This apparatus has two mask segments. Each mask segment has apertures that an ion beam may pass through. These mask segments can move between a first and second position using hinges. One or more workpieces are disposed behind the mask segments when these mask segments are in a second position. The two mask segments are configured to cover the one or more workpieces in one instance. Ions are implanted into the one or more workpieces through the apertures in the mask segments.
Legal claims defining the scope of protection, as filed with the USPTO.
1. An apparatus for implanting workpieces comprising: a workpiece disposed in a path of an ion beam, said workpiece having a first area; two mask segments, each mask segment having a plurality of apertures, said two mask segments configured to cover said first area of said workpiece; and a hinge disposed on each of said mask segments, wherein a gap is defined between said hinges and said gap is configured to enable said workpiece to pass therebetween.
2. The apparatus of claim 1 , further comprising an actuator system configured to translate said mask segments between a first position and a second position.
3. The apparatus of claim 1 , further comprising at least a second workpiece having a second area disposed in said path of said ion beam, wherein said two mask segments are configured to cover said first area and said second area.
4. The apparatus of claim 3 , further comprising a third workpiece and a fourth workpiece disposed in said path of said ion beam, said two mask segments configured to cover said third and fourth workpieces.
5. The apparatus of claim 3 , further comprising a third workpiece, fourth workpiece, fifth workpiece, and sixth workpiece disposed in the path of said ion beam, said two mask segments configured to cover said third, fourth, fifth, and sixth workpieces.
6. The apparatus of claim 1 , wherein said workpiece has a first width and wherein each of said mask segments has a second width, said second width being greater than 50% of said first width.
7. The apparatus of claim 1 , wherein said two mask segments are composed of a material selected from the group consisting of graphite, carbon carbon, silicon carbide, silicon nitride, and quartz.
8. A method of implantation comprising: loading a workpiece onto a platen when a plurality of mask segments are in a first position, wherein said loading comprising moving said workpiece between said plurality of mask segments; translating said plurality of mask segments from said first position to a second position, each mask segment having a plurality of apertures; performing a first ion implant of said workpiece through said plurality of apertures; and translating said plurality of mask segments from said second position to said first position, wherein said translating between said first position and said second position comprises rotating said plurality of mask segments using a plurality of hinges.
9. The method of claim 8 , further comprising unloading said workpiece from said platen while said plurality of mask segments are in said first position.
10. The method of claim 8 , further comprising performing a second ion implant of said workpiece with said ion beam while said plurality of mask segments are in said first position.
11. The method of claim 10 , wherein said second ion implant is performed prior to said first ion implant.
12. The method of claim 8 , wherein said disposing further comprises disposing at least a second workpiece onto said platen.
13. A method of implantation comprising: loading a first workpiece on a platen behind a first mask segment and a second mask segment, each of said first and second mask segments having a plurality of aperture, wherein said loading comprising moving said first workpiece through an opening between said first mask segment and said second mask segment; translating said first mask segment from a first position to a second position; implanting an ion beam through said plurality of apertures of said first mask segment into said first workpiece; loading a second workpiece on said platen through said opening between said first mask segment and said second mask segment; translating said second mask segment from a first position to a second position; implanting said ion beam through said plurality of apertures of said second mask segment into said second workpiece; translating said first mask segment from said second position to said first position, wherein said translating said first mask segment and said translating said second mask segment comprise rotating at least one of said first mask segment and said second mask segment using at least one of a plurality of hinges; and unloading said first workpiece.
14. The method of claim 13 , wherein said loading said second workpiece occurs at least partially simultaneously with said implanting said first workpiece and said unloading said first workpiece occurs at least partially simultaneously with said implanting said second workpiece.
15. The method of claim 13 , further comprising translating said second mask segment from said second position to said first position and unloading said second workpiece.
16. The method of claim 13 , wherein said translating said second mask segment from said first position to said second position is at least partially simultaneous with said translating said first mask segment from said second position to said first position.
17. The method of claim 8 , wherein said translating said plurality of mask segments from said first position to said second position comprises moving each of said plurality of mask segments 90° with respect to a surface of said workpiece.
18. The method of claim 13 , wherein said translating said first mask segment from said first position to said second position comprises moving said first mask segment 90° with respect to a surface of said first workpiece.
19. The method of claim 13 , wherein said translating said second mask segment from said first position to said second position comprises moving said second mask segment 90° with respect to a surface of said second workpiece.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
April 9, 2010
December 11, 2012
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