A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.
Legal claims defining the scope of protection. Each claim is shown in both the original legal language and a plain English translation.
1. An electromagnetic device comprising: a core having a width and a length along a longitudinal axis, the core defining a cavity along the longitudinal axis, and including: a first magnetic layer, a second magnetic layer positioned substantially parallel to the first magnetic layer, and an electrically insulating layer positioned between the first magnetic layer and the second magnetic layer for suppressing a current flowing between the first magnetic layer and the second magnetic layer, each of the first magnetic layer and the second magnetic layer formed as a single and continuous segment for providing a continuous closed-loop magnetic flux free of flux bunching and spreading; a semiconductor substrate positioned at least partially in the cavity and having a plurality of openings; and a coil made of an electrically conductive material and positioned or embedded in the plurality of openings of the semiconductor substrate, the coil having a portion that is substantially parallel to the longitudinal axis.
An electromagnetic device includes a core with a cavity along its length. The core is constructed of a first magnetic layer, a parallel second magnetic layer, and an electrically insulating layer between them to prevent current flow. The magnetic layers are continuous, forming a closed loop for magnetic flux without bunching. A semiconductor substrate with openings is placed at least partially in the core's cavity. A coil made of conductive material is positioned within the openings of the semiconductor substrate. A portion of the coil runs parallel to the core's length.
2. The electromagnetic device of claim 1 , wherein the core and the coil are micro-fabricated for integration in an electronic circuit.
The electromagnetic device described above, with its core made of magnetic and insulating layers, and its coil embedded in a semiconductor substrate, is fabricated using micro-fabrication techniques. This allows it to be integrated directly into an electronic circuit.
3. The electromagnetic device of claim 1 , wherein each of the first magnetic layer and the second magnetic layer of the core is plated as a conformal or continuous segment around the coil for enhancing the continuous closed-loop magnetic flux.
In the electromagnetic device described above, the core's first and second magnetic layers are plated conformally or continuously around the coil. This configuration enhances the continuous closed-loop magnetic flux, improving the device's electromagnetic performance. The first magnetic layer, the second magnetic layer, and an electrically insulating layer are positioned between the first and second magnetic layer.
4. The electromagnetic device of claim 1 , further comprising a second core having a width and a length along the longitudinal axis, the second core defining a second cavity along the longitudinal axis, and including: a third magnetic layer, a fourth magnetic layer positioned substantially parallel to the third magnetic layer, and a second electrically insulating layer positioned between the third magnetic layer and the fourth magnetic layer for suppressing a current flowing between the third magnetic layer and the fourth magnetic layer, each of the third magnetic layer and the fourth magnetic layer being formed as a single and continuous segment for enhancing the continuous closed-loop magnetic flux.
The electromagnetic device from the original description further includes a second core, similar to the first, with its own cavity. This second core has a third magnetic layer, a parallel fourth magnetic layer, and a second electrically insulating layer in between. These magnetic layers are continuous, which enhances the closed-loop magnetic flux within the second core. The second core has a width and a length along the longitudinal axis, the second core defining a second cavity along the longitudinal axis.
5. The electromagnetic device of claim 4 , wherein at least a second portion of the coil is substantially parallel to the longitudinal axis and passes through the second cavity, and the coil includes a plurality of secondary windings that are interleaved between a plurality of primary windings, thereby forming a portion of a transformer.
Building on the previous electromagnetic device containing two cores, at least a second portion of the coil is substantially parallel to the longitudinal axis and passes through the second cavity. The coil contains primary and secondary windings interleaved with each other, creating a portion of a transformer within the device. The primary and secondary windings are interleaved between a plurality of primary windings.
6. The electromagnetic device of claim 4 , further comprising a second coil separated from the coil, at least a portion of the second coil passing through the second cavity, and the coil includes a plurality of secondary windings that are interleaved between a plurality of primary windings, thereby forming a transformer.
The electromagnetic device with two cores, as previously described, includes a second coil separated from the first. At least a portion of this second coil passes through the second core's cavity. The first coil incorporates interleaved primary and secondary windings, which forms a transformer element within the overall device, enabling inductive coupling between the two coils.
7. The electromagnetic device of claim 1 , wherein the plurality of openings of the semiconductor substrate has an aspect ratio that is greater than 2 to 1.
In the electromagnetic device, the semiconductor substrate features openings that house the coil. These openings have an aspect ratio (depth to width) greater than 2:1. This higher aspect ratio may be used to improve the performance, such as, but not limited to, electromagnetic properties and/or size constraint.
8. The electromagnetic device of claim 1 , wherein the first magnetic layer and the second magnetic layer of the core are made of a first material having high magnetic permeability and low magnetic coercivity, and wherein the electrically insulating layer of the core is formed of a material capable of enhancing magnetic characteristics of the core and electrically insulating the first magnetic layer of the core from the second magnetic layer of the core to reduce an eddy current and power loss.
The core of the electromagnetic device is constructed with specific materials. The first and second magnetic layers are made of a material with high magnetic permeability and low magnetic coercivity. The electrically insulating layer is made of a material that enhances the core's magnetic properties while also electrically isolating the magnetic layers. This reduces eddy currents and minimizes power loss within the core.
