A microelectromechanical (MEMS) microphone assembly includes a MEMS structure, a base portion, and a lid. The MEMS structure includes a diaphragm that responds to changes in sound pressure and the MEMS structure contributes to a vertical dimension of the assembly. The MEMS structure is supported by the base portion. The lid partially but not completely encloses the MEMS structure, such that the portion of the MEMS structure is not surrounded by the lid, the lid, and the base portion form a boundary with and are exposed to the environment external to the microphone assembly.
Legal claims defining the scope of protection, as filed with the USPTO.
Claim text for this patent isn't available yet.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
April 13, 2012
July 15, 2014
Browse 5M+ US patents with plain-English claim translations and AI-generated analysis.