Patentable/Patents/US-8621409
US-8621409

System and method for reducing layout-dependent effects

PublishedDecember 31, 2013
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

A method includes extracting a first netlist from a first layout of a semiconductor circuit and estimating layout-dependent effect data based on the first netlist. A first simulation of the semiconductor circuit is performed based on the first netlist using an electronic design automation tool, and a second simulation of the semiconductor circuit is performed based on a circuit schematic using the electronic design automation tool. A weight and a sensitivity of the at least one layout-dependent effect are calculated, and the first layout of the semiconductor circuit is adjusted based on the weight and the sensitivity to provide a second layout of the semiconductor circuit. The second layout is stored in a non-transient storage medium.

Patent Claims
20 claims

Legal claims defining the scope of protection, as filed with the USPTO.

1

1. A method, comprising: extracting a first netlist from a first layout of a semiconductor circuit; estimating layout-dependent effect data based on the first netlist; performing a first simulation of the semiconductor circuit based on the first netlist using an electronic design automation tool; performing a second simulation of the semiconductor circuit based on a circuit schematic using the electronic design automation tool; calculating a weight and a sensitivity of the at least one layout-dependent effect; adjusting the first layout of the semiconductor circuit based on the weight and the sensitivity to provide a second layout of the semiconductor circuit; and storing the second layout in a non-transient storage medium.

2

2. The method of claim 1 , wherein the least one layout-dependent effect includes one of a well-proximity effect, an active area spacing effect, and a poly spacing effect.

3

3. The method of claim 1 , wherein estimating layout-dependent effect data includes categorizing a layout-dependent effect as one of a well-proximity effect, an active area spacing effect, and a poly spacing effect.

4

4. The method of claim 3 , further comprising calculating an impact of at least one layout-dependent effect based on the first and second simulation.

5

5. The method of claim 4 , wherein calculating the impact of at least one layout-dependent effect includes calculating a performance parameter of a device of the semiconductor circuit based on the second simulation; calculating the performance parameter of the device of the semiconductor circuit when subject to well-proximity effects; calculating the performance parameter of the device of the semiconductor circuit when subject to active area spacing effects; calculating the performance parameter of the device of the semiconductor circuit when subject to poly spacing effects; and normalizing the performance parameters of the device when subject to well-proximity effects, active area spacing effects, and poly spacing effects to the performance parameter of the device based on the second simulation.

6

6. The method of claim 4 , wherein calculating the impact of at least one layout-dependent effect includes: generating a contour map identifying at least one stress attributable to at least one layout-dependent effect; and displaying the contour map to a user on a display.

7

7. The method of claim 1 , wherein calculating the weight of the at least one layout-dependent effect includes: deriving a function for a first layout-dependent effect, the function approximating a performance parameter of a device of the semiconductor circuit based on a first set of physical parameters identified by the first layout; and deriving a function for a second layout-dependent effect, the function approximating a performance parameter of the device of the semiconductor circuit based on a second set of physical parameters identified by the first layout; and calculating a ratio of the function for the first layout-dependent effect relative to a sum of the function for the first layout-dependent effect and the function for the second layout-dependent effect.

8

8. A system, comprising: an electronic design automation tool including a processor configured to: provide a first netlist from a first layout of a semiconductor circuit; estimate layout-dependent effect data from the first netlist; perform a first simulation of the semiconductor circuit based on the first netlist and a second simulation of the semiconductor circuit based on a circuit schematic; calculate a weight and a sensitivity of the at least one layout-dependent effect; and adjust the first layout of the semiconductor circuit based on the weight and the sensitivity to provide a second layout of the semiconductor circuit.

9

9. The system of claim 8 , wherein the least one layout-dependent effect includes one of a well-proximity effect, an active area spacing effect, and a poly spacing effect.

10

10. The system of claim 8 , wherein when the processor is configured to categorize a layout-dependent effect as one of a well-proximity effect, an active area spacing effect, and a poly spacing effect when the processor extracts layout-dependent effect data.

