An information processing apparatus includes: a receiving device receiving a distribution data series; first adjusting device adjusting first function parameter set to reduce an error, the first function parameter set specifying the position of the extreme value, and the ratio of a value at first distance on the coordinate axis from the position of the extreme value in first direction to the extreme value; second adjusting device adjusting second function parameter set to reduce an error, the second function parameter set specifying the position of the extreme value, and the ratio of a value at second distance on the coordinate axis from the position of the extreme value in second direction to the extreme value; a calculator calculating a characteristic coefficient identifying a Pearson function from a moment of a function including the first and second functions; and a distribution data calculator for calculating distribution data by a Pearson function.
Legal claims defining the scope of protection, as filed with the USPTO.
1. An information processing apparatus comprising: a receiving device for receiving a distribution data series including an extreme value of a value corresponding to a position on a coordinate axis and data describing a condition under which the distribution data series has been obtained; a first adjusting device for adjusting a first function parameter set to reduce an error between data generated by a first function and the distribution data series, the first function including the first function parameter set, the first function parameter set specifying the position of the extreme value, the ratio of a value at a first distance on the coordinate axis from the position of the extreme value in a first direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the first distance in the first direction; a second adjusting device for adjusting a second function parameter set to reduce an error between data generated by a second function and the distribution data series, the second function including the second function parameter set, the second function parameter set specifying the position of the extreme value, the ratio of a value at a second distance on the coordinate axis from the position of the extreme value in a second direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the second distance in the second direction; a calculator for calculating a characteristic coefficient identifying a Pearson function from a moment of a function including the first and second functions joined at the position of the extreme value; a storage device for storing the characteristic coefficient in a database in association with the data describing the condition under which the distribution data series has been obtained; an interpolator for interpolating a characteristic coefficient for condition data of interest from the characteristic coefficient stored in the database; and a distribution data calculator for calculating distribution data by a Pearson function identified by the interpolated characteristic coefficient.
2. The information processing apparatus according to claim 1 , wherein the distribution data calculator comprises: a first logarithmic distribution data calculator for calculating distribution data on a logarithmic axis; a second logarithmic distribution data calculator for calculating a maximum value of the distribution data on the logarithmic axis; a third logarithmic distribution data calculator for subtracting the maximum value of the distribution data on the logarithmic axis from the distribution data on the logarithmic axis; and a third linear distribution data calculator for converting the distribution data on the logarithmic axis from which the maximum value has been subtracted to distribution data on a linear axis.
3. An information processing apparatus comprising: a receiving device for receiving a distribution data series including an extreme value of a value corresponding to a position on a coordinate axis and data describing a condition under which the distribution data series has been obtained; a first adjusting device for adjusting a first function parameter set to reduce an error between data generated by a first function and the distribution data series, the first function including the first function parameter set, the first function parameter set specifying the position of the extreme value, the ratio of a value at a first distance on the coordinate axis from the position of the extreme value in a first direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the first distance in the first direction; a second adjusting device for adjusting a second function parameter set to reduce an error between data generated by a second function and the distribution data series, the second function including the second function parameter set, the second function parameter set specifying the position of the extreme value, the ratio of a value at a second distance on the coordinate axis from the position of the extreme value in a second direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the second distance in the second direction; a storage device for storing a function parameter set for identifying the first and second functions in a database in association with the data describing the condition under which the distribution data series has been obtained, the function parameter set including at least one of the first function parameter set, the second function parameter set, a parameter set converted from the first function parameter set, and a parameter set converted from the second function parameter set; an interpolator for interpolating a function parameter for condition data of interest from the function parameter set stored in the database; and a calculator for calculating a distribution data series by a composite function of the first and second functions identified by the interpolated function parameter set.
4. The information processing apparatus according to claim 3 , wherein the distribution data series includes a first data series in which data appear in a convex or concave curve with the extreme value at a peak or valley and a second data series having a smaller value-change rate than the first data series, the information processing apparatus further comprising: a third adjusting device for adjusting at least one function parameter in a third function parameter set to reduce an error between distribution data generated by a third function and the second distribution data series, the third function including the third function parameter set, the third function parameter set specifying the extreme value, the position of the extreme value, and the ratio of a value at a third distance from the position of the extreme value in the direction of the second data series to the extreme value, and an order of an expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the third distance in the direction of the second data series.
5. An information processing method performed by a computer, comprising: inputting a distribution data series including an extreme value of a value corresponding to a position on a coordinate axis and data describing a condition under which the distribution data series has been obtained; adjusting a first function parameter set to reduce an error between data generated by a first function and the distribution data series, the first function including the first function parameter set, the first function parameter set specifying the position of the extreme value, the ratio of a value at a first distance on the coordinate axis from the position of the extreme value in a first direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the first distance in the first direction; adjusting a second function parameter set to reduce an error between data generated by a second function and the distribution data series, the second function including the second function parameter set, the second function parameter set specifying the position of the extreme value, the ratio of a value at a second distance on the coordinate axis from the position of the extreme value in a second direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the second distance in the second direction; calculating a characteristic coefficient identifying a Pearson function from a moment of a function including the first and second functions joined at the position of the extreme value; storing the characteristic coefficient in a database in association with the data describing the condition under which the distribution data series has been obtained; interpolating a characteristic coefficient for condition data of interest from the characteristic coefficient stored in the database; and calculating distribution data by a Pearson function identified by the interpolated characteristic coefficient.
