When a wafer stage WST accelerates and decelerates on a base, a torque that acts on a wafer drive system including the base and the like is cancelled out by a torque that acts on the wafer drive system by driving a counter of a coutermass device along a linear guide in the Z-axis direction at a predetermined acceleration. Thereby, the torque that acts upon the wafer drive system is cancelled and the exposure apparatus can expose the wafer with good accuracy.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A moving body apparatus, comprising: a moving body; a planar motor comprising a first member that is provided to the moving body and a second member that cooperates with the first member to generate a thrust that moves the moving body along a predetermined plane; a reaction member to which the second member is attached, and which is movable in a direction opposite to a direction in which the first member and the moving body move, while movably supporting the moving body; and a canceling device that applies to the reaction member a force that cancels a torque generated around a center of gravity of a system that includes the reaction member and the moving body, when the moving body moves by the thrust, wherein the canceling device is located below the reaction member with respect to the moving body.
2. The moving body apparatus according to claim 1 wherein the canceling device applies the force to the reaction member in a direction orthogonal to the predetermined plane in at least three points of application whose positions differ within a plane parallel to the predetermined plane.
3. The moving body apparatus according to claim 1 wherein the canceling device has a mass body that moves in an orthogonal axial direction, which is a direction orthogonal to the predetermined plane; a guide that is provided to the reaction member and guides the mass body in the orthogonal axial direction; and an actuator that moves the mass body with respect to the guide in accordance with movement of the moving body.
4. The moving body apparatus according to claim 3 wherein the actuator drives the mass body at an acceleration that is in accordance with a distance between a center of gravity of the system including the reaction member and the moving body within a plane parallel to the predetermined plane and a point of application of the force.
5. The moving body apparatus according to claim 3 wherein the actuator drives the mass body with an acceleration that is in accordance with magnitude of an acceleration of the moving body.
6. The moving body apparatus according to claim 1 wherein the moving body has an opposing surface, which opposes a surface of the reaction member, and a holding surface, which is provided to an upper part above the opposing surface and holds the object, and the thrust is generated between the opposing surface and the surface of the reaction member.
7. The moving body apparatus according to claim 1 , further comprising: a plurality of vibration isolating devices that support the reaction member, wherein the reaction member is supported by each of the plurality of vibration isolating devices such that the reaction member is capable of being finely driven in a direction orthogonal to the predetermined plane.
8. An exposure apparatus that exposes an object by irradiating an energy beam, comprising: the moving body apparatus according to claim 1 in which the object is held by the moving body.
9. The moving body apparatus according to claim 1 , further comprising: a vibration isolating device that supports the reaction member, wherein the vibration isolating device and the canceling device are located below the reaction member with respect to the moving body.
10. The moving body apparatus according to claim 1 , wherein the canceling device includes a mass body that moves in a direction orthogonal to the predetermined plane below the reaction member.
11. The moving body apparatus according to claim 1 , further comprising: a second moving body which is different from the moving body and is placed above the reaction member, wherein the canceling device applies to the reaction member a force that cancels a torque generated around a center of gravity of a system that includes the reaction member, the moving body and the second moving body.
12. A moving body apparatus, comprising: a drive system; a moving body that is movable along a predetermined plane by a thrust generated by the drive system; a reaction member that supports the moving body to be movable along the predetermined plane, and moves in a direction opposite to a direction of the thrust; and a canceling device that, through movement of the moving body, applies to the reaction member a force that cancels a torque generated around a center of gravity of a system including the reaction member and the moving body, wherein: the canceling device comprises: a mass body that is movable in a direction intersecting the predetermined plane; a guide that is provided to the reaction member and guides the mass body in the direction intersecting the predetermined plane; and an actuator that moves the mass body with respect to the guide in accordance with the movement of the moving body, wherein the canceling device is located below the reaction member with respect to the moving body.
13. The moving body apparatus according to claim 12 wherein the drive system is a planar motor that comprises: a mover, which is provided to the moving body; and a stator, which is provided to the reaction member and applies the thrust between itself and the mover.
14. The moving body apparatus according to claim 12 wherein the actuator drives the mass body at an acceleration that is in accordance with a distance between a center of gravity of the system including the reaction member and the moving body within a plane parallel to the predetermined plane and a point of application of the force.
15. The moving body apparatus according to claim 12 wherein the actuator drives the mass body with an acceleration that is in accordance with magnitude of an acceleration of the moving body.
16. The moving body apparatus according to claim 12 wherein the moving body has an opposing surface, which opposes a surface of the reaction member, and a holding surface, which is provided to an upper part above the opposing surface and holds the object, and the thrust is generated between the opposing surface and the surface of the reaction member.
17. The moving body apparatus according to claim 12 , further comprising: a plurality of vibration isolating devices that support the reaction member, wherein the reaction member is supported by each of the plurality of vibration isolating devices such that the reaction member is capable of being finely driven in a direction orthogonal to the predetermined plane.
18. An exposure apparatus that exposes an object by irradiating an energy beam, comprising: the moving body apparatus according to claim 10 in which the object is held by the moving body.
19. The moving body apparatus according to claim 12 , further comprising: a vibration isolating device that supports the reaction member, wherein the vibration isolating device and the canceling device are located below the reaction member with respect to the moving body.
20. The moving body apparatus according to claim 12 , wherein the canceling device includes a mass body that moves in a direction orthogonal to the predetermined plane below the reaction member.
21. The moving body apparatus according to claim 12 , further comprising: a second moving body which is different from the moving body and is placed above the reaction member, the second moving body being movable along the predetermined plane by a thrust generated by the drive system, wherein the canceling device applies to the reaction member a force that cancels a torque generated around a center of gravity of a system that includes the reaction member, the moving body and the second moving body.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
March 2, 2009
November 18, 2014
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