During a carrying operation, the position, transportation origin, and transportation destination of a carrier or a boat can be easily checked. A carrying system is configured to carry a substrate, a manipulation unit is configured to display an operation state of the carrying system on a manipulation screen, and a control unit is configured to control an operation of the carrying system. The manipulation unit displays a carrying system icon indicating the carrying system which is a carrying target object and a carrying-out icon at predetermined positions of the manipulation screen corresponding to a transportation origin of the carrying system, and a carrying-in icon at a predetermined position of the manipulation screen corresponding to the transportation destination of the carrying system.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method of displaying an operation state of a carrying system configured to carry a substrate on a manipulation screen in a substrate processing apparatus, the method comprising: (a) receiving a carrying start message containing information specifying a transportation origin and a transportation destination of the carrying system when a carrying operation of the carrying system starts; (b) displaying a carrying system icon indicating the carrying system and a carrying-out icon at a predetermined position of the manipulation screen corresponding to the transportation origin; (c) displaying a carrying-in icon at a predetermined position of the manipulation screen corresponding to the transportation destination; (d) receiving a carrying end message containing a carrying end information of the carrying system when the carrying operation of the carrying system is terminated; (e) removing the carrying-out icon and the carrying-in icon displayed on the manipulation screen; and (f) displaying the carrying system icon at the predetermined position of the manipulation screen corresponding to the transportation destination.
2. The method of claim 1 , further comprising: (g) receiving a carrying-allowable/disallowable notice message containing a carrying disallowable reason when the carrying operation of the carrying system is disallowed; and (h) displaying an image representing the operation state at a time of receiving the carrying-allowable/disallowable notice message on the manipulation screen.
3. The method of claim 2 , wherein the step (h) further comprises displaying a content of the carrying-allowable/disallowable notice message on the manipulation screen with the image.
4. The method of claim 1 , further comprising: receiving a carrying-allowable/disallowable notice message containing a carrying disallowable reason when the carrying operation of the carrying system is disallowed; displaying a carrying interruption icon at a predetermined position of the manipulation screen; and rejecting an inputted command for operating a carrier carrying device when the carrying-allowable/disallowable notice message is received.
5. The method of claim 4 , wherein the carrying disallowable reason is displayed on the manipulation screen when the carrying interruption icon is pressed.
6. The method of claim 1 , wherein the carrying-out icon comprises a upward arrow icon at the predetermined position of the manipulation screen corresponding to the transportation origin, and the carrying-in icon comprises a downward arrow icon at the predetermined position of the manipulation screen corresponding to the transportation destination.
7. The method of claim 1 , further comprising: receiving an error notice message including a carrying allowable/disallowable flag value, a factor list and transportation origin/transportation destination information when an error occurs in the carrying system; checking a content of the error notice message; collecting monitor data indicating states of units other than the carrying system; and storing an error information file including the content of the error notice message and the monitor data.
8. The method of claim 7 , further comprising: indexing the error information file using an index information including a date of the error or an alarm ID; and configuring and displaying a screen at a time of the error using the monitor data included in the error information file.
9. A method of displaying a carrying state of a substrate holding tool on a manipulation screen in a substrate processing apparatus, the method comprising: (a) receiving a lifting/lowering start message containing information specifying a transportation origin and a transportation destination of the substrate holding tool when the substrate holding tool included in a carrying system carrying a plurality of substrates and being loaded with the plurality of substrates starts to be lifted/lowered; (b) displaying a direction icon indicating a direction from the transportation origin to the transportation destination of the substrate holding tool on the manipulation screen; and (c) moving a carrying system icon indicating the substrate holding tool based on an actual position information of the substrate holding tool while the substrate holding tool is being lifted/lowered; (d) stopping a movement of the carrying system icon indicating the substrate holding tool while deleting the direction icon displayed on the manipulation screen when a lifting/lowering stop message is received.
10. The method of claim 9 , further comprising: (e) receiving a carrying-allowable/disallowable notice message containing a carrying disallowable reason when a carrying operation of the carrying system is disallowed; and (f) displaying an image representing the carrying state at a time of receiving the carrying-allowable/disallowable notice message on the manipulation screen.
11. The method of claim 10 , wherein the step (f) further comprises displaying a content of the carrying-allowable/disallowable notice message on the manipulation screen with the image.
12. The method of claim 9 , further comprising: receiving a carrying-allowable/disallowable notice message containing a carrying disallowable reason when a carrying operation of the carrying system is disallowed; displaying a carrying interruption icon at a predetermined position of the manipulation screen; and rejecting an inputted command for operating a carrier carrying device when the carrying-allowable/disallowable notice message is received.
13. The method of claim 12 , wherein the carrying disallowable reason is displayed on the manipulation screen when the carrying interruption icon is pressed.
14. The method of claim 9 , further comprising: receiving an error notice message including a carrying allowable/disallowable flag value, a factor list and transportation origin/transportation destination information when an error occurs in the carrying system; checking a content of the error notice message; collecting monitor data indicating states of units other than the carrying system; and storing an error information file including the content of the error notice message and the monitor data.
15. The method of claim 14 , further comprising: indexing the error information file using an index information including a date of the error or an alarm ID; and configuring and displaying a screen at a time of the error using the monitor data included in the error information file.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
December 10, 2012
March 25, 2014
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