6. The information processing method according to claim 5 , further comprising: adjusting the first and second function parameter sets to reduce an error between data generated by the Pearson function identified by the characteristic coefficient calculated from the moment and the input distribution data series.
7. The information processing method according to claim 5 , wherein the distribution data series includes a first data series in which data appear in a convex or concave curve with the extreme value at a peak or valley and a second data series having a smaller value-change rate than the first data series, the information processing method further comprises: adjusting at least one function parameter in a third function parameter set to reduce an error between data generated by a third function and the second data series, the third function including the third function parameter set, the third function parameter set specifying the extreme value, the position of the extreme value, and the ratio of a value at a third distance from the position of the extreme value in the direction of the second data series to the extreme value, and an order of an expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the third distance in the direction of the second data series.
8. The information processing method according to claim 7 , further comprising: setting a factor for the Pearson function, the factor being determined from a condition that functions resulting from multiplication of the sum of the Pearson function and the third function by the factor are continuous; and adjusting an extreme value of the third function so that the third function multiplied by the factor matches the second data series.
9. An information processing method performed by a computer, comprising: inputting a distribution data series including an extreme value of a value corresponding to a position on a coordinate axis and data describing a condition under which the distribution data series has been obtained; adjusting a first function parameter set to reduce an error between data generated by a first function and the distribution data series, the first function including the first function parameter set, the first function parameter set specifying the position of the extreme value, the ratio of a value at a first distance on the coordinate axis from the position of the extreme value in a first direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the first distance in the first direction; adjusting a second function parameter set to reduce an error between data generated by a second function and the distribution data series, the second function including the second function parameter set, the second function parameter set specifying the position of the extreme value, the ratio of a value at a second distance on the coordinate axis from the position of the extreme value in a second direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the second distance in the second direction; storing a function parameter set for identifying the first and second functions in a database in association with the data describing the condition under which the distribution data series has been obtained, the function parameter set including at least one of the first function parameter set, the second function parameter set, a parameter set converted from the first function parameter set, and a parameter set converted from the second function parameter set; interpolating a function parameter for condition data of interest from the function parameter set stored in the database; and calculating a distribution data series by a composite function of the first and second functions identified by the interpolated function parameter set.
10. The information processing method according to claim 9 , wherein the distribution data series includes a first data series in which data appear in a convex or concave curve with the extreme value at a peak or valley and a second data series having a smaller value-change rate than the first data series, the information processing method further comprises: adjusting at least one function parameter in a third function parameter set to reduce an error between distribution data generated by a third function and the second data series, the third function including the third function parameter set, the third function parameter set specifying the extreme value, the position of the extreme value, and the ratio of a value at a third distance from the position of the extreme value in the direction of the second data series to the extreme value, and an order of an expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the third distance in the direction of the second data series.
11. The information processing method according to claim 10 , further comprising: calculating a second characteristic coefficient identifying a Pearson function from the third function parameter set; and storing the second characteristic coefficient in a database in association with the data describing the condition under which the distribution data series has been obtained.
12. The information processing method according to claim 11 , wherein the calculating a distribution data series by a composite function of the first and second functions identified by the interpolated function parameter set further comprises: calculating distribution data on a logarithmic axis; calculating a maximum value of the distribution data on the logarithmic axis; subtracting the maximum value of the distribution data on the logarithmic axis from the distribution data on the logarithmic axis; and converting the distribution data on the logarithmic axis from which the maximum value has been subtracted to distribution data on a linear axis.
13. A computer readable medium includes a program causing a computer to perform an information processing method, the information processing method comprising: inputting a distribution data series including an extreme value of a value corresponding to a position on a coordinate axis and data describing a condition under which the distribution data series has been obtained; adjusting a first function parameter set to reduce an error between data generated by a first function and the distribution data series, the first function including the first function parameter set, the first function parameter set specifying the position of the extreme value, the ratio of a value at a first distance on the coordinate axis from the position of the extreme value in a first direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the first distance in the first direction; adjusting a second function parameter set to reduce an error between data generated by a second function and the distribution data series, the second function including the second function parameter set, the second function parameter set specifying the position of the extreme value, the ratio of a value at a second distance on the coordinate axis from the position of the extreme value in a second direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the second distance in the second direction; calculating a characteristic coefficient identifying a Pearson function from a moment of a function including the first and second functions joined at the position of the extreme value; storing the characteristic coefficient in a database in association with the data describing the condition under which the distribution data series has been obtained; interpolating a characteristic coefficient for condition data of interest from the characteristic coefficient stored in the database; and calculating distribution data by a Pearson function identified by the interpolated characteristic coefficient.
