Provided are a substrate processing apparatus and a method of displaying an abnormal state of the substrate processing apparatus. The substrate processing apparatus including: a manipulation unit including a manipulation screen displaying a state of at least one of a substrate carrying mechanism and a substrate processing mechanism; and a control unit including a carrying system controller controlling the substrate carrying mechanism. The manipulation unit comprises a setting screen through which detection conditions of sensors configured to detect states of the substrate carrying mechanism and the substrate processing mechanism, and information about a torque limitation including the enabling or disabling of the torque control and a torque control value are set for the substrate carrying mechanism. The carrying system controller assigns a motion of the substrate carrying mechanism to a carrying control module based on an instruction from the manipulation unit, and the carrying control module controls the substrate carrying mechanism according to the instruction and the information.
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1. A substrate processing apparatus comprising: a manipulation unit comprising a manipulation screen configured to display at least a state of a substrate carrying mechanism configured to carry a substrate, and a setting screen through which information about a torque limitation including enabling or disabling of torque control and a torque limit value is set for the substrate carrying mechanism; and a control unit comprising a carrying system controller configured to assign an operation of the substrate carrying mechanism to a carrying control module based on an instruction received from the manipulation unit, wherein the manipulation unit controls the manipulation screen to display a detection result of one or more state detection sensors configured to detect the state of the substrate carrying mechanism when the substrate carrying mechanism is stopped due to an abnormal state occurring while the substrate is carried by the substrate carrying mechanism according to control of the control unit based on the instruction received from the manipulation unit and the information about the torque limitation.
A substrate processing apparatus monitors and displays errors during substrate handling. The apparatus has a screen showing the status of the substrate carrying mechanism. A settings screen lets users enable/disable torque control and set a torque limit for the mechanism. A controller moves the substrate based on instructions from the screen and torque settings. If the mechanism stops due to an abnormal state, the screen displays the error detected by sensors. The sensors monitor the substrate carrying mechanism's status. The screen shows error information when the mechanism stops during substrate transfer, based on screen instructions and torque limits.
2. The substrate processing apparatus of claim 1 , wherein the one or more state detection sensors comprises a plurality of state detection sensors, and wherein, when the substrate carrying mechanism is stopped due to a detection of an abnormal state by a vibration sensor of the plurality of state detection sensors or due to a detection of a torque equal to or greater than the torque limit value by one of the plurality of the state detection sensors, the manipulation unit controls the manipulation screen to display information about a stop reason of the substrate carrying mechanism including detection results of the vibration sensor and the one of the plurality of the state detection sensors.
The substrate processing apparatus from the previous description includes multiple sensors that detect problems. If a vibration sensor detects an issue, or if any sensor detects torque exceeding the configured limit, the screen displays the reason for the stoppage. This includes showing the readings from the vibration sensor and the sensor that measured the excessive torque. Therefore, if the substrate carrying mechanism stops because a vibration sensor detects an abnormal state, or because the torque exceeds the set limit, the screen will display information on why it stopped.
3. The substrate processing apparatus of claim 2 , wherein the manipulation unit controls the manipulation screen to display the information about the stop reason including a temporarily stored detection result obtained before the abnormal state occurs.
The substrate processing apparatus from the description including sensors and a screen displaying stoppage reasons also shows sensor data captured *before* the abnormal state occurred. This temporarily stored historical data aids in diagnosing the root cause of the problem. The screen provides more context around the error by including the detection result immediately before the abnormal state occurred.
4. A method of displaying an abnormal state of a substrate processing apparatus according to claim 1 , the method comprising: detecting an abnormal state by using state detection sensors configured to detect a state of a substrate carrying mechanism; reporting information about a stop reason of the substrate carrying mechanism including a detection result of the state detection sensors to a manipulation unit when an abnormal state occurs; and controlling a manipulation screen to display a signal representing the stop reason included in the information about the stop reason.
A method for displaying errors in a substrate processing apparatus uses sensors to monitor the substrate carrying mechanism. When sensors detect an abnormal state, information about why the mechanism stopped is sent to a display screen. The screen then shows a signal representing the reason for the stop. The screen displays a signal that shows why the substrate carrying mechanism stopped, based on state detection sensor results.
5. The substrate processing apparatus of one of claims 1 through 3 , wherein a signal representing the detection result of the state detection sensors includes at least one of a torque limit operation signal and a vibration sensor signal.