9. The electromagnetic device of claim 1 , wherein the first magnetic layer and the second magnetic layer of the core are made of at least CoNiFe, and the electrically insulating layer is made of a Ferrite material.
In a specific implementation of the electromagnetic device's core, the magnetic layers (first magnetic layer and second magnetic layer) are made of CoNiFe (Cobalt-Nickel-Iron alloy). The electrically insulating layer between them is made of a Ferrite material, chosen for its insulating properties and magnetic characteristics.
10. The electromagnetic device of claim 1 , further comprising an insulating material positioned in the plurality of openings, and between the semiconductor substrate and the coil, for insulating the coil from the semiconductor substrate and for reducing stress from a thermal expansion mismatch between the coil and the semiconductor substrate.
The electromagnetic device includes an insulating material filling the openings in the semiconductor substrate. This material is positioned between the substrate and the coil, electrically isolating the coil and reducing stress caused by differences in thermal expansion between the coil material and the semiconductor substrate.
11. The electromagnetic device of claim 10 , wherein the insulating material is made of at least an organic material capable of reducing the stress from the thermal expansion mismatch between the coil and the semiconductor substrate.
The insulating material used between the coil and semiconductor substrate, as described above, is made of an organic material. This organic material is specifically chosen for its ability to reduce stress caused by thermal expansion mismatch between the coil and the substrate.
12. The electromagnetic device of claim 10 , wherein the insulating material is made of at least Parylene.
The insulating material used between the coil and semiconductor substrate, which reduces thermal expansion stress, is made of Parylene.
13. The electromagnetic device of claim 1 , wherein the coil includes a plurality of primary windings and a plurality of secondary windings.
The coil within the electromagnetic device consists of multiple primary windings and multiple secondary windings.
14. A micro-fabricated electromagnetic device integrated in an electronic circuit, the micro-fabricated electromagnetic device comprising: a core having a width and a length along a longitudinal axis that is substantially greater than the width, the core defining a cavity along the longitudinal axis, and including: a plurality of magnetic layers extending parallel to the longitudinal axis and surrounding the cavity, each of the plurality of magnetic layers being formed as a single and continuous segment for providing a continuous closed-loop magnetic flux substantially free of flux bunching and spreading, and a plurality of electrically insulating layers positioned alternatingly between the plurality of magnetic layers, collectively forming a continuous laminate having a plurality of alternating magnetic and electrically insulating layers, the plurality of electrically insulating layers suppressing a current flowing between the plurality of magnetic layers; a semiconductor substrate positioned at least partially in the cavity and having a plurality of openings; a coil formed of an electrically conductive material and embedded in the plurality of openings of the semiconductor substrate, the coil having a portion substantially parallel to the longitudinal axis and positioned in the cavity; and an insulating material positioned in the cavity and between the coil and an inner surface of the core for electrically insulating the core from the coil and reducing stress from a thermal expansion mismatch between the coil and the core.
A micro-fabricated electromagnetic device, integrated in an electronic circuit, contains a core significantly longer than its width, forming a cavity along its length. This core is built with multiple magnetic layers surrounding the cavity, each being a continuous segment for closed-loop magnetic flux. Electrically insulating layers alternate between the magnetic layers, forming a laminate and suppressing current flow. A semiconductor substrate with openings sits partially within the cavity. A coil, made of conductive material, is embedded in these openings, with part of it parallel to the core's length and inside the cavity. Insulating material fills the cavity between the coil and the core's inner surface, electrically isolating the coil and reducing stress from thermal expansion differences.
15. The micro-fabricated electromagnetic device of claim 14 , further comprising a second core having a width and a length along the longitudinal axis that is substantially greater than the width of the second core, the second core defining a second cavity along the longitudinal axis, and including: a second plurality of magnetic layers extending parallel to the longitudinal axis and surrounding the second cavity, each of the second plurality of magnetic layers being formed as a single and continuous segment, and a second plurality of electrically insulating layers positioned alternatingly between the second plurality of magnetic layers for suppressing the current flowing between the second plurality of magnetic layers, and collectively forming a continuous laminate having a second plurality of alternating magnetic and electrically insulating layers, wherein at least a second portion of the coil is substantially parallel to the longitudinal axis and passes through the second cavity.
The micro-fabricated electromagnetic device, with a coil embedded in a semiconductor substrate surrounded by a laminated core structure, also includes a second core with similar dimensions and a cavity. This second core has multiple magnetic layers extending parallel to the longitudinal axis and surrounding the second cavity, each a continuous segment. Alternating electrically insulating layers suppress current flow, forming a laminate. At least a second portion of the coil is parallel to the longitudinal axis and passes through this second cavity.
16. The micro-fabricated electromagnetic device of claim 14 , wherein the plurality of magnetic layers are made of a first material having high magnetic permeability and low magnetic coercivity, and the plurality of electrically insulating layers are formed of a ferrite material for reducing an eddy current between the plurality of magnetic layers and for reducing power loss.
In the micro-fabricated electromagnetic device described above, the magnetic layers are constructed from a material with high magnetic permeability and low magnetic coercivity. The electrically insulating layers are made of a ferrite material. This combination minimizes eddy currents between the magnetic layers and reduces power loss within the device.
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September 3, 2014
March 28, 2017
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