The present invention provides a non-lead piezoelectric film having high crystalline orientation, the low dielectric loss, the high polarization-disappear temperature, the high piezoelectric constant, and the high linearity between an applied electric field and an amount of displacement. The present invention is a piezoelectric film comprising: a NaxLa1-x+yNi1-yO3-x layer having only an (001) orientation and a (1-α) (Bi, Na, Ba) TiO3-αBiQO3 layer having only an (001) orientation. The (1-α) (Bi, Na, Ba) TiO3-αBiQO3 layer is formed on the NaxLa1-x+yNi1-yO3-x layer. The character of Q represents Fe, Co, Zn0.5Ti0.5, or Mg0.5Ti0.5 The character of x represents a value of not less than 0.01 and not more than 0.05. The character of y represents a value of not less than 0.05 and not more than 0.20. The character of α represents a value of not less than 0.20 and not more than 0.50.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A piezoelectric film comprising: a Na x La 1-x+y Ni 1-y O 3-x layer having only an (001) orientation; and a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer having only an (001) orientation; wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is formed on the Na x La 1-x+y Ni 1-y O 3-x layer; Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 ; x represents a value of not less than 0.01 and not more than 0.05; y represents a value of not less than 0.05 and not more than 0.20; and α represents a value of not less than 0.20 and not more than 0.50.
2. The piezoelectric film according to claim 1 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is in contact with the Na x La 1-x+y Ni 1-y O 3-x layer.
3. The piezoelectric film according to claim 1 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer contains Mn.
4. An ink jet head comprising: a piezoelectric film having a piezoelectric layer sandwiched between a first electrode and a second electrode; a vibration layer bonded to the piezoelectric film; and a pressure chamber member having a pressure chamber for storing ink and bonded to a surface of the vibration layer opposite to a surface to which the piezoelectric film is bonded; wherein the vibration layer is bonded to the piezoelectric film so that the vibration layer is displaceable in its film thickness direction according to a displacement of the piezoelectric film produced by a piezoelectric effect; the vibration layer and the pressure chamber member are bonded to each other so that a volumetric capacity of the pressure chamber changes according to a displacement of the vibration layer and so that the ink in the pressure chamber is ejected according to a change in the volumetric capacity of the pressure chamber; the first electrode comprises a Na x La 1-x+y Ni 1-y O 3-x layer having only an (001) orientation; the piezoelectric layer is a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer having only an (001) orientation; Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 ; x represents a value of not less than 0.01 and not more than 0.05; y represents a value of not less than 0.05 and not more than 0.20; and α represents a value of not less than 0.20 and not more than 0.50.
5. The ink jet head according to claim 4 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is in contact with the Na x La 1-x+y Ni 1-y O 3-x layer.
6. The ink jet head according to claim 4 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer contains Mn.
7. A method of forming an image by an ink jet head, the method comprising: a step (a) of preparing the ink jet head, wherein the ink jet head includes: a piezoelectric film having a piezoelectric layer sandwiched between a first electrode and a second electrode; a vibration layer bonded to the piezoelectric film; and a pressure chamber member having a pressure chamber for storing ink and bonded to a surface of the vibration layer opposite to a surface to which the piezoelectric film is bonded, the vibration layer is bonded to the piezoelectric film so that the vibration layer is displaceable in its film thickness direction according to a displacement of the piezoelectric film produced by a piezoelectric effect, the vibration layer and the pressure chamber member are bonded to each other so that a volumetric capacity of the pressure chamber changes according to a displacement of the vibration layer and so that the ink in the pressure chamber is ejected according to a change in the volumetric capacity of the pressure chamber, the first electrode comprises a Na x La 1-x+y Ni 1-y O 3-x layer having only an (001) orientation; the piezoelectric layer is a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer having only an (001) orientation; Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 ; x represents a value of not less than 0.01 and not more than 0.05; y represents a value of not less than 0.05 and not more than 0.20; and α represents a value of not less than 0.20 and not more than 0.50; and a step (b) of applying a voltage to the piezoelectric layer through the first electrode and the second electrode to displace, based on the piezoelectric effect, the vibration layer in its film thickness direction so that the volumetric capacity of the pressure chamber changes and the ink is ejected from the pressure chamber by the displacement.
8. The method according to claim 4 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is in contact with the Na x La 1-x+y Ni 1-y O 3-x layer.
