High frequency module

1. A high-frequency module comprising: a slot antenna including a slot plate laid out with a plurality of radiation slots, a radiation waveguide plate in contact with the slot plate and formed with a plurality of rows of waveguide trenches having layout directions of the plurality of radiation slots set in respective pipe axis directions, a power-supply slot plate in contact with the radiation waveguide plate and formed with a plurality of power supply slots connected to the plurality of rows of waveguide trenches, a power-supply waveguide plate in contact with the power-supply slot plate and formed with a plurality of waveguides connected to the plurality of power-supply slots, and a power supply plate in contact with the power-supply waveguide plate and formed with a first plurality of waveguide openings connected to the plurality of waveguides, and having the slot plate, the radiation waveguide plate, the power-supply slot plate, the power-supply waveguide plate, and the power supply plate integrally connected to configure the slot antenna; a resin substrate fixed to a surface of the power-supply plate of the antenna, having a second plurality of waveguide openings communicated to the first plurality of waveguide openings of the antenna, and mounted with conductor terminals, ground conductors, and electronic parts; and a high-frequency package including a dielectric substrate mounted with a high-frequency semiconductor element, and a lid unit accommodating the dielectric substrate and the high-frequency semiconductor element, and connected to the resin substrate via a plurality of conductive connection members, wherein the high-frequency package includes a conductor terminal, a ground conductor, and a waveguide terminal formed with a dielectric opening in the ground conductor, at an outside of the package, the waveguide terminal and a high-frequency signal terminal of the high-frequency semiconductor element being connected to each other via a dielectric waveguide, the waveguide terminal of the high-frequency package and a waveguide opening of the second plurality of waveguide openings of the resin substrate are laid out to face each other, and the plurality of conductive connection members include (1) first conductive connection members that are laid out to surround the waveguide terminal of the high-frequency package and the second plurality of waveguide openings of the resin substrate, and (2) second conductive connection members that are laid out at locations different from those of the first conductive connection members and connect the conductor terminal and the ground conductor of the high-frequency package to at least one of the conductor terminals and at least one of the ground conductors of the resin substrate respectively.

2. The high-frequency module according to claim 1 , wherein low-frequency signals or control signals, power sources, or video signals are input to and output from the second conductive connection members laid out in a ring shape along the outer periphery of the high-frequency package.

3. The slot antenna according to claim 1 , wherein the slot plate, the radiation waveguide plate, the power-supply slot plate, the power-supply waveguide plate, and the power supply plate are integrally connected through diffusion bonding.

4. A high-frequency module comprising: a slot antenna including a slot plate laid out with a plurality of radiation slots, a radiation waveguide plate in contact with the slot plate and formed with a plurality of rows of waveguide trenches having layout directions of the plurality of radiation slots set in respective pipe axis directions, a power-supply slot plate in contact with the radiation waveguide plate and formed with a plurality of power supply slots connected to the plurality of rows of waveguide trenches, a power-supply waveguide plate in contact with the power-supply slot plate and formed with a plurality of waveguides connected to the power-supply slots, and a power supply plate in contact with the power-supply waveguide plate and formed with a first plurality of waveguide openings connected to the plurality of waveguides, the slot antenna being configured by integrally connecting the slot plate, the radiation waveguide plate, the power-supply slot plate, the power-supply waveguide plate, and the power supply plate; a waveguide plate having a first side thereof closely fixed to a front surface of the power supply plate of the slot antenna, and having a plurality of waveguides communicating with the waveguide openings of the slot antenna; a resin substrate fixed to a second side of the waveguide plate, having a second plurality of waveguide openings communicated with the plurality of waveguides of the waveguide plate, and mounted with conductor terminals, ground conductors, and electronic parts; and a high-frequency package including a dielectric substrate mounted with a high-frequency semiconductor element, and a lid unit accommodating the dielectric substrate and the high-frequency semiconductor element, and connected to the resin substrate via a plurality of conductive connection members, wherein the high-frequency package includes a conductor terminal, a ground conductor, and a waveguide terminal formed with a dielectric opening in the ground conductor, at an outside of the package, and has the waveguide terminal and a high-frequency signal terminal of the high-frequency semiconductor element connected to each other via a dielectric waveguide, the waveguide terminal of the high-frequency package and a waveguide opening of the second plurality of waveguide openings of the resin substrate are laid out to face each other, and the plurality of conductive connection members include (1) first conductive connection members that are laid out to surround the waveguide terminal of the high-frequency package and the second plurality of waveguide openings of the resin substrate, and (2) second conductive connection members that are laid out at locations different from those of the first conductive connection members and connect the conductor terminal and the ground conductor of the high-frequency package to at least one of the conductor terminals and at least one of the ground conductors of the resin substrate respectively.

5. The high-frequency module according to claim 4 , wherein low-frequency signals or control signals, power sources, or video signals are input to and output from the second conductive connection members laid out in a ring shape along the outer periphery of the high-frequency package.