The disclosed embodiments include a mass flow controller for controlling a flow of a fluid. In one embodiment, the mass flow controller comprises an inlet for receiving the fluid; a flow path in which the fluid passes through the mass flow controller; a mass flow meter for providing a signal corresponding to mass flow of the fluid through the flow path, the mass flow meter having a bypass through which a majority of fluid flows; a turning vane positioned upstream of the bypass for generating a more uniform fluid flow; an adjustable valve for regulating the flow of the fluid out of an outlet of the mass flow controller; and a controller configured to apply a valve control signal to adjust the adjustable valve to a desired valve position to control the flow of the fluid out of an outlet of the mass flow controller.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A mass flow controller for controlling a flow of a fluid, the mass flow controller comprising: an inlet for receiving the fluid; a flow path in which the fluid passes through the mass flow controller; a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path; a bypass coupled to the mass flow sensor through which a majority of fluid flows; a turning vane positioned upstream of the bypass for generating a more uniform fluid flow; an adjustable valve for regulating the flow of the fluid out of an outlet of the mass flow controller; and a controller configured to apply a valve control signal to adjust the adjustable valve to a desired valve position to control the flow of the fluid out of an outlet of the mass flow controller.
2. The mass flow controller of claim 1 , wherein the turning vane includes a flow mixer.
3. The mass flow controller of claim 2 , wherein the flow mixer abuts an inlet screen of the bypass.
4. The mass flow controller of claim 2 , wherein turning vane includes a flat portion abutting the flow mixer.
5. The mass flow controller of claim 1 , wherein the turning vane comprises a plurality of vanes.
6. The mass flow controller of claim 5 , wherein an angle of a curved surface for each vane within the plurality of vanes of the turning vane gradually increases from a bottom vane to a top vane.
7. The mass flow controller of claim 1 , wherein the turning vane comprises a single vane.
8. The mass flow controller of claim 7 , wherein a portion of a curved section of the single vane is straightened to permit partial fluid flow through the turning vane.
9. The mass flow controller of claim 1 , wherein the turning vane includes a support structure.
10. The mass flow controller of claim 1 , wherein the turning vane abuts an inlet screen of the bypass.
11. A turning vane configured to be positioned upstream of a bypass of at least one of a flow controller and flow meter for generating a more uniform fluid flow.
12. The turning vane of claim 11 , further comprising a flow mixer.
13. The turning vane of claim 12 , wherein the flow mixer is configured to abut an inlet screen of the bypass.
14. The turning vane of claim 12 , wherein turning vane includes a flat portion abutting the flow mixer.
15. The turning vane of claim 11 , wherein the turning vane comprises a plurality of vanes.
16. The turning vane of claim 15 , wherein an angle of a curved surface for each vane within the plurality of vanes of the turning vane gradually increases from a bottom vane to a top vane.
17. The turning vane of claim 11 , wherein the turning vane comprises a single vane.
18. The turning vane of claim 17 , wherein a portion of a curved section of the single vane is straightened to permit partial fluid flow through the turning vane.
19. The turning vane of claim 1 , wherein the turning vane includes a support structure.
20. A mass flow meter for measuring a flow of a fluid, the mass flow meter comprising: an inlet for receiving the fluid; a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the mass flow meter; a bypass coupled to the mass flow sensor through which a majority of fluid flows; and a turning vane positioned upstream of the bypass for generating a more uniform fluid flow.
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February 9, 2014
July 26, 2016
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