Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A NAND unit cell, comprising: a pair of selecting device comprising transistors extending vertically relative a substrate; at least two string devices connected serially, each string device comprising a transistor extending vertically relative the substrate and between the pair of selecting devices; a charge-storage layer incorporated into each transistor of each string device and incorporated into each transistor of each selecting device; and an insulative layer adjacent the charge-storage layer in each transistor of each selecting device.
2. The NAND unit cell of claim 1 wherein the insulative layer comprises at least one of tunnel dielectric material and charge-blocking material.
3. The NAND unit cell of claim 1 wherein the insulative layer is adjacent the charge-storage layer in each transistor of each string device.
4. The NAND unit cell of claim 1 further comprising a control gate for one of the pair of the selecting devices, the control gate is spaced from the substrate by the charge-storage layer.
5. The NAND unit cell of claim 1 wherein the insulative layer comprises a first insulative layer, and further comprising a second insulative layer adjacent the charge-storage layer in each transistor of each selecting device.
6. The NAND unit cell of claim 1 wherein the insulative layer is adjacent the charge-storage layer in each transistor of each string device.
7. The NAND unit cell of claim 1 wherein the substrate comprises a semiconductor substrate having a cavity, the cavity filled with a plurality of the NAND unit cells.
8. The NAND unit cell of claim 1 further comprising a control gate for one of the pair of the selecting devices, the control gate is spaced from the substrate by the charge-storage layer and the insulative layer.
9. The NAND unit cell of claim 1 wherein the insulative layer comprises tunnel dielectric material and charge-blocking material.
10. A semiconductor construction, comprising: a plurality of vertical columns comprising semiconductor material extending upwardly from a semiconductor substrate, the vertical columns comprising alternating n-type and p-type doped layers of the semiconductor material, each vertical column spaced from one another and comprising vertical sidewalls; vertically stacked layers comprising electrically insulative material alternating with electrically conductive material, the vertically stacked layers positioned between the vertical columns, a bottommost vertically stacked layer of electrically conductive material comprising a control gate for a selecting device; and an insulative material configuration between the vertical columns and the vertically stacked layers, the insulative material configuration extending vertically along the vertical sidewalls of the vertical columns and along the control gate for the selecting device.
11. The semiconductor construction of claim 10 wherein a vertically stacked layer most proximate the semiconductor substrate comprises electrically insulative material.
12. The semiconductor construction of claim 10 wherein the insulative material configuration extends between the semiconductor substrate and the control gate for the selecting device.
13. The semiconductor construction of claim 10 wherein the control gate for the selecting device is spaced from the semiconductor substrate by one of the vertically stacked layers comprising electrically insulative material.
14. The semiconductor construction of claim 10 wherein the control gate for the selecting device is spaced from the semiconductor substrate by the insulative material configuration.
15. The semiconductor construction of claim 10 wherein the insulative material configuration comprises at least charge-storage material.
16. The semiconductor construction of claim 10 wherein the insulative material configuration comprises at least a first layer of charge-storage material and a second discrete layer of charge-blocking material.
17. The semiconductor construction of claim 10 wherein the insulative material configuration comprises a layer of charge-storage material, a layer of charge-blocking material and a tunnel dielectric layer.
18. The NAND unit cell of claim 1 wherein the charge-storage layer comprises a charge-trapping material embedded in a charge-trapping material.
19. The NAND unit cell of claim 1 wherein the charge-storage layer comprises a metallic material.
20. The semiconductor construction of claim 10 wherein the selecting device is a first selecting device, and further comprising a topmost vertically stacked layer of electrically conductive material comprising a control gate for a second selecting device.
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December 12, 2013
January 5, 2016
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