing defining a substrate holding chamber capable of holding an isolated atmosphere therein, the housing being arranged so that the module is connectable to a first module of the processing apparatus and to a second module of the processing apparatus, the housing having a first substrate transport port for communicating with the first module and a second substrate transport port for communicating with the second module; a first valve connected to the housing for opening and closing the first substrate transport port, and a second valve connected to the housing for opening and closing the second substrate transport port; a pump connected to the housing and arranged for cycling the substrate holding chamber between a first atmosphere, that enables opening of the first valve for communication between the substrate holding chamber and the first module through the first substrate transport port, and a second atmosphere that enables opening of the second valve for communication between the substrate holding chamber and the second module through the second substrate transport port; and a transport mounted in the substrate holding chamber and arranged to move substrates from the first module into the second module via the first and second substrate transport ports, the transport comprising an articulated arm having pivotally joined arm links.

3. A load lock system constructed to supply semiconductor substrates to a process chamber according to a predetermined sequence, said process chamber processing said substrate in a process cycle, said load lock system comprising: a housing having a load lock chamber constructed therein, said load lock chamber connected to said process chamber by a process port and to a front end delivery module by a delivery port; a first valve for opening and closing said process port according to said predetermined sequence; a second valve for opening and closing said delivery port according to said predetermined sequence; a pump connected to the housing and arranged for cycling said load lock chamber, with said first and second valves closed, between different load lock atmospheres, at least one of which enables opening the process port and at least another of which enables opening the delivery port; a transport, mounted in the load lock chamber, constructed to move substrates into said process chamber for processing, said transport further comprising: a lower arm mounted in the load lock chamber at a proximal end of said arm for pivotal motion about a first axis, said lower arm connected to a first drive element of a drive mechanism to provide a controlled rotation of said lower arm about said first axis; at least one effector arm mounted on a distal end of said lower arm for pivotal motion about a second axis parallel to said first axis, said effector arm having a receiving end for engagement of said substrates and being connected to a second drive of said drive mechanism to provide a controlled rotation about said second axis; and a process controller connected to said process chamber.

4. The system according to claim 3 , wherein said process controller is connected to the first and second valves and biaxial drive for controlling the operation thereof in said predetermined sequence.

5. The system according to claim 3 , wherein said predetermined sequence is timed to cycle said load lock chamber within the process cycle of said processing chamber.