In the substrate processing apparatus described previously, the displayed error signal includes either a torque limit operation signal or a vibration sensor signal. So, if the error is due to exceeding the torque limit, a torque limit signal is displayed. If the error is due to vibration, a vibration signal is displayed, or potentially both. These signals indicate what type of error was detected by the sensors.
6. The substrate processing apparatus of claim 1 , wherein the information about the torque limitation is settable through the setting screen for each axis of the substrate carrying mechanism.
The substrate processing apparatus from the previous description allows setting torque limits for each individual axis of the substrate carrying mechanism. This means the user can configure different torque limits for each direction the substrate arm can move via the setting screen. This provides more granular control over the torque protection system.
7. A method of displaying an abnormal state of a substrate processing apparatus comprising a manipulation unit including a manipulation screen configured to display at least a state of a substrate carrying mechanism configured to carry a substrate and a substrate processing mechanism configured to process the substrate and a setting screen through which information about a torque limitation including enabling or disabling of torque control and a torque limit value is set for the substrate carrying mechanism, the method comprising: carrying the substrate by controlling the substrate carrying mechanism based on an instruction received from the manipulation unit and the information about the torque limitation; detecting an abnormal state by state detection sensors configured to detect a state of the substrate carrying mechanism; reporting to the manipulation unit information about a stop reason of the substrate carrying mechanism including a detection result of the state detection sensors; and controlling the manipulation screen to display a signal representing the stop reason included in the information about the stop reason reported to the manipulation unit and a detection result reported by one of the state detection sensors having detected a torque equal to or greater than the torque limit value applied to the substrate carrying mechanism.
A method for displaying errors in a substrate processing apparatus with a screen showing the status of the substrate handling mechanism and a settings screen for torque limits involves the following steps: The substrate is moved based on screen instructions and torque limits. Sensors detect problems with the mechanism. Information about the stoppage, including sensor readings, is sent to the screen. The screen displays a signal showing the reason for the stop, including if torque exceeding the limit was detected. The information being displayed includes the detection result reported by one of the state detection sensors having detected a torque equal to or greater than the torque limit value applied to the substrate carrying mechanism.
8. A substrate processing apparatus comprising: a manipulation unit including a manipulation screen configured to display at least a state of a substrate carrying mechanism configured to carry a substrate and a setting screen through which torque control is enabled or disabled for the substrate carrying mechanism, wherein the manipulation unit executes a program comprising: a sequence of detecting an abnormal state by state detection sensors configured to detect the state of the substrate carrying mechanism; a sequence of reporting to the manipulation unit information about a stop reason of the substrate carrying mechanism including a detection result of the state detection sensors; and a sequence of controlling the manipulation screen to display a signal representing a stop reason included in the information about the stop reason reported to the manipulation unit, the signal representing a detection result reported by a vibration sensor of the state detection sensors having detected an abnormal state or by one of the state detection sensors having detected a torque equal to or greater than a torque limit value applied to the substrate carrying mechanism.
A substrate processing apparatus features a screen for showing the status of the substrate handling system and allowing the user to enable/disable torque control. The apparatus runs software that does the following: monitors the system using sensors, reports the reason for any stops to the screen, and displays the reason for the stop. The software displays a signal that representing a vibration sensor detection OR a sensor that detected excessive torque as the reason for stoppage.
9. A non-transitory computer-readable recording medium storing a program to be executed by a manipulation unit comprising a manipulation screen configured to display at least a state of a substrate carrying mechanism configured to carry a substrate, the program comprising: a sequence of setting torque control to be enabled or disabled for the substrate carrying mechanism; a sequence of detecting an abnormal state by state detection sensors configured to detect the state of the substrate carrying mechanism; a sequence of reporting information about a stop reason of the substrate carrying mechanism including a detection result of the state detection sensors to the manipulation unit; and a sequence of controlling the manipulation screen to display a signal representing the stop reason included in the information about the stop reason reported to the manipulation unit, and a detection result reported by a vibration sensor of the state detection sensors having detected an abnormal state or by one of the state detection sensors having detected a torque equal to or greater than a torque limit value applied to the substrate carrying mechanism.
A computer-readable medium stores a program for a substrate processing apparatus screen that shows the status of a substrate handling mechanism. The program performs these actions: sets torque control to either enabled or disabled. Detects errors using sensors. Reports the reason for any stoppage, including sensor readings, to the screen. Then the screen displays a stop reason representing either a vibration sensor trigger OR a sensor detecting excessive torque.
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February 12, 2010
July 9, 2013
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