Patentable/Patents/US-7733624
US-7733624

Method and device for electrostatic fixing of substrates with polarized molecules

PublishedJune 8, 2010
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

Method for handling a substrate with polarizable molecules including providing a carrier with a first junction electrode and disposing the substrate between the first junction electrode and a second junction electrode. Fixing the substrate on the carrier is achieved by applying a voltage between the first junction electrode and the second junction electrode, so that the polarizable molecules are polarized. After removing the second junction electrode, the substrate remains fixed on the carrier.

Patent Claims
11 claims

Legal claims defining the scope of protection, as filed with the USPTO.

1

1. A method for handling an electrically insulating solid substrate comprising polarizable molecules, comprising: providing a carrier comprising a first junction electrode; disposing the electrically insulating solid substrate between the first junction electrode and a second junction electrode, and applying a voltage between the first junction electrode and the second junction electrode, so that the polarizable molecules are polarized and the electrically insulating solid substrate is thereby fixed on the carrier; and removing the second junction electrode, wherein the substrate remains fixed on the carrier.

2

2. The method according to claim 1 , wherein an insulation layer is disposed between the substrate and the first junction electrode and/or the second junction electrode.

3

3. The method according to claim 1 , wherein the second junction electrode is removed such that a stripping force then acting acts along a line.

4

4. The method according to claim 3 , wherein the second junction electrode is flexible and is peeled off for being removed from the electrically insulating solid substrate.

5

5. The method according to claim 1 , wherein the second junction electrode is rigid and is tilted for being removed from the electrically insulating solid substrate.

6

6. The method according to claim 1 , wherein applying a voltage is made in a vacuum.

7

7. A device for handling a substrate comprising polarizable molecules, comprising: a carrier with a first junction electrode; a second junction electrode, wherein the first junction electrode and the second junction electrode are formed such that the substrate may be placed therebetween and the second junction electrode is formed as a foil electrode; and a unit for applying such a voltage between the first junction electrode and the second junction electrode that the polarizable molecules are thereby polarizable and the substrate is thereby fixed on the carrier; and a remover for removing the second junction electrode.

8

8. The device according to claim 7 , further comprising an insulation layer disposed between the substrate and the first junction electrode and/or the substrate and the second junction electrode.

9

9. The device according to claim 7 , wherein the remover for removing is formed such that the second junction electrode is removable such that a stripping force then acting acts along a line.

10

10. The device according to claim 7 , wherein the first junction electrode comprises a larger area than the second junction electrode.

11

11. The device according to claim 7 , wherein the carrier is disposed in a vacuum chamber.

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Patent Metadata

Filing Date

March 22, 2007

Publication Date

June 8, 2010

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