14. The computer readable medium according to claim 13 , the information processing method further comprising: adjusting the first and second function parameter sets to reduce an error between data generated by the Pearson function identified by the characteristic coefficient calculated from the moment and the input distribution data series.
15. The computer readable medium according to claim 13 , wherein the distribution data series includes a first data series in which data appear in a convex or concave curve with the extreme value at a peak or valley and a second data series having a smaller value-change rate than the first data series, the information processing method further comprising: adjusting at least one function parameter in a third function parameter set to reduce an error between data generated by a third function and the second data series, the third function including the third function parameter set, the third function parameter set specifying the extreme value, the position of the extreme value, and the ratio of a value at a third distance from the position of the extreme value in the direction of the second data series to the extreme value, and an order of an expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the third distance in the direction of the second data series.
16. The computer readable medium according to claim 15 , the information processing method further comprising: setting a factor for the Pearson function, the factor being determined from a condition that functions resulting from multiplication of the sum of the Pearson function and the third function by the factor are continuous; and adjusting an extreme value of the third function so that the third function multiplied by the factor matches the second data series.
17. A computer readable medium includes a program causing a computer to perform an information processing method, the information processing method comprising: inputting a distribution data series including an extreme value of a value corresponding to a position on a coordinate axis and data describing a condition under which the distribution data series has been obtained; adjusting a first function parameter set to reduce an error between data generated by a first function and the distribution data series, the first function including the first function parameter set, the first function parameter set specifying the position of the extreme value, the ratio of a value at a first distance on the coordinate axis from the position of the extreme value in a first direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the first distance in the first direction; adjusting a second function parameter set to reduce an error between data generated by a second function and the distribution data series, the second function including the second function parameter set, the second function parameter set specifying the position of the extreme value, the ratio of a value at a second distance on the coordinate axis from the position of the extreme value in a second direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the second distance in the second direction; storing a function parameter set for identifying the first and second functions in a database in association with the data describing the condition under which the distribution data series has been obtained, the function parameter set including at least one of the first function parameter set, the second function parameter set, a parameter set converted from the first function parameter set, and a parameter set converted from the second function parameter set; interpolating a function parameter for condition data of interest from the function parameter set stored in the database; and calculating a distribution data series by a composite function of the first and second functions identified by the interpolated function parameter set.
18. The computer readable medium according to claim 17 , wherein the distribution data series includes a first data series in which data appear in a convex or concave curve with the extreme value at a peak or valley and a second data series having a smaller value-change rate than the first data series, the information processing method further comprising: adjusting at least one function parameter in a third function parameter set to reduce an error between distribution data generated by a third function and the second distribution data series, the third function including the third function parameter set, the third function parameter set specifying the extreme value, the position of the extreme value, and the ratio of a value at a third distance from the position of the extreme value in the direction of the second data series to the extreme value, and an order of an expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the third distance in the direction of the second data series.
19. The computer readable medium according to claim 17 , wherein the calculating a distribution data series by a composite function of the first and second functions identified by the interpolated function parameter set further comprises: calculating distribution data on a logarithmic axis; calculating a maximum value of the distribution data on the logarithmic axis; subtracting the maximum value of the distribution data on the logarithmic axis from the distribution data on the logarithmic axis; and converting the distribution data on the logarithmic axis from which the maximum value has been subtracted to distribution data on a linear axis.
20. A system comprising: a receiving device for inputting a distribution data series including an extreme value of a value corresponding to a position on a coordinate axis and data describing a condition under which the distribution data series has been obtained; a first adjusting device for adjusting a first function parameter set to reduce an error between data generated by a first function and the distribution data series, the first function including the first function parameter set, the first function parameter set specifying the position of the extreme value, the ratio of a value at a first distance on the coordinate axis from the position of the extreme value in a first direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the first distance in the first direction; a second adjusting device for adjusting a second function parameter set to reduce an error between data generated by a second function and the distribution data series, the second function including the second function parameter set, the second function parameter set specifying the position of the extreme value, the ratio of a value at a second distance on the coordinate axis from the position of the extreme value in a second direction to the extreme value, and an order of expression of an exponent part of a function curve including an exponential form in the interval from the position of the extreme value to the second distance in the second direction; a calculator for calculating a characteristic coefficient identifying a Pearson function from a moment of a function including the first and second functions joined at the position of the extreme value; a storage device for storing the characteristic coefficient in a database in association with the data describing the condition under which the distribution data series has been obtained; an interpolator for interpolating a characteristic coefficient for condition data of interest from the characteristic coefficient stored in the database; a distribution data calculator for calculating distribution data by a Pearson function identified by the interpolated characteristic coefficient; and an ion implantation apparatus.
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December 22, 2010
September 23, 2014
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