Decoupled chamber body

1. A load lock chamber comprising: a tubular first body having at least two substrate access ports formed therein; a first plate sealingly disposed on an upper end surface of the first body; a bottom plate sealingly disposed on a lower end surface of the first body, wherein the plates and body enclose a substrate transfer chamber; and a plurality of fasteners clamping the first body between the first and bottom plates, wherein at least one of the first and bottom plates is coupled to the body in a manner that permits lateral movement of at least one of the plates relative to the body.

2. The load lock chamber of claim 1 further comprising: a plurality of spacers disposed between the first plate and the upper end surface of the first body.

3. The load lock chamber of claim 2 , wherein the spacers maintain the first plate and the upper end surface of the first body in a spaced-apart relation.

4. The load lock chamber of claim 2 , wherein the plurality of spacers further comprises: at least two spacers vertically stacked between the first body and the first plate.

5. The load lock chamber of claim 4 , wherein the spacers have lower sliding resistance between each other than a sliding resistance between the spacer and at least one of the first body or first plate.

6. The load lock chamber of claim 4 , wherein the spacers are fabricated from stainless steel, and the first plate and first body are fabricated from aluminum.

7. The load lock chamber of claim 4 , wherein one of the plurality of fasteners passes through a passage formed through the stacked spacers.

8. The load lock chamber of claim 4 further comprising: a first seal sealing the first plate to the first body, the first seal positioned inward of the plurality of spacers.

9. The load lock chamber of claim 1 , wherein the first plate further comprises: at least one slot formed therethrough inward of the first body; and a seal coupled to the first plate and preventing fluid passage through the slot.

10. A load lock chamber comprising: a tubular first body having at least two substrate access ports formed therein; a first plate sealingly disposed on an upper end surface of the first body; a bottom plate sealingly disposed on a lower end surface of the first body, wherein the plates and body enclose a substrate transfer chamber; a plurality of fasteners clamping the first body between the first and bottom plates; a second tubular body having a lower end sealingly disposed on the first plate, the second body having two substrate access ports formed therein; and a second plate sealingly disposed on an upper end of the second body, the first plate, second plate and second body defining a second substrate transfer chamber.

11. The load lock chamber of claim 10 , wherein the plurality of fasteners clamps the first plate between the first and second bodies.

12. The load lock chamber of claim 10 further comprising: a second plurality of spacers disposed between the lower end of the second body and the first plate and maintaining the first plate and second body in a spaced-apart relation.

13. A load lock chamber comprising: a tubular first body having at least two substrate access ports formed therein; a first plate sealingly disposed on an upper end surface of the first body; a bottom plate sealingly disposed on a lower end surface of the first body, wherein the plates and body enclose a substrate transfer chamber; and a plurality of fasteners clamping the first body between the first and bottom plates; wherein the plates are not welded to the first body and at least one of the first and bottom plates is coupled to the body in a manner that permits lateral movement of at least one of the plates relative to the body.

14. The load lock chamber of claim 1 , wherein the plurality of fasteners further comprises bolts.

15. The load lock chamber of claim 1 further comprising: at least one stiffening member coupled to an exterior of the first body adjacent to one of the substrate access ports formed therein.

16. A load lock chamber comprising: a first chamber body having four walls, an open top and an open bottom; a bottom plate disposed below the first chamber body, the bottom plate and the first chamber body disposed in a spaced apart relation; a first seal circumscribing the open bottom and sealingly engaged with the bottom plate and the first chamber body; a first plate disposed above the first chamber body, the first plate and the first chamber body disposed in a sealed spaced apart relation; a second chamber body disposed above the first plate; a second seal sealingly engaged with the first plate and the second chamber body; a second plate disposed above the second chamber body, the second plate and the second chamber body disposed in a spaced apart relation; and a third seal sealingly engaged with the second plate and the second chamber body.

17. The load lock chamber of claim 16 further comprising: a plurality of bolts clamping the chamber bodies between the bottom plate and the second plate.

18. The load lock chamber of claim 16 further comprising: at least one spacer disposed between the first plate and the first chamber body.

19. The load lock chamber of claim 16 further comprising: at least two vertically stacked spacers separating the first plate from the first chamber body.

20. The load lock chamber of claim 10 , wherein at least one of the first and bottom plates is coupled to the body in a manner that permits lateral movement of at least one of the plates relative to the body.

21. The load lock chamber of claim 16 , wherein at least one of the first and bottom plates is coupled to the body in a manner that permits lateral movement of at least one of the plates relative to the body.