The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method, comprising a) providing a substrate and a functionalized branched siloxane Epoxy-Si-12 having the structure shown in FIG. 5 ; b) spin-coating said functionalized branched siloxane Epoxy-Si-12 on to said substrate; c) curing said spin-coated Epoxy-Si-12; and d) etching said cured functionalized branched siloxane Epoxy-Si-12 on said substrate.
2. The method of claim 1 , wherein the functionalized branched siloxane Epoxy-Si-12 is UV cured in step c).
3. The method of claim 1 , wherein the functionalized branched siloxane Epoxy-Si-12 is in a mixture with a photo acid generator.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
February 16, 2011
October 13, 2015
Browse 5M+ US patents with plain-English claim translations and AI-generated analysis.