Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber providing a stacking space in which a substrate is stacked and a process space in which a process with respect to the substrate is performed, a boat including at least one boat frame that vertically stands up, the boat being elevated to move into the stacking space and the process space, a plurality of susceptors disposed on the boat frame and spaced apart from each other along a longitudinal direction of the boat frame, wherein, as the boat moves into the process space, the substrate is successively loaded on a top surface of each of the plurality of susceptors, and at least holder including a vertical rod disposed parallel to the boat frame and a substrate support tip protruding from an inner surface of the vertical rod to support the substrate, wherein, when the boat moves into the process space, the vertical rod relatively moves along the longitudinal direction of the boat frame.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A substrate processing apparatus comprising: a chamber providing a stacking space in which a substrate is stacked and a process space in which a process with respect to the substrate is performed; wherein the chamber has a connection space between the stacking space and the process space; a boat comprising at least one boat frame that vertically stands up, the boat being elevated to move into the stacking space and the process space; a plurality of susceptors disposed on the boat frame and spaced apart from each other along a longitudinal direction of the boat frame, wherein, as the boat moves into the process space, the substrate is successively loaded on a top surface of each of the plurality of susceptors; at least holder comprising a vertical rod disposed parallel to the boat frame and a substrate support tip protruding from an inner surface of the vertical rod to support the substrate, wherein, when the boat moves into the process space, the vertical rod relatively moves along the longitudinal direction of the boat frame; and a grip plate disposed in the connection space to block the stacking space and the process space, the grip plate being connected to an upper end of the vertical rod to move together with the boat into the process space when the boat moves from the stacking space to the process space.
2. The substrate processing apparatus of claim 1 , wherein the boat frame comprises susceptor support tips protruding from an inner surface thereof to support the susceptor, the susceptor support tips being spaced apart from each other along the longitudinal direction of the boat frame.
3. The substrate processing apparatus of claim 1 , wherein the chamber comprises: a lower chamber having an opened upper portion and a passage that is defined in one side thereof so that the substrate is accessible, the lower chamber providing the stacking space; and an upper chamber disposed on the lower chamber and having an opened lower portion communicating with the opened upper portion of the lower chamber, the upper chamber providing the process space.
4. The substrate processing apparatus of claim 1 , further comprising a support ring disposed in the connection space, the support ring comprising a support protrusion protruding from an inner surface thereof to support the grip plate that is placed thereon.
5. The substrate processing apparatus of claim 1 , wherein the holder relatively moves through an insertion hole defined in the susceptor when the boat moves into the process space.
6. The substrate processing apparatus of claim 1 , wherein the susceptor has a seat groove that is recessed from a top surface of the susceptor and has a shape corresponding to that of the substrate, wherein the substrate is seated in the seat groove.
7. The substrate processing apparatus of claim 1 , further comprising an upper blocking plate connected to an upper portion of the boat frame to left the grip plate when the boat moves into the process space.
8. The substrate processing apparatus of claim 7 , wherein the upper blocking plate has a through hole defined in a position correspond to that of the holder, and the holder is movable through the through hole when the boat moves into the process space.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
February 17, 2014
June 14, 2016
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