Pulse voltages V1 and V2 are applied to a first upper gate electrode and a second upper gate electrode, respectively, for a period T1 which is shorter than a period necessary to invert all the polarizations included in a ferroelectric film, while voltages Vs, Vd, and V3 are applied to a source electrode, a drain electrode, and a lower gate electrode film, respectively, so as to increase the values of the widths WRL1 and WRL2 and so as to decrease the value of the width WRH. The absolute values of the pulse voltages V1 and V2 are smaller than that of a voltage necessary to invert all the polarizations included in the ferroelectric film. The voltage Vs, the voltage Vd, the voltage V3, the pulse voltage V1, and the pulse voltage V2 satisfy the following relationship: Vs, Vd, V3>V1, V2.
Legal claims defining the scope of protection, as filed with the USPTO.
2. The method according to claim 1 , wherein the ferroelectric film is in contact with the semiconductor film.
4. The method according to claim 1 , wherein n is three or more.
5. The method according to claim 1 , wherein n is five or more.
6. The method according to claim 1 , wherein n is ten or more.
7. The method according to claim 1 , wherein before the step (b) is conducted, both of the values of widths WRL 1 and WRL 2 are zero.
8. The method according to claim 1 , wherein after the step (c) is conducted, the value of the width WRH is zero.
10. The method according to claim 9 , wherein the ferroelectric film is in contact with the semiconductor film.
12. The method according to claim 9 , wherein n is three or more.
13. The method according to claim 9 , wherein n is five or more.
14. The method according to claim 9 , wherein n is ten or more.
15. The method according to claim 9 , wherein before the step (b) is conducted, both of the values of widths WRL 1 and WRL 2 are zero.
16. The method according to claim 9 , wherein after the step (c) is conducted, the value of the width WRH is zero.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
December 30, 2013
May 19, 2015
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