A wafer buffering system is provided herein. In some embodiments, a wafer buffering system may include a frame having a vertical shaft disposed therethrough; two storage platforms, coupled to the frame on either side thereof, each to receive a wafer carrier thereon; and a transfer mechanism coupled to the vertical shaft and capable of vertical movement therealong and lateral movement along an x-axis extending in either direction from the frame at least sufficient to move over the two storage platforms. The transfer mechanism may further include a telescoping fork arm capable of laterally extending in a first direction and in a second direction corresponding to lateral positions of the two storage platforms on either side of the frame.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A wafer buffering system, comprising: a frame having a vertical shaft disposed therethrough; two storage platforms, coupled to the frame on opposing sides of the shaft, each to receive a wafer carrier thereon, wherein the position of the vertical shaft is fixed relative to each of the two storage platforms; and a transfer mechanism coupled to the vertical shaft and capable of vertical movement therealong and lateral movement along an x-axis extending in either direction from the frame at least sufficient to move linearly along the x-axis from one of the two storage platforms to the other.
2. The wafer buffering system of claim 1 , wherein the transfer mechanism further comprises: a telescoping fork arm capable of laterally extending in a first direction and in a second direction corresponding to lateral positions of the two storage platforms on either side of the frame.
3. The wafer buffering system of claim 1 , wherein the two storage platforms comprise at least one of an overhead track (OHT) interface platform or a stationary buffer platform.
4. The wafer buffering system of claim 3 , wherein the two storage platforms comprise a first OHT interface platform and a second OHT interface platform.
5. The wafer buffering system of claim 4 , wherein the two storage platforms further comprise a first stationary buffer platform and a second stationary buffer platform.
6. The wafer buffering system of claim 5 , wherein the transfer mechanism is adapted to transfer a wafer carrier from the first or second OHT platforms or the first or second stationary buffer platforms to at least one of the first or second OHT platforms or the first or second stationary buffer platforms.
7. The wafer buffering system of claim 1 , further comprising: a controller to control the operation of the wafer buffering system.
8. The wafer buffering system of claim 7 , wherein the controller is configured to interface with at least one of a factory controller or a controller coupled to a semiconductor processing tool.
9. The wafer buffering system of claim 1 , wherein the vertical shaft is disposed centrally through the frame, and wherein all of the storage platforms of the wafer buffering system are disposed in a common vertical plane.
10. An apparatus for processing a semiconductor wafer comprising: a semiconductor process apparatus having a first and a second load port; and a wafer buffering system to receive and to buffer wafer carriers, the wafer buffering system disposed between the first and second load ports, the wafer buffering system comprising: a frame having a vertical shaft disposed therethrough; two storage platforms, coupled to the frame on opposing sides of the shaft, each to receive a wafer carrier thereon, wherein the position of the vertical shaft is fixed relative to each of the two storage platforms; and a transfer mechanism coupled to the vertical shaft and capable of vertical movement therealong and lateral movement along an x-axis extending in either direction from the frame at least sufficient to move linearly along the x-axis from one of the two storage platforms to the other.
11. The apparatus of claim 10 , wherein the first and second load ports are disposed within a factory interface.
12. The apparatus of claim 10 , the transfer mechanism further comprising: a telescoping fork arm capable of laterally extending in a first direction and in a second direction corresponding to lateral positions of the two storage platforms.
13. The apparatus of claim 10 , wherein the two storage platforms comprise at least one of an overhead track (OHT) interface platform or a stationary buffer platform.
14. The apparatus of claim 13 , wherein the two storage platforms comprise a first OHT interface platform and a second OHT interface platform.
15. The apparatus of claim 14 , wherein the two storage platforms further comprise a first stationary buffer platform and a second stationary buffer platform.
16. The apparatus of claim 15 , wherein the transfer mechanism is adapted to transfer a wafer carrier from the first or second OHT platforms or the first or second stationary buffer platforms to at least one of the first or second OHT platforms or the first or second stationary buffer platforms.
17. The apparatus of claim 10 , further comprising: a controller to control the operation of the wafer buffering system.
18. The apparatus of claim 17 , wherein the controller is configured to interface with at least one of a factory controller or a controller coupled to a semiconductor processing tool.
19. A wafer buffering system, comprising: a frame having a vertical shaft disposed therethrough; a plurality of storage platforms each to receive a wafer carrier thereon, wherein at least one storage platform is disposed on an opposite side of the shaft and at a same vertical height as one other storage platform, wherein all of the storage platforms are arranged along a vertical plane; and a transfer mechanism coupled to the vertical shaft and capable of movement along the vertical plane at least sufficient to transfer wafer carriers to and from each of the storage platforms.
20. The apparatus of claim 10 , wherein all of the storage platforms of the wafer buffering system are disposed in a common vertical plane.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
August 22, 2008
November 25, 2014
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