Micromanipulator

1. A micromanipulator containing a movable table connected with a drive that is connected to a control bock, wherein the drive is formed as a shaft with a rotor connected through pushers with annular piezoelements, one of which is mounted on the shaft, while another is mounted on a housing, characterized in that the control block of each piezoelement is formed as successively connected a generator of high frequency pulses of excitation of a piezoelement, a controlled key and an amplifier connected to a corresponding piezoelement.

2. A micromanipulator according to claim 1 , characterized in that each control block of the corresponding piezoelement is additionally provided with successively arranged a block of forming frequency of pulse packets of excitation of the piezoelements and a block of forming of duration of pulse packets of excitation connected to a controlling input of the key.

3. A micromanipulator according to claim 2 , characterized in that a frequency of the pulse packets of excitation is greater than 2 kHz.

4. A micromanipulator according to claim 2 , characterized in that to a controlling input of the block of forming of duration of the pulse packets of excitation of the piezoelement, a joystick is connected.

5. A micromanipulator according to claim 4 , characterized in that a duration of the packets of pulses of excitation at an output of the block of forming of duration is proportional to a deviation of a handle of the joystick.

6. A micromanipulator according to claim 4 , characterized in that a duration of the packet of pulses of excitation at an output of the block of forming of duration is proportional to an logarithm of deviation of a handle of the joystick.

7. A micromanipulator according to claim 2 , characterized in that one of the outputs of a generator of high frequency pulses of excitation of the piezoelement is connected to an input of the block of forming of frequency of packets of pulses of excitation of the piezoelement.

8. A micromanipulator according to claim 1 , characterized in that the control block of the piezoelement is provided with a block of forming of a single packet of pulses of excitation of the piezoelement, connected to a controlling input of the key.

9. A micromanipulator according to claim 1 , characterized in that the annular piezoelements are formed as ring-shaped resonators with a radial shape of oscillations, whose external cylindrical surface is surrounded by a wave casing, on which pushers are mounted and abut against an inner surface of the rotor.

10. A micromanipulator according to claim 9 , characterized in that the annular piezoelements are polarized along a normal to their flat end surfaces, electrodes are applied to the flat end surface, and their parameters satisfy the ratio D/d˜2, d/2˜h, where D—an outer diameter of the annular piezoelement, d—an inner diameter of the annular piezoelement, h—a height of the ring-shaped piezoelement.

11. A micromanipulator according to claim 1 , characterized in that the frequency of the generator of high frequency pulses of excitation of the piezoelements correspond to a zero mode of radial oscillations of the ring-shaped resonator.

12. A micromanipulator according to claim 9 , characterized in that the wave casing is formed as a thin-walled cylinder with fields which are turned at both sides and form ring-shaped reinforcing ribs, wherein the said reinforcing ribs are cut by slots, in which the pushers are fixed with one end and formed as thin plates.

13. A micromanipulator according to claim 12 , characterized in that the pushers in the wave casing are arranged at an angle to a radial direction.

14. A micromanipulator according to claim 12 , characterized in that on the pushers, casings of sound-insulating material are mounted and adjoin with the pushers along side end surfaces.

15. A micromanipulator according to claim 1 , characterized in that the rotor is formed as two thin-walled cylinders arranged on an axial system.

16. A micromanipulator according to claim 15 , characterized in that the axial system is formed as a cylindrical sliding bearing of a sound insulating material with a central flange, on which the thin-walled cylinders are fixed.

17. A micromanipulator according to claim 1 , characterized in that a connection of the second piezoelement, mounted on a housing, is formed as a rubber ring mounted in a threaded fixing slot in the housing of the drive, a fluoroplastic ring mounted in a threaded fixing slot in a pressing flange, and elements for fixing the pressing flange to the housing of the drive.

18. A micromanipulator according to claim 1 , characterized in that connections of the first piezoelement arranged on the shaft of the drive is formed as a rubber ring arranged in a threaded fixing slot on an axial flange rigidly connected with the shaft, a fluoroplastic ring mounted in a threaded fixing slot in a pressing flange, and elements for fixing the pressing flange to an axial flange which is rigidly connected to the shaft.

19. A micromanipulator according to claim 1 , characterized in that the housing of the drive is formed as a rigid square flange with cylindrical grooves and additionally is provided with a casing, wherein the casing is formed as a cylinder that ends in an analogous square flange, which are rigidly connected with one another.

20. A micromanipulator according to claim 19 , characterized in that the shaft is mounted in ball bearings, one of which is mounted in a housing, and another mounted in a casing, wherein a working part of the shaft extends outwardly beyond the housing.

