Nanotube structure based metal damascene process

1. A method for manufacturing a metallization layer on a substrate, the method comprising: forming an adhesion promoting layer on the substrate; providing a separate substrate with fully grown nanotubes; transferring the full grown nanotubes from the separate substrate onto the adhesion promoting layer; forming a plurality of groups of nanotubes from the nanotubes transferred from the separate substrate over the substrate, wherein the groups of nanotubes are arranged such that a portion of the substrate is exposed; and forming metal over the exposed portion of the substrate between the groups of nanotubes.

2. The method of claim 1 , wherein each group of nanotubes comprises insulating material between the nanotubes.

3. The method of claim 1 , wherein forming the plurality of groups of nanotubes over the substrate comprises: providing a uniform arrangement of nanotubes; depositing an insulating material therebetween; removing a multitude of nanotubes together with the insulating material deposited therebetween.

4. The method of claim 1 , wherein the plurality of groups of nanotubes comprise carbon nanotubes.

5. The method of claim 3 , wherein removing the multitude of nanotubes together with insulating material deposited therebetween comprises a plasma etch process.

6. The method of claim 1 , further comprising: structuring the adhesion promoting layer before transferring the fully grown nanotubes.

7. The method of claim 1 , wherein the nanotubes in the plurality of groups of nanotubes arranged over the substrate are substantially extending at right angle with respect to the substrate.