In a method of detecting arc discharge in a glow-discharge apparatus GD that has a high-frequency power source PS, a cutting pulse is output for time T1 to the high-frequency power source PS to stop a supply of power to the glow-discharge apparatus GD, when dVr/dt-dVf/dt increases over a first level, where Vf and Vr are a traveling-wave voltage and a reflected-wave voltage applied to the glow-discharge apparatus GD, respectively. Arc discharge is determined to have developed in the glow-discharge apparatus, when Vr/Vf increases to a second level or a higher level within a preset time To after the supply of power to the glow-discharge apparatus is stopped
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method of detecting arc discharge in a glow-discharge apparatus that has a high-frequency power source, comprising: determining a load to the glow-discharge apparatus to undergo impedance matching, when Vr/Vf is at a third level or a lower level, where Vf and Vr are a traveling-wave voltage and a reflected-wave voltage applied to the glow-discharge apparatus, respectively; determining the arc discharge to have developed in the glow-discharge apparatus, when Vr/Vf thereafter increases to a second level or a higher level; stopping the supply of power to the glow-discharge apparatus for a time T 1 ; re-starting the supply of power after the supply of power to the glow-discharge apparatus is stopped during the time T 1 ; and determining the arc discharge to have developed again in the glow-discharge apparatus, when Vr/Vf thereafter increases to a second level or a higher level within a preset time To after the supply of power is re-started again.
2. The method of detecting arc discharge, according to claim 1 , wherein the second level ranges from 0.5 to 0.95, and the third level ranges from 0.05 to 0.5.
3. A method of detecting arc discharge in a glow-discharge apparatus that has a high-frequency power source, comprising: determining a load to the glow-discharge apparatus to undergo impedance matching, when Vr/Vf is at a third level or a lower level, where Vf and Vr are a traveling-wave voltage and a reflected-wave voltage applied to the glow-discharge apparatus, respectively; determining the arc discharge to have developed in the glow-discharge apparatus, when Vr/Vf thereafter increases to a second level or a higher level; outputting a cutting pulse for stopping the supply of power for a time T 1 when Vr/Vf increases to the second level or the higher level; re-starting the supply of power after the supply of power to the glow-discharge apparatus is stopped for the time T 1 ; determining the arc discharge to have developed again in the glow-discharge apparatus, when Vr/Vf thereafter increases to the second level or the higher level within a preset time To after the supply of power to the glow-discharge apparatus is stopped for the time T 1 ; and stopping the supply of power to the glow-discharge apparatus for the time T 1 after the arc discharge is detected again during the preset time To.
4. The method of detecting arc discharge, according to claim 3 , wherein the second level ranges from 0.5 to 0.95, and the third level ranges from 0.05 to 0.5.
5. A method of detecting arc discharge in a glow-discharge apparatus that has a high-frequency power source, comprising: determining a load to the glow-discharge apparatus to undergo impedance matching, when Vr/Vf is at a third level or a lower level, where Vf and Vr are a traveling-wave voltage and a reflected-wave voltage applied to the glow-discharge apparatus, respectively; determining the arc discharge to have developed in the glow-discharge apparatus, when Vr/Vf thereafter increases to a second level or a higher level and Vf is greater than Vfmax×0.05; stopping the supply of power to the glow-discharge apparatus for a time T 1 ; re-starting the supply of power after the supply of power to the glow-discharge apparatus is stopped during the time T 1 ; and determining the arc discharge to have developed again in the glow-discharge apparatus, when Vr/Vf thereafter increases to the second level or a higher level and Vf is larger than Vfmax×0.05 with a preset time To after the supply of power is re-started again.
6. The method of detecting arc discharge, according to claim 5 , wherein the second level ranges from 0.5 to 0.95, and the third level ranges from 0.05 to 0.5.
7. A method of stopping the arc discharge in a glow-discharge apparatus driven by a high-frequency power source, comprising: determining a load to the glow-discharge apparatus to undergo impedance matching, when Vr/Vf is at a third level or a lower level, where Vf and Vr are a traveling-wave voltage and a reflected-wave voltage applied to the glow-discharge apparatus, respectively; determining the arc discharge to have developed in the glow-discharge apparatus, when Vr/Vf thereafter increases to a second level or a higher level and Vf is greater than Vfmax×0.05; outputting a cutting pulse to the high-frequency power source to stop the supply of power to the glow-discharge apparatus for stopping the supply of power for a time T 1 ; re-starting the supply of power after the supply of power to the glow-discharge apparatus is stopped for the time T 1 ; determining the arc discharge to have developed again in the glow-discharge apparatus, when Vr/Vf increases to the second level or a higher level and Vf is greater than Vfmax×0.05 within a preset time To after the supply of power to the glow-discharge apparatus is stopped for the time T 1 ; and stopping the supply of power to the glow-discharge apparatus for the time T 1 after the arc discharge is detected again during the preset time To.
8. The method of detecting arc discharge, according to claim 7 , wherein the second level ranges from 0.5 to 0.95, and the third level ranges from 0.05 to 0.5.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
November 17, 2009
February 1, 2011
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