11

11. The system of claim 10 , wherein the processor is configured to calculate an impact of at least one layout-dependent effect based on the first and second simulations, wherein the impact calculation includes a calculation of a performance parameter of a device of the semiconductor circuit based on the second simulation; a calculation of a the performance parameter of the device of the semiconductor circuit when subject to well-proximity effects; a calculation of the performance parameter of the device of the semiconductor circuit when subject to active area spacing effects; and a calculation the performance parameter of the device of the semiconductor circuit when subject to poly spacing effects when the processor calculates the impact of the at least one layout-dependent effect.

12

12. The system of claim 11 , wherein the processor is configured to normalize the performance parameters of the device when the device is subject to well-proximity effects, active area spacing effects, and poly spacing effects to the performance parameter of the device based on the second simulation.

13

13. The system of claim 12 , wherein the processor is configured to: generate a contour map identifying at least one stress attributable to at least one layout-dependent effect; and display the contour map to a user on a display of the system.

14

14. The system of claim 8 , wherein when calculating the weight of the at least one layout-dependent effect, the processor is configured to: derive a function for a first layout-dependent effect, the function approximating a performance parameter of a device of the semiconductor circuit based on a first set of physical parameters identified by the first layout; and derive a function for a second layout-dependent effect, the function approximating a performance parameter of the device of the semiconductor circuit based on a second set of physical parameters identified by the first layout; and calculate a ratio of the function for the first layout-dependent effect relative to a sum of the function for the first layout-dependent effect and the function for the second layout-dependent effect.

15

15. A non-transient storage medium encoded with program code, wherein when the program code is executed by a processor, the processor performs a method, the method comprising: extracting a first netlist from a first layout of a semiconductor circuit; estimating layout-dependent effect data from the first netlist; performing a first simulation of the semiconductor circuit based on the first netlist using an electronic design automation tool; performing a second simulation of the semiconductor circuit based on a circuit schematic using the electronic design automation tool; calculating a weight and a sensitivity of the at least one layout-dependent effect; adjusting the first layout of the semiconductor circuit based on the weight and the sensitivity to provide a second layout of the semiconductor circuit; and storing the second layout in a non-transient storage medium.

16

16. The non-transient storage medium of claim 15 , wherein extracting layout-dependent effect data includes categorizing a layout-dependent effect as one of a well-proximity effect, an active area spacing effect, and a poly spacing effect.

17

17. The non-transient storage medium of claim 16 , further comprising calculating an impact of at least one layout-dependent effect.

18

18. The non-transient computer readable storage medium of claim 17 , wherein calculating the impact of at least one layout-dependent effect includes calculating a performance parameter of a device of the semiconductor circuit based on the second simulation; calculating the performance parameter of the device of the semiconductor circuit when subject to well-proximity effects; calculating the performance parameter of the device of the semiconductor circuit when subject to active area spacing effects; calculating the performance parameter of the device of the semiconductor circuit when subject to poly spacing effects; and normalizing the performance parameters of the device when subject to well-proximity effects, active area spacing effects, and poly spacing effects to the performance parameter of the device based on the second simulation.

19

19. The non-transient computer readable storage medium of claim 18 , wherein calculating the impact of at least one layout-dependent effect includes: generating a contour map identifying at least one stress attributable to at least one layout-dependent effect; and displaying the contour map to a user on a display.

20

20. The non-transient computer readable storage medium of claim 15 , wherein calculating the weight of the at least one layout-dependent effect includes: deriving a function for a first layout-dependent effect, the function approximating a performance parameter of a device of the semiconductor circuit based on a first set of physical parameters identified by the first layout; and deriving a function for a second layout-dependent effect, the function approximating a performance parameter of the device of the semiconductor circuit based on a second set of physical parameters identified by the first layout; and calculating a ratio of the function for the first layout-dependent effect relative to a sum of the function for the first layout-dependent effect and the function for the second layout-dependent effect.

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Patent Metadata

Filing Date

April 30, 2012

Publication Date

December 31, 2013

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Cite as: Patentable. “System and method for reducing layout-dependent effects” (US-8621409). https://patentable.app/patents/US-8621409

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