9. The method according to claim 4 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer contains Mn.
10. An angular velocity sensor comprising: a substrate having a vibration part; and a piezoelectric film bonded to the vibration part and having a piezoelectric layer sandwiched between a first electrode and a second electrode, wherein the first electrode comprises a Na x La 1-x+y Ni 1-y O 3-x layer having only an (001) orientation; the piezoelectric layer is a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer having only an (001) orientation; Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 ; x represents a value of not less than 0.01 and not more than 0.05; y represents a value of not less than 0.05 and not more than 0.20; α represents a value of not less than 0.20 and not more than 0.50; and one of the first electrode and the second electrode selected therefrom is composed of an electrode group including a drive electrode for applying a driving voltage that oscillates the vibration part to the piezoelectric layer and a sense electrode for measuring a displacement of the vibration part caused by an angular velocity applied to the oscillating vibration part.
11. The angular velocity sensor according to claim 10 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is in contact with the Na x La 1-x+y Ni 1-y O 3-x layer.
12. The angular velocity sensor according to claim 10 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer contains Mn.
13. A method of measuring an angular velocity by an angular velocity sensor, the method comprising: a step (a) of preparing the angular velocity sensor, wherein the angular velocity sensor includes: a substrate having a vibration part; and a piezoelectric film bonded to the vibration part and having a piezoelectric layer sandwiched between a first electrode and a second electrode, the first electrode comprises a Na x La 1-x+y Ni 1-y O 3-x layer having only an (001) orientation; the piezoelectric layer is a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer having only an (001) orientation; Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 ; x represents a value of not less than 0.01 and not more than 0.05; y represents a value of not less than 0.05 and not more than 0.20; α represents a value of not less than 0.20 and not more than 0.50; and one of the first electrode and the second electrode selected therefrom is composed of an electrode group including a drive electrode and a sense electrode; a step (b) of applying a driving voltage to the piezoelectric layer through the drive electrode and the other of the first electrode and the second electrode selected therefrom to oscillate the vibration part; and a step (c) of measuring, through the other electrode and the sense electrode, a displacement of the vibration part caused by an angular velocity applied to the oscillating vibration part to obtain a value of the applied angular velocity.
14. The method according to claim 13 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is in contact with the Na x La 1-x+y Ni 1-y O 3-x layer.
15. The method according to claim 13 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer contains Mn.
16. A piezoelectric generating element comprising: a substrate having a vibration part; and a piezoelectric film bonded to the vibration part and having a piezoelectric layer sandwiched between a first electrode and a second electrode, wherein the first electrode comprises a Na x La 1-x+y Ni 1-y O 3-x layer having only an (001) orientation; the piezoelectric layer is a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer having only an (001) orientation; Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 ; x represents a value of not less than 0.01 and not more than 0.05; y represents a value of not less than 0.05 and not more than 0.20; and α represents a value of not less than 0.20 and not more than 0.50.
17. The piezoelectric generating element according to claim 16 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is in contact with the Na x La 1-x+y Ni 1-y O 3-x layer.
18. The piezoelectric generating element according to claim 16 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer contains Mn.
19. A method of generating electric power using a piezoelectric generating element, the method comprising: a step (a) of preparing the piezoelectric generating element, wherein the piezoelectric generating element includes: a substrate having a vibration part; and a piezoelectric film bonded to the vibration part and having a piezoelectric layer sandwiched between a first electrode and a second electrode, the first electrode comprises a Na x La 1-x+y Ni 1-y O 3-x layer having only an (001) orientation; the piezoelectric layer is a (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer having only an (001) orientation; Q represents Fe, Co, Zn 0.5 Ti 0.5 , or Mg 0.5 Ti 0.5 ; x represents a value of not less than 0.01 and not more than 0.05; y represents a value of not less than 0.05 and not more than 0.20; and α represents a value of not less than 0.20 and not more than 0.50; and a step (b) of vibrating the vibration part to obtain electric power through the first electrode and the second electrode.
20. The method according to claim 19 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer is in contact with the Na x La 1-x+y Ni 1-y O 3-x layer.
21. The method according to claim 19 , wherein the (1-α) (Bi, Na, Ba) TiO 3 -αBiQO 3 layer contains Mn.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
June 25, 2013
April 7, 2015
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