A method of selectively etching silicon nitride from a substrate comprising a silicon nitride layer and a silicon oxide layer includes flowing a fluorine-containing gas into a plasma generation region of a substrate processing chamber and applying energy to the fluorine-containing gas to generate a plasma in the plasma generation region. The plasma comprises fluorine radicals and fluorine ions. The method also includes filtering the plasma to provide a reactive gas having a higher concentration of fluorine radicals than fluorine ions and flowing the reactive gas into a gas reaction region of the substrate processing chamber. The method also includes exposing the substrate to the reactive gas in the gas reaction region of the substrate processing chamber. The reactive gas etches the silicon nitride layer at a higher etch rate than the reactive gas etches the silicon oxide layer.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method of selectively etching silicon nitride from a substrate comprising a silicon nitride layer and a silicon oxide layer, the method comprising: flowing a fluorine-containing gas into a plasma generation region of a substrate processing chamber separated from a gas reaction region of the substrate processing chamber by a showerhead; striking a plasma in the plasma generation region, the plasma comprising fluorine radicals and fluorine ions; filtering the plasma with an ion-suppression element separate from the showerhead to provide a reactive gas having a higher concentration of fluorine radicals than fluorine ions; flowing the reactive gas into the gas reaction region through the showerhead; and exposing the substrate to the reactive gas in the gas reaction region of the substrate processing chamber, wherein the reactive gas etches the silicon nitride layer at a higher etch rate than the reactive gas etches the silicon oxide layer.
2. The method of claim 1 wherein the fluorine-containing gas comprises NF 3 .
3. The method of claim 1 wherein the fluorine-containing gas comprises O 2 .
4. The method of claim 1 wherein the fluorine-containing gas comprises at least one of He or Ar.
5. The method of claim 1 wherein energy is applied to the fluorine-containing gas using a capacitively coupled plasma unit.
6. The method of claim 1 wherein the reactive gas is substantially free from fluorine ions.
7. The method of claim 1 wherein the ion suppression element is disposed between the plasma generation region and the gas reaction region of the substrate processing chamber, the ion suppression element comprising a plurality of channels that allow passage of fluorine radicals between the plasma generation region and the gas reaction region.
8. An etch process providing a higher etch rate of silicon nitride than an etch rate of silicon oxide, the process comprising: generating a plasma from a fluorine-containing gas, the plasma comprising fluorine radicals and fluorine ions, wherein the plasma is generated remotely from a substrate processing region of a substrate processing chamber; removing a portion of the fluorine ions from the plasma with an ion-suppression element to provide a reactive gas having a higher concentration of fluorine radicals than fluorine ions; flowing the reactive gas through a showerhead into the substrate processing region, wherein the showerhead is a separate element from the ion-suppression element; and exposing a substrate comprising a silicon nitride layer and a silicon oxide layer to the reactive gas, wherein the reactive gas etches the silicon nitride layer at a higher etch rate than the reactive gas etches the silicon oxide layer.
9. The process of claim 8 wherein the fluorine-containing gas comprises NF 3 .
10. The process of claim 8 wherein the fluorine-containing gas comprises O 2 .
11. The process of claim 8 wherein the fluorine-containing gas comprises at least one of He or Ar.
12. The process of claim 8 the plasma is generated using a capacitively coupled plasma unit.
13. The process of claim 8 the reactive gas is substantially free from fluorine ions.
14. The process of claim 8 wherein the ion suppression element comprises a plurality of channels that allow passage of fluorine radicals and suppression of fluorine ions.
15. The process of claim 8 wherein the substrate is unbiased during etch of the silicon nitride layer.
16. A method of selectively etching a semiconductor substrate in a semiconductor processing chamber, the method comprising: flowing a fluorine-containing precursor into a first region of the semiconductor processing chamber, the first region of the semiconductor processing chamber being separated from a second region of the semiconductor processing chamber by a showerhead; striking a plasma in the first region to produce plasma species comprising fluorine radicals and fluorine ions; filtering the plasma species with an ion-suppression device to provide a reactive gas having a higher concentration of fluorine radicals than fluorine ions, wherein the ion-suppression device is a device separate from the showerhead; flowing the reactive gas into the second region through the showerhead; and exposing the semiconductor substrate positioned in the second region to the reactive gas to etch at least a portion of the semiconductor substrate, wherein the semiconductor substrate comprises an exposed region of silicon nitride and an exposed region of silicon oxide, and wherein the silicon nitride etches at a higher rate than the silicon oxide.
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April 6, 2015
May 17, 2016
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