Patentable/Patents/US-8009297
US-8009297

Optical image measuring apparatus

PublishedAugust 30, 2011
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

Provided is an optical image measuring apparatus capable of obtaining a high-accuracy image without being influenced by a movement of an object to be measured. Flash light is emitted from a xenon lamp (2) and converted into broad band light by an optical filter (2A). A polarization characteristic of the flash light is converted into linear polarization by a polarizing plate (3). Then, the flash light is divided into signal light (S) and reference light (R) by a half mirror (6). A polarization characteristic of the reference light (R) is converted into circular polarization by a wavelength plate (7). The signal light (S) and the reference light (R) are superimposed on each other by the half mirror (6) to produce interference light (L). A CCD (23) detects interference light having the same characteristic as that of the produced interference light (L). The produced interference light (L) is divided into an S-polarized light component (L1) and a P-polarized light component (L2) by a polarization beam splitter (11). The polarized light components are detected by CCDs (21 and 22). A signal processing section (20) of a computer (30) forms an image of the object to be measured (O) based on detection signals from the CCDs (21, 22, and 23).

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Patent Metadata

Filing Date

November 7, 2006

Publication Date

August 30, 2011

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