Substrates are transported to accurate positions, while mounted on one hand of a transport robot. When substrates are to be transported from transporting chamber into processing chamber, a first mounting portion of a hand is located immediately above first processing position provided in processing chamber; and the substrate placed on first mounting portion is lifted up. Then, a second mounting portion is located immediately above second processing position by finely moving the hand. Next, the substrate on second mounting portion is lifted up. When the hand is pulled out from between the substrates and first and second processing positions and the substrates are lowered, the substrates are accurately arranged on first and second processing positions. When substrates are mounted on the hand in an order reverse to the above, the substrates in processing chamber can be accurately mounted on first and second mounting portions and be carried out.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method for transporting substrates, comprising the steps of: providing a hand of a transport robot with first and second mounting portions; placing the substrates on the first and second mounting portions, respectively; moving the hand into a processing chamber; and placing the substrates on first and second processing positions set out inside the processing chamber, wherein the first mounting portion is located above the first processing position by a first movement of the hand, and wherein in a state such that the substrate placed on the first mounting portion is lifted by a first lift-up mechanism, the second mounting portion is located above the second processing position by moving the hand a predetermined distance after the first movement of the hand.
2. The method for transporting the substrates according to claim 1 , wherein after the substrate, which is placed on the second mounting portion located above the second processing position, is lifted from the second mounting portion by a second lift-up mechanism, the first and second mounting portions are retracted from above the first and second processing positions, and then the substrates above the first and second processing positions are lowered and arranged on the first and second processing positions.
3. The method for transporting the substrates according to claim 1 , wherein the hand is moved by at least one of a rotational movement around one vertical rotary axis and a linear movement along a line extending in a radial direction crossing vertically with the rotary axis.
4. The method for transporting the substrates according to claim 1 , wherein the first and second mounting portions are formed in a two-forked shape, the substrate placed on the first mounting portion is mounted on a first supporting member inserted from beneath into a cut portion in the forked shape, and the hand is moved in a state such that the first supporting member is kept inserted into the cut portion.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
June 17, 2009
December 7, 2010
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