21. A micromanipulator according to claim 1 , characterized in that a movable table is arranged in composite linear guides and connected with the drive through a screw-nut, wherein a micrometric nut is fixedly mounted on the movable table.

22. A micromanipulator according to claim 21 , characterized in that the movable table is formed as a working surface with setting spots, with an opposite side provided with setting openings for the micrometric nut and an integral longitudinal cantilever with a setting surface perpendicular to a working surface of the table and parallel to an axis of a setting opening for the micrometric nut, and with another side provided with an analogous cantilever with a possibility of its preliminary orientation in a plane parallel to the plane of the table, wherein guides are mounted on both setting planes of each cantilever with a possibility of the preliminary orientation on setting planes perpendicular to the plane of the table.

23. A micromanipulator according to claim 22 , characterized in that the guides of the movable table adjoin through balls or rollers with side guides, which are fixed on planes of rectangular angles with a possibility of their preliminary orientation in these planes, and angles are fixed by orthogonal planes on a frame with a possibility of their preliminary orientation in a plane of the frame.

24. A micromanipulator according to claim 23 , characterized in that the frame is formed as an integral rectangular cantilever with a flange for fixing a drive and side reinforcing ribs.

25. A micromanipulator according to claim 24 , characterized in that the adjoining of the side angles, drive and other elements with the frame is performed through special step-soles formed on the setting planes of the frame, with a possibility of forming of inter-plane air gaps.

26. A micromanipulator according to claim 21 , characterized that a screw adjoins a micrometric nut and abuts with one end through a ball against an immovable cantilever fixed on the frame, and with another end is connected to the shaft of the drive, wherein between a thread and an element of fixing of the screw to the shaft an elastic connection is formed by a few slots with forming of thin flexible plate-like elements with a thickness 100 . . . 400 μm which are offset relative to one another by 90°.

27. A micromanipulator according to claim 21 , characterized in that the movable table with two symmetrical springs operating for stretching and connected with one end to the immovable lever and with another end to the movable table, is pressed through a ball to an immovable cantilever.

28. A micromanipulator according to claim 1 , characterized in that it is provided with a device for automatic switching off of a corresponding direction of rotation of the piezoelectric drive in extreme positions.

29. A micromanipulator according to claim 28 , characterized in that the device for automatic switching off is formed as two microswitches, located on a frame along an axis of displacement of a cam fixed on the movable table, wherein each microswitch is connected to a corresponding annular piezoelement so that in an initial position it commutates a circuit of excitation of the corresponding piezoelement and opens a circuit of excitation of a corresponding piezoelement during triggering of the microswitch.

30. A micromanipulator according to claim 21 , characterized in that additionally an identical second micromanipulator is mounted on the first micromanipulator so that the axes of displacement of the movable tables are perpendicular to one another.

31. A micromanipulator according to claim 30 , characterized in that additionally, an identical third manipulator is arranged on the second micromanipulator so that all three axes of displacement of movable tables are orthogonal.

32. A micromanipulator according to claim 30 , characterized in that all micromanipulators adjoin one another through special steps-soles formed on transitional elements, movable tables and frames, with a possibility of forming of inter-plane air gaps.

33. A micromanipulator according to claim 1 , characterized in that it is arranged on a movable vertical axle which is fixed on a clamp, so that its axis of displacement is directed along a transverse coordinate of a working table, and adjoinment of the micromanipulator with the axle is performed through a movable table.

34. A micromanipulator according to claim 30 , characterized in that the axis of displacement of the second micromanipulator is directed along a longitudinal coordinate of the working table, and its adjoining with the frame of the first micromanipulator is formed through a movable table.

35. A micromanipulator according to claim 31 , characterized in that the axis of displacement of the third micromanipulator is directed vertically to a plane of a working table, and its fixation is formed through a rectangular cantilever with side reinforcing ribs, which adjoins the frame of the second micromanipulator and the frame of the third micromanipulator.

36. A micromanipulator according to claim 1 , characterized in that the movable table rigidly adjoins the shaft of the drive.

37. A micromanipulator according to claim 36 , characterized in that the second identical manipulator is arranged on the movable table, and the shafts of the drives are perpendicular to one another.

38. A micromanipulator according to claim 36 , characterized in that on the movable table, a second micromanipulator is installed with an offset relative to the shaft so that the shafts of the drives are parallel to one another.

39. A micromanipulator according to claim 38 , characterized in that on the movable table of the second micromanipulator, a third micromanipulator is installed so that the shaft of the third micromanipulator is perpendicular to the shaft of the second micromanipulator.