Patentable/Patents/US-8502218
US-8502218

Large-area, free-standing metal oxide films and transistors made therefrom

PublishedAugust 6, 2013
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

The present invention provides continuous, free-standing metal oxide films and methods for making said films. The methods are able to produce large-area, flexible, thin films having one or more continuous, single-crystalline metal oxide domains. The methods include the steps of forming a surfactant monolayer at the surface of an aqueous solution, wherein the headgroups of the surfactant molecules provide a metal oxide film growth template. When metal ions in the aqueous solution are exposed to the metal oxide film growth template in the presence of hydroxide ions under suitable conditions, a continuous, free-standing metal oxide film can be grown from the film growth template downward into the aqueous solution.

Patent Claims
22 claims

Legal claims defining the scope of protection, as filed with the USPTO.

1

1. A continuous, free-standing metal oxide film having as thickness of no greater than 10 μm and comprising at least one continuous, single-crystalline metal oxide domain having an area of at least 0.1 μm 2 .

2

2. The metal oxide film of claim 1 , wherein the at least one continuous, single-crystalline metal oxide domain has an area of at least 1 μm 2 .

3

3. The metal oxide film of claim 1 , wherein the at least one continuous, single-crystalline metal oxide domain has an area of at least 100 μm 2 .

4

4. The metal oxide film of claim 1 having a surface area of at least 1 cm 2 .

5

5. The metal oxide film of claim 1 , wherein the metal oxide is zinc oxide.

6

6. The metal oxide film of claim 5 having a thickness no greater than about 100 μm.

7

7. The metal oxide film of claim 5 , wherein the zinc oxide comprises the wurtzite phase of zinc oxide.

8

8. The metal oxide film of claim 5 , wherein the zinc oxide comprises a Zn 0.75 O x structure.

9

9. The metal oxide film of claim 1 , further comprising a surfactant associated with the surface of the metal oxide.

10

10. The metal oxide film of claim 1 , wherein the metal oxide is at least one of a magnesium oxide, a copper oxide, a titanium oxide, a tin oxide or a barium titanium oxide.

11

11. A continuous, free-standing zinc oxide film, wherein the zinc oxide has Zn 0.75 O x structure.

12

12. The zinc oxide film of claim 11 , comprising at least one continuous, single-crystalline Zn 0.75 O x domain having an area of at least 0.1 μm 2 .

13

13. The zinc oxide film of claim 11 , comprising at least one continuous, single-crystalline Zn 0.75 O x domain having an area of at least 1 μm 2 .

14

14. The zinc oxide film of claim 11 having a thickness of no greater than about 1000 nm.

15

15. A transistor incorporating the metal oxide film of claim 1 as an active Layer.

16

16. The metal oxide film of claim 5 having a thickness no greater than about 20 nm.

17

17. The metal oxide film of claim 1 , wherein the metal oxide film is adhered to an adhesive substrate comprising an adhesive layer on a flexible polymeric layer, wherein the adhesive substrate does not provide the metal film with its self-supporting structural integrity.

18

18. The metal oxide film of claim 7 , wherein the single-crystalline metal oxide domain is characterized by a hexagonal lateral perimeter.

19

19. The metal oxide film of claim 8 , wherein the single-crystalline metal oxide domain is characterized by a rectangular lateral perimeter.

20

20. The metal oxide film of claim 1 , wherein the single-crystalline metal oxide domain has a thickness of no greater than 1 μm, a length dimension of greater than 10 μm and a width dimension of greater than 10 μm.

21

21. The metal oxide film of claim 20 , wherein the single-crystalline metal oxide domain has a thickness of no greater than 100 nm and a length dimension or width dimension of at least 50 μm.

22

22. The metal oxide film of claim 20 , wherein the single-crystalline metal oxide domain has an area of at least 1000 μm 2 .

Classification Codes (CPC)

Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.

Patent Metadata

Filing Date

March 12, 2010

Publication Date

August 6, 2013

Want to explore more patents?

Browse 5M+ US patents with plain-English claim translations and AI-generated analysis.

Citation & reuse

Analysis on this page is generated by Patentable — an AI-powered patent intelligence platform. AI-generated summaries, explanations, and analysis may be reused with attribution and a visible link back to the canonical URL below. Patent abstracts and claims are USPTO public domain.

Cite as: Patentable. “Large-area, free-standing metal oxide films and transistors made therefrom” (US-8502218). https://patentable.app/patents/US-8502218

© 2026 Patentable. All rights reserved.

Patentable is a research and drafting-assistant tool, not a law firm, and does not provide legal advice. Documents we generate are drafts for review by a licensed patent attorney.