A sensing frame is disclosed. The sensing frame includes a first rail and a second rail. The first and second rails are constrained to move along a first axis parallel to the first and second rails. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. First and second guiding arms are flexibly coupled to the first rail and second rail. The first guiding arm is flexibly suspended to the base at first anchoring points for allowing rotation of the first guiding arm, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm. The sensing frame includes a plurality of coupling flexures and a transducer for sensing motion of the first and second rails.
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1. A sensor responsive to motion comprising: a base; a proof mass for generating a torque in response to motion of the sensor; a sensing frame disposed in a plane coupled to the proof mass, where in the sensing frame moves in response to the torque, the sensing frame comprising: a first rail, constrained to move along a first axis in the plane; a second rail substantially parallel to the first rail, the second rail constrained to move along the first axis; at least two guiding arms for ensuring the first rail and the second rail to move in anti-phase fashion along the first axis; a first guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail; a second guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail; the first guiding arm flexibly suspended to the base at a first anchoring point allowing rotation of the first guiding arm around a second axis that is perpendicular to the first axis and normal to the plane; the second guiding arm flexibly suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis; and a transducer for sensing motion of the first and second rails along the first axis.
A motion sensor includes a base and a sensing frame that responds to movement. The sensing frame has two parallel rails that move along a single axis. Two guiding arms ensure the rails move in opposite directions (anti-phase). Each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate. The sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis. A proof mass generates a torque when the sensor moves, causing the sensing frame to move.
2. The sensor of claim 1 wherein the proof mass is driven into oscillation.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, where the sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, includes a proof mass that is actively vibrated or oscillated.
3. The sensor of claim 1 wherein the proof-mass is responsive to angular velocity of the sensor.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, where the sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, includes a proof mass that responds to the sensor's angular velocity (how fast it's turning). This means the torque generated by the proof mass is proportional to the angular velocity of the sensor.
4. The sensor of claim 1 wherein the proof-mass is responsive to rotation of the sensor.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, where the sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, includes a proof mass that responds to the sensor's rotation. This means the torque generated by the proof mass is proportional to the rotation of the sensor.
5. The sensor of claim 1 wherein the proof-mass is responsive to linear acceleration of the sensor.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, where the sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, includes a proof mass that responds to the sensor's linear acceleration (how quickly its speed is changing in a straight line). This means the torque generated by the proof mass is proportional to the linear acceleration of the sensor.
6. The sensor of claim 1 wherein a plurality of coupling flexures connect the proof mass to the first rail and the second rail.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, where the sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, uses several flexible connectors (coupling flexures) to attach the proof mass to the two rails. These flexures help transfer the proof mass's movement to the rails.
7. The sensor of claim 1 wherein a plurality of coupling flexures connecting the proof mass to the first and the second guiding arms.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, where the sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, uses several flexible connectors (coupling flexures) to attach the proof mass to the two guiding arms. These flexures help transfer the proof mass's movement to the guiding arms, influencing the rail movement.
8. The sensor claim 1 wherein: the first anchoring point is shared with at least one anchoring point of the proof mass; and the second anchoring point is shared with at least one anchoring point of the proof mass.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, where the sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, has its guiding arms connected to the base at anchoring points, and some of these anchoring points are the same anchoring points used to attach the proof mass to the base. This simplifies the design and potentially improves stability or sensitivity.
9. The sensor of claim 1 wherein the first rail and the second rail support a movable part of the transducer.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, where the sensor also uses a transducer (like a capacitive sensor) to measure the movement of the rails along their axis, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, has a transducer (used to measure the rails' movement) where the moving parts of the transducer are physically supported by the two rails. This means the rails themselves form part of the mechanism that senses their own motion.
10. The sensor of claim 1 wherein the transducer is selected from the group consisting of capacitive sensors, electromagnetic sensors, piezoelectric sensors, and piezoresistive sensors.
The motion sensor, as described above, where the sensor includes a base and a sensing frame that responds to movement, where the sensing frame has two parallel rails that move along a single axis, where two guiding arms ensure the rails move in opposite directions (anti-phase), where each guiding arm is flexibly connected to both rails and is also connected to the base in a way that allows it to rotate, and where a proof mass generates a torque when the sensor moves, causing the sensing frame to move, uses a transducer to sense motion. The transducer is one of the following types: capacitive (measures changes in electrical capacitance), electromagnetic (uses magnetic fields), piezoelectric (generates electricity when stressed), or piezoresistive (changes resistance when stressed).
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March 22, 2012
September 24, 2013
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